Tantalum oxide and silicon oxide mixture coatings deposited using microwave plasma assisted co-sputtering for optical mirror coatings in gravitational wave detectors

Shigeng Song; Shigeng Song; Sijia Cai; Daxing Han; Carlos García Nuñez; Gong Zhang; Gavin Wallace; Lewis Fleming; Kieran Craig; Stuart Reid; Iain W. Martin; Sheila Rowan; Des Gibson; Des Gibson; Des Gibson

doi:10.1364/AO.477211

Applied Optics
Vol. 62,
Issue 7,
pp. B73-B78
(2023)
•https://doi.org/10.1364/AO.477211

Tantalum oxide and silicon oxide mixture coatings deposited using microwave plasma assisted co-sputtering for optical mirror coatings in gravitational wave detectors

Shigeng Song, Sijia Cai, Daxing Han, Carlos García Nuñez, Gong Zhang, Gavin Wallace, Lewis Fleming, Kieran Craig, Stuart Reid, Iain W. Martin, Sheila Rowan, and Des Gibson

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Shigeng Song, Sijia Cai, Daxing Han, Carlos García Nuñez, Gong Zhang, Gavin Wallace, Lewis Fleming, Kieran Craig, Stuart Reid, Iain W. Martin, Sheila Rowan, and Des Gibson, "Tantalum oxide and silicon oxide mixture coatings deposited using microwave plasma assisted co-sputtering for optical mirror coatings in gravitational wave detectors," Appl. Opt. 62, B73-B78 (2023)

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Abstract

This work presents the characterization of the optical and mechanical properties of thin films based on ${({{\rm Ta}_2}{{\rm O}_5})_{1 - x}}{({{\rm SiO}_2})_x}$ mixed oxides deposited by microwave plasma assisted co-sputtering, including post-annealing treatments. The deposition of low mechanical loss materials (${3} \times {{10}^{- 5}}$) with a high refractive index (1.93) while maintaining low processing costs was achieved and the following trends were demonstrated: The energy band gap increased as the ${{\rm SiO}_2}$ concentration was increased in the mixture, and the disorder constant decreased when the annealing temperatures increased. Annealing of the mixtures also showed positive effects to reduce the mechanical losses and the optical absorption. This demonstrates their potential as an alternative high-index material for optical coatings in gravitational wave detectors using a low-cost process.

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Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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	Ta Target, Power Control			Si Target, Voltage Control
No.	$P$ (KW)	$D$ Rate (Å/s)	ET (nm)	$V$ (V)	$D$ Rate (Å/s)	ET(nm)	Expected ${T a}_{2} O_{5}$ Volume Fraction
1	3.5	2.7	500	0	0	0	1
2	0	0	0	400	0.85	500	0
3	3.5	2.7	380	400	0.85	120	0.76
4	2.4	1.9	345	400	0.85	155	0.69
5	1.5	1.1	256	400	0.85	244	0.51
6	0.9	0.6	207	400	0.85	293	0.41

No.	$n$	$ε$	EVF of ${T a}_{2} O_{5}$	CVF of ${T a}_{2} O_{5}$	ET (nm)	FT (nm)
1	2.122	4.503	1	1	500	486.9
2	1.460	2.132	0	0	500	533.0
3	1.990	3.960	0.76	0.806	500	492.4
4	1.930	3.725	0.69	0.719	500	487.8
5	1.833	3.360	0.51	0.577	500	467.7
6	1.713	2.934	0.41	0.399	500	502.0

No.	${T a}_{2} O_{5}$ CVF	F (Hz)	$ϕ_{s} (\times 10^{- 6})$	$ϕ_{cs} (\times 10^{- 6})$	$E_{s} / E_{c}$	$ϕ_{c} (\times 10^{- 4})$
1	1.000	530.62	$1.82 \pm 0.01$	$12 \pm 2$	148.04	$14 \pm 4$
3	0.806	527.95	$4.11 \pm 0.06$	$10.9 \pm 0.4$	147.71	$10.3 \pm 0.5$
4	0.719	532.96	$1.71 \pm 0.01$	$5.2 \pm 0.5$	148.74	$5.7 \pm 0.7$
5	0.577	528.53	$1.35 \pm 0.01$	$5.1 \pm 0.4$	147.46	$5.9 \pm 0.6$
6	0.399	532.61	$2.52 \pm 0.01$	$6.2 \pm 0.6$	148.56	$5.7 \pm 0.9$
2	0.000	521.43	$3.83 \pm 0.02$	$9.6 \pm 0.6$	246.14	$15 \pm 2$

No.	${T a}_{2} O_{5}$ CVF	eV	As Deposited	200°C	400°C	600°C
1	1.000	$E_{g 0}$	4.235	4.246	4.270	4.273
1	1.000	$γ$	0.0777	0.0767	0.0743	0.0740
2	0.000	$E_{g 0}$	–	–	–	–
2	0.000	$γ$	–	–	–	–
3	0.806	$E_{g 0}$	4.380	4.391	4.404	4.399
3	0.806	$γ$	0.0854	0.0862	0.0797	0.0789
4	0.719	$E_{g 0}$	4.438	4.454	4.466	4.459
4	0.719	$γ$	0.0850	0.0882	0.0814	0.0809
5	0.577	$E_{g 0}$	4.547	4.562	4.570	4.555
5	0.577	$γ$	0.0867	0.0892	0.0834	0.0842
6	0.399	$E_{g 0}$	4.674	4.691	4.696	4.675
6	0.399	$γ$	0.0905	0.0942	0.0876	0.0880

	Ta Target, Power Control			Si Target, Voltage Control
No.	$P$ (KW)	$D$ Rate (Å/s)	ET (nm)	$V$ (V)	$D$ Rate (Å/s)	ET(nm)	Expected ${T a}_{2} O_{5}$ Volume Fraction
1	3.5	2.7	500	0	0	0	1
2	0	0	0	400	0.85	500	0
3	3.5	2.7	380	400	0.85	120	0.76
4	2.4	1.9	345	400	0.85	155	0.69
5	1.5	1.1	256	400	0.85	244	0.51
6	0.9	0.6	207	400	0.85	293	0.41

Abstract

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Applied Optics