Abstract
A simple method of fabricating ${\rm Pb}({{\rm Mg}_{1/3}}{{\rm Nb}_{2/3)}}{{\rm O}_3}{-}{{\rm PbTiO}_3}$ (PMN-PT) deep grooves with high aspect ratios using an 800-nm femtosecond laser with chemical-selective etching is demonstrated. The 567-µm-deep grooves with aspect ratios of approximately 35 were obtained with no cracks or thermal affected zone. The morphologies and chemical compositions of grooves were analyzed by a scanning electron microscope with an energy dispersive x-ray spectrometer. The formation mechanism of PMN-PT grooves is attributed to the chemical reactions of hydrochloric acid (HCl) and laser-induced structural changes (LISCs). PMN-PT in LISC became amorphous or mixtures of metal oxide from crystal and all the compounds could react with concentrated HCl and form soluble matter, leaving no precipitation. Furthermore, influences of laser irradiation parameters on depths and aspect ratios of grooves are studied.
© 2022 Optica Publishing Group
Full Article | PDF ArticleMore Like This
An Pan, Jinhai Si, Tao Chen, Yuncan Ma, Feng Chen, and Xun Hou
Opt. Express 21(14) 16657-16662 (2013)
Qingzhen Zheng, Zhengjie Fan, Gedong Jiang, Aifei Pan, Zhaoxuan Yan, Qingyan Lin, Jianlei Cui, Wenjun Wang, and Xuesong Mei
Opt. Express 27(19) 26264-26280 (2019)
Yang Guo, Pei Qiu, and Shaolin Xu
Opt. Express 30(25) 44665-44680 (2022)