Long-term changes in Al thin-film extreme ultraviolet filters

Jiri Schmidt; Karel Kolacek; Alexandr Frolov; Jaroslav Straus; Petr Hoffer; Vitaliy Stelmashuk; Andrii Tuholukov; Petr Jiricek; Jana Houdkova

doi:10.1364/AO.432592

Applied Optics
Vol. 60,
Issue 28,
pp. 8766-8773
(2021)
•https://doi.org/10.1364/AO.432592

Long-term changes in Al thin-film extreme ultraviolet filters

Jiri Schmidt, Karel Kolacek, Alexandr Frolov, Jaroslav Straus, Petr Hoffer, Vitaliy Stelmashuk, Andrii Tuholukov, Petr Jiricek, and Jana Houdkova

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Jiri Schmidt, Karel Kolacek, Alexandr Frolov, Jaroslav Straus, Petr Hoffer, Vitaliy Stelmashuk, Andrii Tuholukov, Petr Jiricek, and Jana Houdkova, "Long-term changes in Al thin-film extreme ultraviolet filters," Appl. Opt. 60, 8766-8773 (2021)

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Abstract

Thin-film Al filters are very popular owing to their high transmittance in the wavelength range of 17–67 nm and low transmittance in the visible and near-UV regions; however, they are prone to oxidation. The amorphous ${{\rm Al}_2}{{\rm O}_3}$ layers on the Al surfaces have much smaller transmittance than the bulk Al material; therefore, they strongly influence the total transmittance of the filter. This paper not only provides the transmittance of very old Al filters but also maps the transmittance development of Al filters over two years since their delivery (in 2016) in an uncontrolled atmosphere.

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Data Availability

The data belonging to attenuation measurements were extracted from our electronic workbook, the structure of which is hardly understandable to anybody else. In contrast, the data underlying recent PES measurements, though not available at this time, may be obtained from the authors upon reasonable request.

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Producer	Label	Nominal Thickness [µm]	Remark	Purchase Date	Application Dates
Goodfellow	Ga1	0.8	exposed	May 2, 2001	2012–2013
Goodfellow	Gb1	0.8	unexposed	May 2, 2001	2019
Goodfellow	Ga2	0.4	exposed	Nov. 5, 2009	2012–2013
Goodfellow	Gb2	0.4	unexposed	Nov. 5, 2009	2019
Lebow	L1	0.2	exposed	Feb. 16, 2016	2016–2019
Lebow	L2	0.4	exposed	Feb. 16, 2016	2016–2019
Lebow	L3	0.8	exposed	Feb. 16, 2016	2016–2019
Lebow	L4	1.0	exposed	Feb. 16, 2016	2016–2019
Lebow	L5	1.2	exposed	Feb. 16, 2016	2016–2019
Lebow	L6	1.6	exposed	Feb. 16, 2016	2016–2019
Lebow	L7	2.4	exposed	Feb. 16, 2016	2016–2019

	Al Filter 0.4 µm Gb2		Al Filter 0.8 µm Gb1
	Layer/Filter Thickness [nm] (95% Pure Al, Fig. 5)	Transmission (Calculated)	Layer/Filter Thickness [nm] (95% Pure Al, Fig. 5)	Transmission (Calculated)
Front surface layer	34.2	0.44443	69.6	0.22335
Central part of the filter	${331.6}_{- 100}^{+ 100}$	${0.40700}_{+ 0.10971}^{- 0.08641}$	${660.8}_{- 200.0}^{+ 200.0}$	${0.19808}_{+ 0.12118}^{- 0.07518}$
Rare surface layer	34.2	0.44443	69.6	0.22335
Whole filter	$400_{- 100}^{+ 100}$	${0.08039}_{+ 0.02167}^{- 0.01707}$	$800_{- 200.0}^{+ 200.0}$	${0.00988}_{+ 0.006045}^{- 0.003750}$

Parameter
Year	Average Attenuation Rate α [µm^-1] of Filter(s) Bulk Material	Transmission $T_{psl}$ of 1 Pair of ${A l}_{2} O_{3}$ Interfaces	Equivalent Thickness $d$ [nm] of 1 Pair of ${A l}_{2} O_{3}$ Interfaces
Henke	2.387
2016	${2.368}_{- 0.036}^{+ 0.035}$	${0.0849}_{- 0.0000}^{+ 0.0217}$	30.2–35.9
2017	2.660	—	—
2018	${3.035}_{- 0.069}^{+ 0.068}$	${0.1209}_{- 0.0000}^{+ 0.0665}$	25.9–30.7

Producer	Label	Nominal Thickness [µm]	Remark	Purchase Date	Application Dates
Goodfellow	Ga1	0.8	exposed	May 2, 2001	2012–2013
Goodfellow	Gb1	0.8	unexposed	May 2, 2001	2019
Goodfellow	Ga2	0.4	exposed	Nov. 5, 2009	2012–2013
Goodfellow	Gb2	0.4	unexposed	Nov. 5, 2009	2019
Lebow	L1	0.2	exposed	Feb. 16, 2016	2016–2019
Lebow	L2	0.4	exposed	Feb. 16, 2016	2016–2019
Lebow	L3	0.8	exposed	Feb. 16, 2016	2016–2019
Lebow	L4	1.0	exposed	Feb. 16, 2016	2016–2019
Lebow	L5	1.2	exposed	Feb. 16, 2016	2016–2019
Lebow	L6	1.6	exposed	Feb. 16, 2016	2016–2019
Lebow	L7	2.4	exposed	Feb. 16, 2016	2016–2019

	Al Filter 0.4 µm Gb2		Al Filter 0.8 µm Gb1
	Layer/Filter Thickness [nm] (95% Pure Al, Fig. 5)	Transmission (Calculated)	Layer/Filter Thickness [nm] (95% Pure Al, Fig. 5)	Transmission (Calculated)
Front surface layer	34.2	0.44443	69.6	0.22335
Central part of the filter	${331.6}_{- 100}^{+ 100}$	${0.40700}_{+ 0.10971}^{- 0.08641}$	${660.8}_{- 200.0}^{+ 200.0}$	${0.19808}_{+ 0.12118}^{- 0.07518}$
Rare surface layer	34.2	0.44443	69.6	0.22335
Whole filter	$400_{- 100}^{+ 100}$	${0.08039}_{+ 0.02167}^{- 0.01707}$	$800_{- 200.0}^{+ 200.0}$	${0.00988}_{+ 0.006045}^{- 0.003750}$

Abstract

Data Availability

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Figures (10)

Tables (3)

Equations (1)

Applied Optics