Abstract

In response to the urgent need for highly precise and efficient stitching measurements of large-aperture-angle non-holonomic spherical surfaces, a differential confocal interference automatic stitching measurement system for large-aperture-angle non-holonomic spherical surfaces was developed. The system realizes precise positioning of the confocal position through differential confocal precise focusing technology. Through the stitching model, coordinate transformation and error compensation were performed on subaperture data, and the stitching measurement of the spherical surface shape was realized. The positions and postures of the tested samples were adjusted automatically using an automatic adjustment workbench. The stitching measurement accuracy of this measurement system can attain $0.0013\lambda$, relative error can attain 1.36%, and measurement time for eight subaperture stitching is 6 min. This system achieves automatic and rapid adjustment of large-aperture-angle spherical elements and high-precision, nondestructive, fast, and automatic measurement of surface stitching.

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