Abstract
X-ray photoelectron spectroscopy has been employed to study the effect of CF<sub>4</sub> rf plasmas on gold surfaces. The data indicate that the CF<sub>4</sub> plasma converts the inert gold surface into a chemically active surface composed of gold, gold oxide, and gold fluoride. Upon exposure to air, the gold fluoride is hydrolyzed. The modified surface actively adsorbs water. The significance of the results is discussed in terms of micro-electronic reliability considerations.
PDF Article
More Like This
Spectroscopy of the CF4 laser
Robin S. McDowell, Chris W. Patterson, C. R. Jones, Melvin I. Buchwald, and John M. Telle
Opt. Lett. 4(9) 274-276 (1979)
Cited By
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription