Sub-pixel dimensional and vision measurement method of eccentricity for annular parts

Yuntao Fang; Xiaodong Wang; Xiaodong Wang; Yunpeng Xin; Yi Luo; Yi Luo

doi:10.1364/AO.447705

Applied Optics
Vol. 61,
Issue 6,
pp. 1531-1538
(2022)
•https://doi.org/10.1364/AO.447705

Sub-pixel dimensional and vision measurement method of eccentricity for annular parts

Yuntao Fang, Xiaodong Wang, Yunpeng Xin, and Yi Luo

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Yuntao Fang, Xiaodong Wang, Yunpeng Xin, and Yi Luo, "Sub-pixel dimensional and vision measurement method of eccentricity for annular parts," Appl. Opt. 61, 1531-1538 (2022)

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Abstract

Eccentricity measurement of annular parts with millimeter scale and micrometer precision requirements is widely used in mechanical engineering applications. To realize accurate eccentricity measurement for large-scaled annular parts, a vision-based and sub-pixel dimensional measurement method is proposed. First, to facilitate the eccentricity measurement, an improved auto focus algorithm is introduced to provide better focused images of the measured parts. Then the traditional Canny operator is modified in gradient direction calculation and a double threshold process to locate the pixel edge more accurately. Next, a model-based sub-pixel edge detection method is studied to extract the sub-pixel edge coordinates. Finally, the eccentricity is calculated according to these sub-pixel edge coordinates. To guarantee measurement accuracy, the pixel equivalent and manual installation error of three degree of freedom (DOF) stages are calibrated, and the verification experiments indicate that the measurement error of the proposed method is better than 1.0 µm.

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Data availability

Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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Calibration Parameters	Results
$S_{x}$ (pixel equivalent in $x$ axis)	2.4844 µm/pixel
$S_{y}$ (pixel equivalent in $y$ axis)	2.4823 µm/pixel
$θ_{x}$	0.06°
$θ_{y}$	0.03°

					Difference
Eccentricity (a)	RHT (b)	GRCDR (c)	EDCircles(d)	This Paper (e)	$Δ x_{1}$ (b-a)	$Δ x_{2}$ (c-a)	$Δ x_{3}$ (d-a)	$Δ x_{4}$ (e-a)
0 µm	5.15 µm	4.95 µm	4.17 µm	0.87 µm	5.15 µm	4.95 µm	4.17 µm	0.87 µm
5 µm	10. 14 µm	9.97 µm	9.20 µm	5.92 µm	5.14 µm	4.97 µm	4.20 µm	0.92 µm
10 µm	15.17 µm	14.95 µm	14.18 µm	10.89 µm	5.17 µm	4.95 µm	4.18 µm	0.89 µm

					Difference
Eccentricity (a)	RHT (b)	GRCDR (c)	EDCircles (d)	This paper (e)	$Δ y_{1}$ (b-a)	$Δ y_{2}$ (c-a)	$Δ y_{3}$ (d-a)	$Δ y_{4}$ (e-a)
0 µm	5.21 µm	5.03 µm	4.45 µm	0.96 µm	5.21 µm	5.03 µm	4.45 µm	0.96 µm
5 µm	10. 18 µm	9.99 µm	4.43 µm	5.94 µm	5. 18 µm	4.99 µm	4.43 µm	0.94 µm
10 µm	15.19 µm	14.98 µm	14.42 µm	10.94 µm	5.19 µm	4.98 µm	4.42 µm	0.94 µm

Eccentricity	RHT (s)	GRCDR (s)	EDCircles (s)	This Paper (s)
x:0	36.011	25.544	21.347	9.756
x:5	35.963	24.689	20.479	9.866
x:10	35.966	26.565	21.763	10.015
Average	35.9980	25.599	21.196	9.879

Calibration Parameters	Results
$S_{x}$ (pixel equivalent in $x$ axis)	2.4844 µm/pixel
$S_{y}$ (pixel equivalent in $y$ axis)	2.4823 µm/pixel
$θ_{x}$	0.06°
$θ_{y}$	0.03°

Abstract

Data availability

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Figures (8)

Tables (4)

Equations (22)

Applied Optics