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Exhibition of a film’s resonances in ellipsometric spectra and the Berreman effect

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Abstract

Ellipsometry is a powerful and sensitive optical method for the investigation of surfaces and thin films. However, the absence of possibilities for direct interpretation of the ellipsometric spectra creates an impression of the complexity of this method and the difficulty in its application, so any approach for qualitative interpretation of the ellipsometric spectra is very desirable. This work is devoted to this problem with the example of the modulation of the ellipsometric spectra of a substrate by the resonances of a thin deposited film.

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Data availability

Data underlying the results presented in this paper were either calculated by presented expressions or modeled for structures with given parameters. Data may be obtained from the authors upon reasonable request.

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Equations (25)

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