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Wide field 3D optical profilometry using a diffraction Lloyd’s mirror interferometer

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Abstract

Interference fringe projection is used as a non-contact optical profilometry method for accurate 3D measurements. In interferometric fringe projection schemes, the maximum measurable size of the test object is limited by the optics of the interferometer. In this work, we report the application of a diffraction Lloyd’s mirror interferometer (DLMI) as a wide-field sinusoidal fringe projection system for 3D shape measurement. The DLMI works on diffracted light and therefore generates interference fringes over a large area. This enables measurement of large objects using DLMI as compared to a conventional Lloyd’s mirror interferometer. The performance of the proposed system is evaluated in terms of its stability and reproducibility of the results through measurement of the standard deviation in the phase values.

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Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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