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Integrated refractive index sensor based on an AlN-PSiO2 hybrid plasmonic microdisk resonator

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Abstract

In this paper, a microdisk resonator (MDR) based on an ${\rm AlN}\! -\! {{\rm PSiO}_2}$ hybrid plasmonic waveguide (HPW) and its refractive index (RI) sensing characteristics are investigated. The plasmonic characteristics of the MDR based on the ${\rm AlN}\! -\! {{\rm PSiO}_2}$ HPW (APHPW-MDR) in near-infrared wavelengths are studied by using the finite element method. Through the structure parameter optimizations, the propagation length (${L}_{\rm prop}$) of the APHPW-MDR is ${\sim}{165}\;{\unicode{x00B5}{\rm m}}$, which is ${\sim}{2.5}$ times as long as that of the MDR based on the AlN HPW (AHPW-MDR). The simulation results show that the quality factor ($Q$) and extinction rate (ER) of the APHPW-MDR are ${\sim}{621.3}$ and ${\sim}{30}\;{\rm dB}$, respectively. The RI sensing sensitivity ($S$) of the RI sensor based on the APHPW-MDR is ${\sim}{276.6}\;{\rm nm/RIU}$. The RI sensor based on the APHPW-MDR has wide application prospects in high-performance biochemical sensing, and it can also be used in integrated optical filters, modulators, switches, routers, and delay circuits.

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Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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