Optical effect and pre-forming temperature field of in situ laser-assisted micro-stamping by a diamond indenter

Siwei Meng; Siwei Meng; Guangfeng Shi; Guangfeng Shi; Chunyang Zou; Hongda Li; Dong Yao; Yan Gao

doi:10.1364/AO.450958

Applied Optics
Vol. 61,
Issue 11,
pp. 3269-3278
(2022)
•https://doi.org/10.1364/AO.450958

Optical effect and pre-forming temperature field of in situ laser-assisted micro-stamping by a diamond indenter

Siwei Meng, Guangfeng Shi, Chunyang Zou, Hongda Li, Dong Yao, and Yan Gao

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Siwei Meng, Guangfeng Shi, Chunyang Zou, Hongda Li, Dong Yao, and Yan Gao, "Optical effect and pre-forming temperature field of in situ laser-assisted micro-stamping by a diamond indenter," Appl. Opt. 61, 3269-3278 (2022)

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Abstract

During in situ laser-assisted micro-stamping (In-LAS) using a diamond indenter, the temperature of the machined area cannot be accurately predicted because of the coupling of the beam with the diamond indenter. This study uses geometrical optics and wave optics to determine the effect of the taper angle on laser direction, the light intensity distribution at the diamond indenter tip, and the temperature field of the machined area. This research provides data support and a theoretical basis for the selection of related process parameters of In-LAS and delivers a feasible theoretical method for a similar in situ laser-assisted machining.

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Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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Parameters	Numerical Value
Taper angle $α_{0}$	45°, 55°, 65°
Radius of rounded cutting edge $R_{0}$	2.5 µm, 5 µm, 10 µm
Radius of laser spot $R_{2}$	25 µm
Laser wavelength $λ$	1.08 µm
Refractive index of diamond $n_{2}$	2.3911

Parameters	Numerical Value
Workpiece size	$10 m m * 10 m m * 0 . 5 m m$
Taper angle	65°
Feed rate	100 µm/s
Laser power	0, 10, 20, 30

Taper Angle $α_{0}$	Radius of Rounded Cutting Edge $R_{0}$ (µm)
45°	2.92 5.34 10.54
55°	2.66 5.11 8.50
65°	2.73 5.41 9.46

Parameters	Numerical Value
Taper angle $α_{0}$	65°
Radius of rounded cutting edge $R_{0}$	2.73 µm
Laser power $P$	10 W

Parameters	Numerical Value
Taper angle $α_{0}$	45°, 55°, 65°
Radius of rounded cutting edge $R_{0}$	2.5 µm, 5 µm, 10 µm
Radius of laser spot $R_{2}$	25 µm
Laser wavelength $λ$	1.08 µm
Refractive index of diamond $n_{2}$	2.3911

Abstract

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Equations (19)

Applied Optics