Abstract

It is known that the phase response of spatial light modulators (SLMs) measured by double-beam interferometers is sensitive to mechanical and environmental disturbances. This paper proposes a Shack–Hartmann wavefront sensor (SHWS) method to measure the phase response characteristics of the SLM. The results show that the phase modulation depth measured by the proposed method is ${1.7581}\lambda$, and ${1.7993}\lambda$ by the Twyman–Green interferometer method. The difference in the phase modulation depth between the two methods is only ${0.0412}\lambda$, and its relative error rate is 2.29%. It proves that the phase modulation accuracy obtained by the SHWS with lenslets of 73*73 used in this paper is equivalent to that of the Twyman–Green interferometer. Compared with the interferometer method, the SHWS method is simple, compact, and robust, has good real-time performance, and is relatively vibration insensitive. In the future, the SHWS method will play a more important role in the detection of the SLM’s phase response.

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