Abstract
An inductively coupled plasma spectrometer was modified for gaseous sample introduction. The system uses a gas proportioner utilizing rotameters to achieve sample gas concentrations and mixing with the sample argon gas. Modifications of instruments were performed to enhance stability and compatability of gaseous sample introduction. Instrument performance was characterized for optimization of spectral signals produced from plasma gases. Spectral analyses of gaseous samples including CF<sub>4</sub>, SF<sub>6</sub>, O<sub>2</sub>, N<sub>2</sub>, air, and mixtures of CF<sub>4</sub>-O<sub>2</sub> and CF<sub>4</sub>-O<sub>2</sub>/N<sub>2</sub> were performed. Identification of plasma gas and plasma-induced by products, both atomic and molecular, were determined.
PDF Article
More Like This
Study on the radiation and self-absorption characteristics of plasma under various background gases
Junxiao Wang, Zhenrong Liu, Liping Zhu, Zhen Song, Yan Zhang, Lei Zhang, Wanfei Zhang, Gang Wang, Zefu Ye, Zhujun Zhu, Wangbao Yin, and Suotang Jia
Opt. Express 31(10) 16423-16433 (2023)
Multielemental analysis of prehistoric animal teeth by laser-induced breakdown spectroscopy and laser ablation inductively coupled plasma mass spectrometry
Michaela Galiová, Jozef Kaiser, Francisco J. Fortes, Karel Novotný, Radomír Malina, Lubomír Prokeš, Aleš Hrdlička, Tomáš Vaculovič, Miriam Nývltová Fišáková, Jiří Svoboda, Viktor Kanický, and Javier J. Laserna
Appl. Opt. 49(13) C191-C199 (2010)
Cited By
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Login to access Optica Member Subscription