Compositional and Texture Analysis of Tantalum Thin Films by Energy Dispersive X-ray Analysis

H. S. deBen; Barret Broyde

Applied Spectroscopy
Vol. 27,
Issue 2,
pp. 99-102
(1973)

Compositional and Texture Analysis of Tantalum Thin Films by Energy Dispersive X-ray Analysis

H. S. deBen and Barret Broyde

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H. S. deBen and Barret Broyde, "Compositional and Texture Analysis of Tantalum Thin Films by Energy Dispersive X-ray Analysis," Appl. Spectrosc. 27, 99-102 (1973)

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Abstract

Quantitative measurements of concentrations are given for the phases present in undoped tantalum thin films by the use of energy-dispersive x-ray detectors. This diffraction method can also yield the extent of preferred orientation.

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Applied Spectroscopy