Abstract

The reflection–transmission method for determining the optical constants of a film on a substrate has been examined and a computer program for the solution of the equation system has been written. A new method involving only transmittance data in a limited wavelength region has been worked out and has been found to give accurate results. The computer program for this method gives directly n and k curves from the transmission curve.

© 1968 Optical Society of America

Derivation of Optical Constants of Metals from Thin-Film Measurements at Oblique Incidence

J. E. Nestell and R. W. Christy
Appl. Opt. 11(3) 643-651 (1972)

Determination of thickness and optical constants of thin films from photometric and ellipsometric measurements

Eduardo Elizalde, Jean Marc Frigerio, and Josette Rivory
Appl. Opt. 25(24) 4557-4561 (1986)

Determination of the optical constants of a thin film from transmittance measurements of a single film thickness

Kent F. Palmer and Michael Z. Williams
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Determination of Optical Constants from Reflectance or Transmittance Measurements on Bulk Crystals or Thin Films

Hans W. Verleur
J. Opt. Soc. Am. 58(10) 1356-1364 (1968)

Analysis of errors in thin-film optical parameters derived from spectrophotometric measurements at normal light incidence

Ivan Konstantinov, Tzewatanka Babeva, and Snejana Kitova
Appl. Opt. 37(19) 4260-4267 (1998)