Abstract

A convenient and a rapid technique is introduced to estimate the electron number densities, <i>n</i>_<i>e</i>, in inductively coupled plasmas. The method is based on previously reported observations that the principal quantum number of the last discernible line in a series limit depends on <i>n</i>_<i>e</i>. The spatially integrated <i>n</i>_<i>e</i> values, as determined from the spectra of H, Li, Mg, Al, Ca, and K emitted in a pure Ar plasma ranged between ∼4 × 10¹⁴ and ∼3 × 10¹⁵ cm⁻³ for various forward powers and observation heights. These results agreed with <i>n</i>_<i>e</i> values derived from other methodologies such as the Stark broadening and absolute continuum intensity.

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