Abstract

In optical metrology, fringe projection and moire techniques have been widely used to measure the topography of objects. We can combine the advantages of the two techniques by applying a configuration of simultaneous dual projection in the fringe projection technique, which generates a superimposed fringe pattern containing a moire pattern that is phase modulated according to the topography. In this work, we present an analytic and comparative study of three methods to demodulate the phase of the moire pattern: the spatial, spatial-temporal, and temporal methods. Those methods consist of two steps: first, the moire pattern is extracted from the superimposed fringe pattern; next, the phase of the moire pattern is demodulated. The analytical results show that the resulting phase map has double phase sensitivity compared to that of the classical fringe projection technique. Experimental and numeric results prove the feasibility of this technique.

© 2021 Optical Society of America

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