Abstract
Ellipsometry is a powerful and sensitive optical method for the investigation of surfaces and thin films. However, the absence of possibilities for direct interpretation of the ellipsometric spectra creates an impression of the complexity of this method and the difficulty in its application, so any approach for qualitative interpretation of the ellipsometric spectra is very desirable. This work is devoted to this problem with the example of the modulation of the ellipsometric spectra of a substrate by the resonances of a thin deposited film.
© 2023 Optica Publishing Group
Full Article |
PDF Article
More Like This
References
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription
Data availability
Data underlying the results presented in this paper were either calculated by presented expressions or modeled for structures with given parameters. Data may be obtained from the authors upon reasonable request.
Cited By
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription
Equations (25)
You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription