Equivalent circuit model of the traveling wave electrode for lithium niobate thin film Mach–Zehnder modulators

Yanting Guo; Lianyan Li; Yunshan Zhang; Shiyuan Sun; Qihong Quan; Yuechun Shi

doi:10.1364/AO.509361

Applied Optics
Vol. 63,
Issue 3,
pp. 617-623
(2024)
•https://doi.org/10.1364/AO.509361

Equivalent circuit model of the traveling wave electrode for lithium niobate thin film Mach–Zehnder modulators

Yanting Guo, Lianyan Li, Yunshan Zhang, Shiyuan Sun, Qihong Quan, and Yuechun Shi

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Yanting Guo, Lianyan Li, Yunshan Zhang, Shiyuan Sun, Qihong Quan, and Yuechun Shi, "Equivalent circuit model of the traveling wave electrode for lithium niobate thin film Mach–Zehnder modulators," Appl. Opt. 63, 617-623 (2024)

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Abstract

We propose an equivalent circuit model of the traveling wave electrode for lithium niobate thin film (TFLN) Mach–Zehnder modulators, in which the distributed capacitance and conformal mapping techniques are applied to calculate the microwave refractive index, microwave loss, and characteristic impedance. Their accuracies are verified by comparing with the results of the finite element method, and the relative errors are less than 3.282%, 1.776%, and 5.334%, respectively. The influence of the electrode’s structural parameters on the modulation performances is analyzed, and a 3 dB modulation bandwidth around 84 GHz with an 8-mm-long traveling wave electrode is obtained.

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Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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$V_{π} \cdot L$ (V·cm)	$f_{3 d B}$ (GHz)	Optical Group Index	Microwave Index	Reference
2.8/2.3/2.2	45/80/100	2.2	2.2	[1]
2.47/2.325	48/67	/	/	[9]
1.75	40	2.27	2.27	[10]
3.068	60	/	/	[11]
1.8	15	/	/	[12]

$H_{s u b}$ (µm)	$H_{b o x}$ (µm)	$H_{s l a b}$ (µm)	$H_{m e t a l}$ (µm)
500	4.7	0.3	2.2
$W$ (µm)	$G$ (µm)	$h_{4}$ (µm)	$l$ (mm)
13.3	5.3	0.4	8

$W$ (µm)	$f_{3 d B}$ (GHz)	$H_{m e t a l}$ (µm)	$f_{3 d B}$ (GHz)	$G$ (µm)	$f_{3 d B}$ (GHz)
8	73.11	2.0	75.28	4.0	45.95
10	75.28	2.5	70.03	4.7	59.13
12	80.75	3.0	65.59	5.4	69.81
14	77.27	3.5	61.08	6.1	75.23
16	63.04	4.0	57.00	6.8	75.21
18	57.48	4.5	53.27	7.5	74.62
20	51.86	5.0	48.84	8.2	73.33

$H_{s u b}$ (µm)	$H_{b o x}$ (µm)	$H_{s l a b}$ (µm)	$H_{m e t a l}$ (µm)
500	4.7	0.3	2.5
$W$ (µm)	$G$ (µm)	$h_{4}$ (µm)	$l$ (mm)
13	8	0.4	8

$V_{π} \cdot L$ (V·cm)	$f_{3 d B}$ (GHz)	Optical Group Index	Microwave Index	Reference
2.8/2.3/2.2	45/80/100	2.2	2.2	[1]
2.47/2.325	48/67	/	/	[9]
1.75	40	2.27	2.27	[10]
3.068	60	/	/	[11]
1.8	15	/	/	[12]

Abstract

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Figures (6)

Tables (4)

Equations (13)

Applied Optics