Highly uniform parallel scribing inside transparent materials with ultrafast lasers: from 2D to 3D

Jian Cheng; Songtao Liu; Jianfei Liao; Yutao Wang; Zhongsheng Zhai; Dun Liu

doi:10.1364/AO.451210

Applied Optics
Vol. 61,
Issue 11,
pp. 2943-2951
(2022)
•https://doi.org/10.1364/AO.451210

Highly uniform parallel scribing inside transparent materials with ultrafast lasers: from 2D to 3D

Jian Cheng, Songtao Liu, Jianfei Liao, Yutao Wang, Zhongsheng Zhai, and Dun Liu

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Jian Cheng, Songtao Liu, Jianfei Liao, Yutao Wang, Zhongsheng Zhai, and Dun Liu, "Highly uniform parallel scribing inside transparent materials with ultrafast lasers: from 2D to 3D," Appl. Opt. 61, 2943-2951 (2022)

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Abstract

Micromachining uniform features inside transparent materials is of great importance. The generation of highly uniform parallel laser beams based on spatial light modulators is a valid way to realize it. A movable magnifying optical feedback approach is proposed. By using a flip mirror and adjusting a movable stage, magnified 3D information such as energy and the position of the split individual parallel laser beams could be obtained and fed back for optimization. Thanks to this setup, active adjustment of holographic algorithm parameters for the energy uniformity and accurate temporal distribution of the parallel laser beams becomes possible. The feasibility and effectiveness of the proposed method are then demonstrated by laser scribing inside silica glass. We pave a way for uniform 3D laser manipulation and subtle microfabrication.

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Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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Equations (6)

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	D (µm)		Scribed Depth (µm)
Spot Number	Before Optimization	After Optimization	Before Optimization	After Optimization
1	3.2	3.6	13.6	19.8
2	3.3	3.6	15.7	19.7
3	3.6	3.7	20.3	20
4	3.3	3.5	15.6	17
5	3.8	3.5	22.3	18
6	4	3.7	24.1	22
7	3.5	3.7	16	21
8	3.5	3.7	16	21.3
9	3.3	3.6	15.8	18.7
10	3.6	3.7	21.6	19.6
Deviation	$3 . 6 \pm 0 . 4$	$3 . 6 \pm 0 . 1$	$18 . 85 \pm 5 . 25$	$19 . 5 \pm 2 . 5$

	D (µm)		Scribed Depth (µm)
Spot Number	Before Optimization	After Optimization	Before Optimization	After Optimization
1	3.56	3.32	24.42	15.32
2	3.3	3.3	18.22	14.87
3	3.42	3.36	20.32	16.92
4	3.2	3.34	16.68	14.86
5	3.24	3.36	18.54	16.83
6	3.2	3.35	16.83	15.77
7	3.3	3.36	15.78	16.23
8	3.2	3.4	15.62	16.39
9	–	3.34	–	16.14
Deviation	$3 . 38 \pm 0 . 18$	$3 . 35 \pm 0 . 05$	$20 . 02 \pm 4 . 4$	$15 . 89 \pm 1 . 03$

	D (µm)		Scribed Depth (µm)
Spot Number	Before Optimization	After Optimization	Before Optimization	After Optimization
1	3.2	3.6	13.6	19.8
2	3.3	3.6	15.7	19.7
3	3.6	3.7	20.3	20
4	3.3	3.5	15.6	17
5	3.8	3.5	22.3	18
6	4	3.7	24.1	22
7	3.5	3.7	16	21
8	3.5	3.7	16	21.3
9	3.3	3.6	15.8	18.7
10	3.6	3.7	21.6	19.6
Deviation	$3 . 6 \pm 0 . 4$	$3 . 6 \pm 0 . 1$	$18 . 85 \pm 5 . 25$	$19 . 5 \pm 2 . 5$

	D (µm)		Scribed Depth (µm)
Spot Number	Before Optimization	After Optimization	Before Optimization	After Optimization
1	3.56	3.32	24.42	15.32
2	3.3	3.3	18.22	14.87
3	3.42	3.36	20.32	16.92
4	3.2	3.34	16.68	14.86
5	3.24	3.36	18.54	16.83
6	3.2	3.35	16.83	15.77
7	3.3	3.36	15.78	16.23
8	3.2	3.4	15.62	16.39
9	–	3.34	–	16.14
Deviation	$3 . 38 \pm 0 . 18$	$3 . 35 \pm 0 . 05$	$20 . 02 \pm 4 . 4$	$15 . 89 \pm 1 . 03$

Abstract

Data availability

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Figures (19)

Tables (2)

Equations (6)

Applied Optics