Abstract

In this study, three flexible metal–semiconductor–metal ultraviolet photodetectors are fabricated on the FR4 fiberglass substrate based on the porous zinc oxide by radiofrequency sputtering. Their copper electrodes were created by printed circuit board, a simple and cheap method. Here, the effect of porosity on the photodetector parameters is discussed. The results show that the difference in the finger size in the photodetectors leads to differences in the parameters. In these photodetectors, as the fingers increase in length, dark current increases from 0.25 to 67.3 µA, photocurrent from 1.98 to 208 µA, and response time from 430 to 570 ms. Also, with expanding finger width, these parameters changed 18.48 µA, 26.8 µA, and 440 ms, respectively.

© 2021 Optical Society of America

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