Abstract

Optical probes are the preferred choice for high-precision surface metrology, necessitating improved flexibility and a broader range of motion to adapt to the increasing complexity of surfaces. This study introduces an interferometric probe designed for measuring aspheric surfaces, utilizing a wave-plate-array detection component. By integrating splitter elements into the detector, the probe improves integration and dynamic scanning performance, while maintaining high-precision measurement capability. The system design and working principle are explored, and comprehensive nonlinear models based on the Jones matrix theory are established. These models focus on the nonlinear errors arising from alignment errors in various cases. Moreover, rigorous numerical simulations and optical experiments are conducted to validate the proposed models. When the alignment error reaches 10°, it results in a maximum nonlinear error of 3.02 nm. The experimental results demonstrate the effectiveness of the models in capturing nonlinear errors induced by alignment errors, providing a theoretical foundation for error reduction and compensation.

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