Correction of PZT scanner errors using a phase compensation method in white-light phase-shifting interferometry

Namyoon Kim; Soonyang Kwon

doi:10.1364/AO.437533

Applied Optics
Vol. 60,
Issue 30,
pp. 9311-9318
(2021)
•https://doi.org/10.1364/AO.437533

Correction of PZT scanner errors using a phase compensation method in white-light phase-shifting interferometry

Namyoon Kim and Soonyang Kwon

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Namyoon Kim and Soonyang Kwon, "Correction of PZT scanner errors using a phase compensation method in white-light phase-shifting interferometry," Appl. Opt. 60, 9311-9318 (2021)

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Table of Contents Category
- Instrumentation and Measurements
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The topics in this list come from the Optics and Photonics Topics applied to this article.

About this Article
History
- Original Manuscript: July 14, 2021
- Revised Manuscript: September 20, 2021
- Manuscript Accepted: September 25, 2021
- Published: October 13, 2021

Abstract

White-light phase-shifting interferometry (WLPSI) is widely used for obtaining surface profiles of inspection targets in liquid-crystal displays (LCD) and semiconductor manufacturing processes. Phase errors caused by irregular and nonlinear scanner movement are inevitable in WLPSI. Moreover, these errors affect the measurement stability. It is difficult to eliminate the mechanical and electrical delay of scanner movement entirely. A novel method, to the best of our knowledge, is proposed that consists of a scanner position tracking system and a phase correction algorithm called compensated peak detection and modified bucket algorithm. The proposed method is experimentally verified and outperforms the conventional phase corrections in both the measurement accuracy and the repeatability.

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Data Availability

Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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	Conventional Method	Proposed Method
Errors max-min (nm)	5.928	0.702
Repeatability $3 σ$ (nm)	5.492	0.792

	Error (nm)
	Conventional	Proposed
Linear	0	0
Case #1	18.2	2.4
Case #2	64.4	8.9
Case #3	137.5	8.6
Case #4	238.1	9.4

	Standard Sample (3.006 µm)
	Measurement Result (µm)		Measurement Error (nm)		Repeatability $3 σ$ (nm)
	Conventional	Proposed	Conventional	Proposed	Conventional	Proposed
10 µm/s	3.000	3.008	6.27	1.56	6.88	5.57
20 µm/s	2.997	3.009	8.53	2.71	7.49	6.20
30 µm/s	2.992	3.006	14.45	0.40	6.46	6.50
40 µm/s	2.982	3.006	24.45	0.05	8.44	6.69
	CS Sample (2.017 µm)
	Measurement Result (µm)		Measurement Error (nm)		Repeatability $3 σ$ (nm)
	Conventional	Proposed	Conventional	Proposed	Conventional	Proposed
10 µm/s	2.010	2.017	6.94	0.01	4.49	3.03
20 µm/s	2.006	2.016	10.76	0.87	6.77	5.47
30 µm/s	2.005	2.014	11.81	3.48	4.10	3.50
40 µm/s	2.000	2.013	17.40	3.77	5.28	5.20

	Standard Sample (3.006 µm)
	Measurement Result (µm)		Measurement Error (nm)		Repeatability $3 σ$ (nm)
	Conventional	Proposed	Conventional	Proposed	Conventional	Proposed
Position #1	2.975	3.006	31.46	0.29	6.89	5.97
Position #2	2.981	3.006	24.81	0.35	5.55	5.56
Position #3	2.996	3.012	10.26	5.82	4.57	4.33
Position #4	3.001	3.008	4.60	2.06	4.89	5.01
	CS Sample (2.017 µm)
	Measurement Result (µm)		Measurement Error (nm)		Repeatability $3 σ$ (nm)
	Conventional	Proposed	Conventional	Proposed	Conventional	Proposed
Position #1	1.986	2.015	31.03	2.09	6.19	4.02
Position #2	1.997	2.015	20.29	1.93	6.26	5.35
Position #3	1.998	2.013	19.10	4.17	6.42	6.31
Position #4	2.008	2.017	9.08	0.42	4.97	4.89

	Conventional Method	Proposed Method
Errors max-min (nm)	5.928	0.702
Repeatability $3 σ$ (nm)	5.492	0.792

Abstract

Data Availability

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Figures (13)

Tables (4)

Equations (14)

Applied Optics