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Design and fabrication of SU-8 polymer arrayed waveguide gratings based on flexible PDMS substrates

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Abstract

We investigated and fabricated ${{1}} \times {{8}}$ and ${{1}} \times {{16}}$ traditional/saddle arrayed waveguide grating (AWG) wavelength division multiplexing devices on flexible substrates. The core layer was made of the negative epoxy photoresist SU-8, and polydimethylsiloxane (PDMS) material was selected for the cladding based on the high refractive index difference. A chemical modification method of PDMS was proposed to enhance the film-forming characteristics of the SU-8 core layer on PDMS substrates. After fabricating and characterizing the optical properties of the AWGs, the dimensions of the proposed ${{1}} \times {{8}}$ and ${{1}} \times {{16}}$ AWGs were ${0.9} \times {0.8}\;{\rm{cm}}^2$ and ${1.1} \times {0.9}\;{\rm{cm}}^2$, respectively. Experimental results showed that the saddle-type ${{1}} \times {{8}}$ and ${{1}} \times {{16}}$ AWGs had good signal transmission characteristics, and the insertion losses were only 5.1 dB and 6.8 dB, respectively, which were lower than those of traditional-type AWGs with the same dimensions and number of waveguides.

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