Femtosecond LIPSS on indium-tin-oxide thin films at IR wavelengths

Balázs Bánhegyi; Balázs Bánhegyi; László Péter; Péter Dombi; Péter Dombi; Zsuzsanna Pápa; Zsuzsanna Pápa

doi:10.1364/AO.444653

Applied Optics
Vol. 61,
Issue 2,
pp. 386-391
(2022)
•https://doi.org/10.1364/AO.444653

Femtosecond LIPSS on indium-tin-oxide thin films at IR wavelengths

Balázs Bánhegyi, László Péter, Péter Dombi, and Zsuzsanna Pápa

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Balázs Bánhegyi, László Péter, Péter Dombi, and Zsuzsanna Pápa, "Femtosecond LIPSS on indium-tin-oxide thin films at IR wavelengths," Appl. Opt. 61, 386-391 (2022)

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Abstract

We investigated laser-induced periodic surface structures (LIPSS) generated on indium-tin-oxide thin films with femtosecond laser pulses in the infrared region. Using pulses between 1.6 and 2.4 µm central wavelengths, we observed robust LIPSS morphologies with a periodicity close to ${\lambda}/10$. Supporting finite-difference time-domain calculations suggests that the surface forms are rooted in the field localization in the surface pits leading to a periodically increased absorption of the laser pulse energy that creates the observed periodic structures.

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Area in Fig. 5	Peak Intensity [ $W / {c m}^{2}$ ]	Surface Morphology
1.	$2.1 \times 10^{10}$	Cracks appear on the ITO surface due to thermal shock.
2.	$7.1 \times 10^{10}$	Nanometer-sized craters and vertical periodic splinters.
3.	$1.2 \times 10^{11}$	Separated periodic stripes with 150—300 nm periodicity.
4.	$1.6 \times 10^{11}$	Secondary, horizontal structure with 2 µm periodicity.
5.	$2.6 \times 10^{11}$	Partly ablated ITO with melted droplets.
6.	$3.2 \times 10^{11}$	Ablated ITO, periodically structured glass surface.

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Applied Optics