Abstract

Elemental surface profiling techniques such as Auger electron spectroscopy, secondary ion mass spectroscopy, and ion scattering spectroscopy use about a 1- to 3-keV beam of ions to sputter away the surface as spectra are obtained. For a complete profile of even a thin film, many repetitive runs are necessary. In the standard commercial ion scattering spectrometer (ISS) (3M Company) the voltages to the plates of the spectrometer are increased during a scan by a motor-driven precision potentiometer. After each spectrum the potentiometer must manually be returned to zero or to the selected restart point. This procedure requires a great deal of operator attention and does not lend itself to signal averaging or digital data acquisition.

Surface profiling of lithium with a laser-desorption mass-spectrometer microprobe

Grant A. Bickel and Harry M. Adams
Appl. Opt. 38(9) 1488-1493 (1999)

Nonoptical characterization of optical coatings

K. H. Guenther
Appl. Opt. 20(20) 3487-3502 (1981)

Depth profiling analysis of CuIn_1-xGa_xSe₂ absorber layer by laser induced breakdown spectroscopy in atmospheric conditions

Chan Kyu Kim, Seok Hee Lee, Jung Hwan In, Hak Jae Lee, and Sungho Jeong
Opt. Express 21(S6) A1018-A1027 (2013)

A Simple Grating Spectrometer for the Infrared

Robert J. Bell and T. E. Gilmer
Appl. Opt. 4(2) 157-160 (1965)

Simple derivative optical spectrometer

G. Baldini, E. Grilli, and M. Guzzi
Appl. Opt. 14(11) 2687-2690 (1975)