20 May 2022, Volume 61, Issue 15, pp. 4226-4647  
51 articles

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Through-focus EUV multilayer defect compensation considering optical proximity correction

Appl. Opt. 61(15), 4437-4448 (2022)  View: HTML | PDF

Concise fractional Fourier transform based on a non-uniform order searching method for estimating physical parameters from Newton’s rings

Appl. Opt. 61(15), 4478-4485 (2022)  View: HTML | PDF