Abstract

This paper presents design and operation of a multi-axis optical probe for independently measuring the relative displacements of external surfaces. Displacement is measured by mechanically modulating the optical cavity formed by an internal surface and the external surfaces, each of which comprise a Fabry–Perot interferometer. Multiple sensing axes are created using a beam splitter, and these sensing axes are separated by modulating the measurement paths at different frequencies. Two probes have been fabricated and tested; the first uses a single laser source with axes monitored by shuttering; the second probe uses two source wavelengths with beam splitting achieved using dichroic mirrors. Experimental results are presented for mirrors moving independently over distances of 1 to 2 µm with displacement noise less than 10-nm rms that is higher than the noise floor of 2.8 nm for stationary mirrors. Currently, the bandwidth is limited to the modulation frequencies ranging between 200 Hz and 2.43 kHz.

© 2022 Optica Publishing Group

Miniature tri-axis accelerometer based on fiber optic Fabry-Pérot interferometer

Zhiyuan Qu, Ping Lu, Wanjin Zhang, Wanze Xiong, Deming Liu, and Jiangshan Zhang
Opt. Express 30(13) 23227-23237 (2022)

Compact fiber-optic Fabry–Perot cavity based on sandwich structure adopting direct bonding of quartz glass

Xiaoqiang Hua, Yongqiu Zheng, Jiamin Chen, Liyun Wu, Xinyu Zhao, Zonghao Li, Xiaoyu Gao, Chenzheng Zhou, Rui Gao, Jiawei Li, Jiandong Bai, Zhidong Zhang, and Chenyang Xue
Appl. Opt. 61(10) 2818-2824 (2022)

High-speed, large dynamic range spectral domain interrogation of fiber-optic Fabry–Perot interferometric sensors

Kit Pan Wong, Hyun-Tae Kim, Keshav Rajasekaran, Amirhossein Yazdkhasti, Bala Sai Sudhakar, An Wang, Samuel E. Lee, Kenneth Kiger, James H. Duncan, and Miao Yu
Appl. Opt. 61(16) 4670-4677 (2022)

Embedded micro-probe fiber optic interferometer with low nonlinearity against light intensity disturbance

Chen Zhang, Yisi Dong, Pengcheng Hu, Haijin Fu, Hongxing Yang, Ruitao Yang, and Limin Zou
Opt. Express 30(11) 17870-17885 (2022)

Large-area Fabry–Perot modulator based on electro-optic polymers

Nils Benter, Ralph Peter Bertram, Elisabeth Soergel, Karsten Buse, Dirk Apitz, Lærke Bang Jacobsen, and Peer Michael Johansen
Appl. Opt. 44(29) 6235-6239 (2005)