Ultra-compact on-chip meta-waveguide phase modulator based on split ring magnetic resonance

Jianfeng Xiong; Ming Chen; Jinbiao Liu; Ziyong Wu; Chuanxin Teng; Shijie Deng; Houquan Liu; Shiliang Qu; Libo Yuan; Yu Cheng; Yu Cheng

doi:10.1364/AO.487760

Applied Optics
Vol. 62,
Issue 15,
pp. 4060-4073
(2023)
•https://doi.org/10.1364/AO.487760

Ultra-compact on-chip meta-waveguide phase modulator based on split ring magnetic resonance

Jianfeng Xiong, Ming Chen, Jinbiao Liu, Ziyong Wu, Chuanxin Teng, Shijie Deng, Houquan Liu, Shiliang Qu, Libo Yuan, and Yu Cheng

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Jianfeng Xiong, Ming Chen, Jinbiao Liu, Ziyong Wu, Chuanxin Teng, Shijie Deng, Houquan Liu, Shiliang Qu, Libo Yuan, and Yu Cheng, "Ultra-compact on-chip meta-waveguide phase modulator based on split ring magnetic resonance," Appl. Opt. 62, 4060-4073 (2023)

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Table of Contents Category
- Optical Devices, Sensors, and Detectors
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About this Article
History
- Original Manuscript: February 20, 2023
- Revised Manuscript: April 19, 2023
- Manuscript Accepted: April 25, 2023
- Published: May 17, 2023

Abstract

With the development of photonic integration technology, meta-waveguides have become a new research hotspot. They have broken through the theoretical diffraction limit by virtue of the strong electromagnetic manipulation ability of the metasurface and the strong electromagnetic field limitation and guidance ability of the waveguide. However, the reported meta-waveguides lack research on dynamic modulation. Therefore, we analyze the modulation effect of the metasurface on the optical field in the waveguide and design an ultra-compact on-chip meta-waveguide phase modulator using split ring magnetic resonance. It has a very short modulation length of only 3.65 µm, wide modulation bandwidth of 116.8 GHz, and low energy consumption of 263.49 fJ/bit. By optimizing the structure, the energy consumption can be further reduced to 90.69 fJ/bit. Meta-waveguides provide a promising method for the design of integrated photonic devices.

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Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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Name	Symbol	Value	Unit	Name	Symbol	Value	Unit
Length of SRR in $y$ direction	$a_{0}$	0.3	µm	Length of SRR in $x$ direction	$b_{0}$	0.15	µm
Slit width of SRR	$g_{0}$	0.03	µm	Height of SRR	$h_{g}$	0.12	µm
Width of SRR	$w_{m}$	0.05	µm	Waveguide width	$w_{1}$	0.48	µm
Waveguide height	$h_{1}$	0.22	µm	Thickness of h-BN	$h_{b}$	0.06	µm
Length of the meta-waveguide	$L$	3.65	µm	Overlap width of graphene	$w_{2}$	0.03	µm
Width of graphene	$w_{g}$	1.6	µm	Spacing of bilayer graphene	$t_{0}$	5	nm
Thickness of graphene	$d_{g}$	0.34	nm

References	Length (µm)	Loss (dB)	$E_{c}$ (fJ/bit)	$f_{3 d B}$ (GHz)
[45]	850	2.8	380	19
[26]	240	1.92	14	48.6
[26]	160	1.28	17	48.6
[38]	96.63	1.55	97.64	14.2
[26]	80	0.64	54	48.3
[39]	75.6	4.35	452	119.5
[27]	20	6	157.49	67.96
This paper (SRR)	3.65	7.58	263.49	116.8
This paper (rounded SRR)	3.65	7.77	90.69	116.8

Name	Symbol	Value	Unit	Name	Symbol	Value	Unit
Length of SRR in $y$ direction	$a_{0}$	0.3	µm	Length of SRR in $x$ direction	$b_{0}$	0.15	µm
Slit width of SRR	$g_{0}$	0.03	µm	Height of SRR	$h_{g}$	0.12	µm
Width of SRR	$w_{m}$	0.05	µm	Waveguide width	$w_{1}$	0.48	µm
Waveguide height	$h_{1}$	0.22	µm	Thickness of h-BN	$h_{b}$	0.06	µm
Length of the meta-waveguide	$L$	3.65	µm	Overlap width of graphene	$w_{2}$	0.03	µm
Width of graphene	$w_{g}$	1.6	µm	Spacing of bilayer graphene	$t_{0}$	5	nm
Thickness of graphene	$d_{g}$	0.34	nm

References	Length (µm)	Loss (dB)	$E_{c}$ (fJ/bit)	$f_{3 d B}$ (GHz)
[45]	850	2.8	380	19
[26]	240	1.92	14	48.6
[26]	160	1.28	17	48.6
[38]	96.63	1.55	97.64	14.2
[26]	80	0.64	54	48.3
[39]	75.6	4.35	452	119.5
[27]	20	6	157.49	67.96
This paper (SRR)	3.65	7.58	263.49	116.8
This paper (rounded SRR)	3.65	7.77	90.69	116.8

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Equations (19)

Applied Optics