Quantitative phase-amplitude surface determination in reflection differential interference contrast profilometry

A. V. Postnikov

doi:10.1364/AO.491470

Applied Optics
Vol. 62,
Issue 17,
pp. 4557-4562
(2023)
•https://doi.org/10.1364/AO.491470

Quantitative phase-amplitude surface determination in reflection differential interference contrast profilometry

A. V. Postnikov

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A. V. Postnikov, "Quantitative phase-amplitude surface determination in reflection differential interference contrast profilometry," Appl. Opt. 62, 4557-4562 (2023)

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Abstract

An approach for measuring the surface profile of the samples with reflection variations using the Nomarski differential interference method is presented. The system is analyzed with Jones’s matrices tool, and polarization effects of a non-polarizing beam splitter are taken into account. Equations are also developed to allow the determination of the surface profile from interference intensity when the sample reflectively is not uniform. The validity and accuracy of the measurement are verified by measuring the adhered silicon cantilever on a substrate with high reflectivity. This method is expected to be a valuable tool to inspect elements of micromechanics and microsystems.

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Data availability

Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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	HWP Orientation
PA	$θ = 0$ ( $P$ )		$θ = π / 4$ ( $S$ )
Orientation	$I_{V}$	$I_{H}$	$I_{V}$	$I_{H}$	$θ_{e q}$	$- θ_{e q}$
0	0.853	0.827	0.431	0.442	1.12	1.145
$π / 2$	0.329	0.274	0.173	0.141	0.441	0.369
$K_{0}$	0.74	0.73	0.39	0.375
$K_{90}$	0.725	0.74	0.41	0.397

		Intensity a.u.	$δ^{\circ}$	$h$ , nm	$h$ Theory, nm
HWP 0° $S$	PA 0	3.03	4	3.3	0
		1.69	82	72	79
		0.34	144	127	158
	PA $π / 2$	1.04	166	146	158
		0.58	90	79	79
		0.11	19	17	0
HWP 45° $P$	PA 0	0.17	173	152.6	158
		0.89	92	81	79
		1.6	17.7	15.5	0
	PA $π / 2$	0.01	1.7	1.5	0
		0.28	90	79	79
		0.55	150	132	158

	HWP Orientation
PA	$θ = 0$ ( $P$ )		$θ = π / 4$ ( $S$ )
Orientation	$I_{V}$	$I_{H}$	$I_{V}$	$I_{H}$	$θ_{e q}$	$- θ_{e q}$
0	0.853	0.827	0.431	0.442	1.12	1.145
$π / 2$	0.329	0.274	0.173	0.141	0.441	0.369
$K_{0}$	0.74	0.73	0.39	0.375
$K_{90}$	0.725	0.74	0.41	0.397

		Intensity a.u.	$δ^{\circ}$	$h$ , nm	$h$ Theory, nm
HWP 0° $S$	PA 0	3.03	4	3.3	0
		1.69	82	72	79
		0.34	144	127	158
	PA $π / 2$	1.04	166	146	158
		0.58	90	79	79
		0.11	19	17	0
HWP 45° $P$	PA 0	0.17	173	152.6	158
		0.89	92	81	79
		1.6	17.7	15.5	0
	PA $π / 2$	0.01	1.7	1.5	0
		0.28	90	79	79
		0.55	150	132	158

Abstract

Data availability

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Tables (2)

Equations (14)

Applied Optics