Abstract

Ellipsometry is a powerful and sensitive optical method for the investigation of surfaces and thin films. However, the absence of possibilities for direct interpretation of the ellipsometric spectra creates an impression of the complexity of this method and the difficulty in its application, so any approach for qualitative interpretation of the ellipsometric spectra is very desirable. This work is devoted to this problem with the example of the modulation of the ellipsometric spectra of a substrate by the resonances of a thin deposited film.

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Combined reflection and transmission thin-film ellipsometry: a unified linear analysis

R. M. A. Azzam, M. Elshazly-Zaghloul, and N. M. Bashara
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Line-shape analysis of ellipsometric spectra on thin organic films

Hans Arwin, Jan Mårtensson, and Roger Jansson
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Limitations to the determination of the optical properties of a thin film by combined ellipsometric and surface plasmon resonance measurements

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Precision in the ellipsometric determination of the optical constants of very thin films

G. Vuye and T. López-Ríos
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Inversion of reflection ellipsometric data

John Lekner
Appl. Opt. 33(22) 5159-5165 (1994)