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Speed enhancement of dynamic spectroscopic ellipsometry by using direct spectral phase extraction method

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Abstract

A rapid direct spectroscopic ellipsometric parameter extraction algorithm for computational speed enhancement of dynamic spectroscopic ellipsometry is described. The proposed direct spectral phase calculation method can provide a faster spectral phase extraction capability than a Fourier transform-based approach, while maintaining the same level of accuracy as that based on the Fourier transform method. We analyze some additional benefits and limitations of the proposed direct computational method in terms of enlarged $\Delta (\lambda)$ measurement spectral range and precision optimization.

© 2021 Optical Society of America

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Data Availability

Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the corresponding author upon reasonable request.

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