Quality inspection of cube beam splitters by a&#x00A0;white light interferometric approach

Zheng Zhang; Zheng Zhang; Zheng Zhang; Xiaoyue Qiao; Sen Han; Sen Han; Shijie Liu; Shijie Liu; Rong Su; Rong Su

doi:10.1364/AO.480251

Applied Optics
Vol. 62,
Issue 4,
pp. 1076-1081
(2023)
•https://doi.org/10.1364/AO.480251

Quality inspection of cube beam splitters by a white light interferometric approach

Zheng Zhang, Xiaoyue Qiao, Sen Han, Shijie Liu, and Rong Su

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Zheng Zhang, Xiaoyue Qiao, Sen Han, Shijie Liu, and Rong Su, "Quality inspection of cube beam splitters by a white light interferometric approach," Appl. Opt. 62, 1076-1081 (2023)

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Related Topics
Table of Contents Category
- Instrumentation and Measurements
Optics & Photonics Topics
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The topics in this list come from the Optics and Photonics Topics applied to this article.

About this Article
History
- Original Manuscript: November 4, 2022
- Revised Manuscript: December 22, 2022
- Manuscript Accepted: December 27, 2022
- Published: January 30, 2023

Abstract

Beam splitters have a wide range of applications as a key component in optical systems. Adopting beam splitters with geometric defects in an optical system, e.g., an interferometric measurement system, may cause additional optical path difference and degrade the measurement accuracy. The quality inspection of beam splitters is essential to meet the accuracy requirements for modern optical systems. Most of the current quality inspection methods rely on inefficient and inaccurate manual observation. Therefore, for commonly used cube beam splitters (CBSs), we propose a digital method to quantify the geometric quality based on the white light interferometric principle. A Fourier domain analysis is used to calculate the CBS misalignment error and perpendicularity error. This method is verified by inspecting six different CBS samples. The experimental results show that all samples have varying degrees of misalignment and perpendicularity errors. The maximum perpendicularity error is 0.93°, and three of the six samples have misalignment errors larger than 50 µm. Nanometer level precision of the misalignment measurement can be achieved.

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Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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CBS Sample Number	Size/mm	Working Wavelength/nm	Splitting Ratio	Beam Splitter Coating Parameter
Sample A	$25.4 \times 25.4 \times 25.4$	400–700	50:50	$T = 47 \pm 10 %$ , $R = 47 \pm 10 %$ , $T + R > 85 %$
Sample B	$25.4 \times 25.4 \times 25.4$	400–700	50:50	$T = 47 \pm 10 %$ , $R = 47 \pm 10 %$ , $T + R > 95 %$
Sample C	$25.4 \times 25.4 \times 25.4$	400–700	50:50	$T = 47 \pm 10 %$ , $R = 47 \pm 10 %$ , $T + R > 90 %$
Sample D	$20 \times 20 \times 20$	400–700	50:50	$T = 47 \pm 10 %$ , $R = 47 \pm 10 %$ , $T + R > 90 %$
Sample E	$20 \times 20 \times 20$	400–700	50:50	$T = 47 \pm 10 %$ , $R = 47 \pm 10 %$ , $T + R > 85 %$
Sample F	$20 \times 20 \times 20$	400–700	50:50	$T = 47 \pm 10 %$ , $R = 47 \pm 10 %$ , $T + R > 95 %$

Sample Number	Misalignment/ $µ m$	$θ_{x} /^{\circ}$	$θ_{y} /^{\circ}$
Sample A	$1.11 \pm 0.01$	0.15	0.07
Sample B	$> 51.85$	—	—
Sample C	$> 51.85$	—	—
Sample D	$0.83 \pm 0.02$	0.93	0.05
Sample E	4.55–51.85	0.07	0.02
Sample F	$> 51.85$	—	—

CBS Sample Number	Size/mm	Working Wavelength/nm	Splitting Ratio	Beam Splitter Coating Parameter
Sample A	$25.4 \times 25.4 \times 25.4$	400–700	50:50	$T = 47 \pm 10 %$ , $R = 47 \pm 10 %$ , $T + R > 85 %$
Sample B	$25.4 \times 25.4 \times 25.4$	400–700	50:50	$T = 47 \pm 10 %$ , $R = 47 \pm 10 %$ , $T + R > 95 %$
Sample C	$25.4 \times 25.4 \times 25.4$	400–700	50:50	$T = 47 \pm 10 %$ , $R = 47 \pm 10 %$ , $T + R > 90 %$
Sample D	$20 \times 20 \times 20$	400–700	50:50	$T = 47 \pm 10 %$ , $R = 47 \pm 10 %$ , $T + R > 90 %$
Sample E	$20 \times 20 \times 20$	400–700	50:50	$T = 47 \pm 10 %$ , $R = 47 \pm 10 %$ , $T + R > 85 %$
Sample F	$20 \times 20 \times 20$	400–700	50:50	$T = 47 \pm 10 %$ , $R = 47 \pm 10 %$ , $T + R > 95 %$

Sample Number	Misalignment/ $µ m$	$θ_{x} /^{\circ}$	$θ_{y} /^{\circ}$
Sample A	$1.11 \pm 0.01$	0.15	0.07
Sample B	$> 51.85$	—	—
Sample C	$> 51.85$	—	—
Sample D	$0.83 \pm 0.02$	0.93	0.05
Sample E	4.55–51.85	0.07	0.02
Sample F	$> 51.85$	—	—

Abstract

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Applied Optics