Abstract
A concept for the fast measurement and reconstruction of optical wavefronts using Shack–Hartmann sensors (SHSs) is presented. For wavefronts with a diameter at the scale of several tens of millimeters, hundreds of measurements with an SHS may be necessary to cover the wavefront. In the proposed concept, a few SHSs are used to measure about 2% of the entire wavefront, providing sufficient measurement data for its successful reconstruction. The small number of SHSs mounted in parallel makes the concept suitable for time-critical applications. A simulation analysis is performed, and an experimental validation of the concept is presented, demonstrating that the wavefront can be reconstructed with an RMS error of about 100 nm.
© 2023 Optica Publishing Group
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