Abstract

For X-ray reflective optics that work based on the concept of total external reflection, coating the reflector surface with high-density film is a common idea to enhance performance. Atomic layer deposition (ALD) has been proven to be a promising way to coat the reflector surface with a large curvature, even the inner surface of an X-ray capillary. In this paper, ${\rm{Hf}}{{\rm{O}}_2}$ and iridium films were prepared on flat silicon and glass substrates via ALD, and X-ray reflectivity (XRR) was used as a main tool to investigate the effect of film properties on the total reflection performance.

© 2022 Optica Publishing Group

Design of a monocapillary with an inner Al₂O₃/HfO₂ multilayer to obtain focused monochromatic hard X-rays

Yanli Li, Wensi Lv, Xiangdong Kong, Huibin Zhao, and Li Han
Appl. Opt. 63(11) 2837-2842 (2024)

Iridium-coated micropore x-ray optics using dry etching of a silicon wafer and atomic layer deposition

Tomohiro Ogawa, Yuichiro Ezoe, Teppei Moriyama, Ikuyuki Mitsuishi, Takuya Kakiuchi, Takaya Ohashi, Kazuhisa Mitsuda, and Matti Putkonen
Appl. Opt. 52(24) 5949-5956 (2013)

Pt thermal atomic layer deposition for silicon x-ray micropore optics

Kazuma Takeuchi, Yuichiro Ezoe, Kumi Ishikawa, Masaki Numazawa, Masaru Terada, Daiki Ishi, Maiko Fujitani, Mark J. Sowa, Takaya Ohashi, and Kazuhisa Mitsuda
Appl. Opt. 57(12) 3237-3243 (2018)

Optical, structural, and functional properties of highly reflective and stable iridium mirror coatings for infrared applications

Paul Schmitt, Nadja Felde, Thorsten Döhring, Manfred Stollenwerk, Ingo Uschmann, Kevin Hanemann, Marie Siegler, Georg Klemm, Nancy Gratzke, Andreas Tünnermann, Stefan Schwinde, Sven Schröder, and Adriana Szeghalmi
Opt. Mater. Express 12(2) 545-559 (2022)

Investigation of boron carbide and iridium thin films, an enabling technology for future x-ray telescopes

S. Massahi, F. E. Christensen, D. D. M. Ferreira, S. Svendsen, P. L. Henriksen, L. M. Vu, N. C. Gellert, A. S. Jegers, B. Shortt, M. Bavdaz, I. Ferreira, M. Collon, B. Landgraf, D. Girou, A. Sokolov, and W. Schoenberger
Appl. Opt. 59(34) 10902-10911 (2020)