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R.A. Crocombe, . “Handheld Spectrometers: The State of
the Art”. Proc. SPIE2013; 8726: 87260R–1. doi:
10.1117/12.2017892.
T. Puegner, J. Knobbe, and H. Lakner, . “Basic Angles in
Microelectromechanical System Scanning Grating Spectrometers”. Appl. Opt2011; 50:
4894–4902. doi: 10.1364/AO.50.004894.
K. Shibayama, T. Yokino, K. Hikita, N. Iwasaki, H.
Teichmann, U. Staerker, F. DiPrima, and K. Yamamoto, . “Miniaturized UV/VIS
Spectrometer Made by MOEMS Technology”. Proc. SPIE2009; 7208: 22–31. doi:
10.1117/12.808898.
F. Zimmer, A. Heberer, T. Sandner, H. Grüger, H. Schenk,
H. Lakner, A. Kenda, and W. Scherf, . “Investigation and Characterization of
High-Efficient NIR-Scanning Gratings used in NIR Micro-Spectrometer”. Proc.
SPIE2007; 6466: 646605doi: 10.1117/12.701821.
L.O.S. Ferreira and S. Moehlecke, . “A Silicon
Micromechanical Galvanometric Scanner”. Sens. Actuators, A1999; 73: 252–260. doi
10.1016/S0924-4247(98)00288-X..
R.A. Crocombe, D.C. Flanders, and W. Atia, .
“Micro-Optical Instrumentation for Process Spectroscopy.”. Optics East.
International Society for Optics and PhotonicsProc. SPIE 2004; 5991: 11–25.
Philadelphia, PA. October 25 2004: 11–25. doi:10.1117/12.578107.
P. Bousquet, . Spectroscopy and Its Instrumentation,
London: Hilger, 1971.
R.A. Crocombe, D.C. Flanders, and W. Atia, .
“Micro-Optical Instrumentation for Process Spectroscopy.”. Optics East.
International Society for Optics and PhotonicsProc. SPIE 2004; 5991: 11–25.
Philadelphia, PA. October 25 2004: 11–25. doi:10.1117/12.578107.
R.A. Crocombe, . “Handheld Spectrometers: The State of
the Art”. Proc. SPIE2013; 8726: 87260R–1. doi:
10.1117/12.2017892.
K. Shibayama, T. Yokino, K. Hikita, N. Iwasaki, H.
Teichmann, U. Staerker, F. DiPrima, and K. Yamamoto, . “Miniaturized UV/VIS
Spectrometer Made by MOEMS Technology”. Proc. SPIE2009; 7208: 22–31. doi:
10.1117/12.808898.
L.O.S. Ferreira and S. Moehlecke, . “A Silicon
Micromechanical Galvanometric Scanner”. Sens. Actuators, A1999; 73: 252–260. doi
10.1016/S0924-4247(98)00288-X..
R.A. Crocombe, D.C. Flanders, and W. Atia, .
“Micro-Optical Instrumentation for Process Spectroscopy.”. Optics East.
International Society for Optics and PhotonicsProc. SPIE 2004; 5991: 11–25.
Philadelphia, PA. October 25 2004: 11–25. doi:10.1117/12.578107.
T. Pügner, J. Knobbe, H. Grüger, and H. Schenk, .
“Realization of a Hybrid-Integrated MEMS Scanning Grating Spectrometer”. Proc.
SPIEBaltimore, Maryland. 23–24 April 2012; 8374: 83740W–1. doi:
10.1117/12.919068.
F. Zimmer, A. Heberer, T. Sandner, H. Grüger, H. Schenk,
H. Lakner, A. Kenda, and W. Scherf, . “Investigation and Characterization of
High-Efficient NIR-Scanning Gratings used in NIR Micro-Spectrometer”. Proc.
SPIE2007; 6466: 646605doi: 10.1117/12.701821.
F. Zimmer, A. Heberer, T. Sandner, H. Grüger, H. Schenk,
H. Lakner, A. Kenda, and W. Scherf, . “Investigation and Characterization of
High-Efficient NIR-Scanning Gratings used in NIR Micro-Spectrometer”. Proc.
SPIE2007; 6466: 646605doi: 10.1117/12.701821.
K. Shibayama, T. Yokino, K. Hikita, N. Iwasaki, H.
Teichmann, U. Staerker, F. DiPrima, and K. Yamamoto, . “Miniaturized UV/VIS
Spectrometer Made by MOEMS Technology”. Proc. SPIE2009; 7208: 22–31. doi:
10.1117/12.808898.
K. Shibayama, T. Yokino, K. Hikita, N. Iwasaki, H.
Teichmann, U. Staerker, F. DiPrima, and K. Yamamoto, . “Miniaturized UV/VIS
Spectrometer Made by MOEMS Technology”. Proc. SPIE2009; 7208: 22–31. doi:
10.1117/12.808898.
F. Zimmer, A. Heberer, T. Sandner, H. Grüger, H. Schenk,
H. Lakner, A. Kenda, and W. Scherf, . “Investigation and Characterization of
High-Efficient NIR-Scanning Gratings used in NIR Micro-Spectrometer”. Proc.
SPIE2007; 6466: 646605doi: 10.1117/12.701821.
T. Pügner, J. Knobbe, H. Grüger, and H. Schenk, .
“Realization of a Hybrid-Integrated MEMS Scanning Grating Spectrometer”. Proc.
SPIEBaltimore, Maryland. 23–24 April 2012; 8374: 83740W–1. doi:
10.1117/12.919068.
T. Puegner, J. Knobbe, and H. Lakner, . “Basic Angles in
Microelectromechanical System Scanning Grating Spectrometers”. Appl. Opt2011; 50:
4894–4902. doi: 10.1364/AO.50.004894.
T. Puegner, J. Knobbe, and H. Lakner, . “Basic Angles in
Microelectromechanical System Scanning Grating Spectrometers”. Appl. Opt2011; 50:
4894–4902. doi: 10.1364/AO.50.004894.
F. Zimmer, A. Heberer, T. Sandner, H. Grüger, H. Schenk,
H. Lakner, A. Kenda, and W. Scherf, . “Investigation and Characterization of
High-Efficient NIR-Scanning Gratings used in NIR Micro-Spectrometer”. Proc.
SPIE2007; 6466: 646605doi: 10.1117/12.701821.
L.O.S. Ferreira and S. Moehlecke, . “A Silicon
Micromechanical Galvanometric Scanner”. Sens. Actuators, A1999; 73: 252–260. doi
10.1016/S0924-4247(98)00288-X..
C. Palmer, . Diffraction Grating Handbook, 6th ed. New
York: Newport Corporation, 2005.
T. Puegner, J. Knobbe, and H. Lakner, . “Basic Angles in
Microelectromechanical System Scanning Grating Spectrometers”. Appl. Opt2011; 50:
4894–4902. doi: 10.1364/AO.50.004894.
T. Pügner, J. Knobbe, H. Grüger, and H. Schenk, .
“Realization of a Hybrid-Integrated MEMS Scanning Grating Spectrometer”. Proc.
SPIEBaltimore, Maryland. 23–24 April 2012; 8374: 83740W–1. doi:
10.1117/12.919068.
F. Zimmer, A. Heberer, T. Sandner, H. Grüger, H. Schenk,
H. Lakner, A. Kenda, and W. Scherf, . “Investigation and Characterization of
High-Efficient NIR-Scanning Gratings used in NIR Micro-Spectrometer”. Proc.
SPIE2007; 6466: 646605doi: 10.1117/12.701821.
T. Pügner, J. Knobbe, H. Grüger, and H. Schenk, .
“Realization of a Hybrid-Integrated MEMS Scanning Grating Spectrometer”. Proc.
SPIEBaltimore, Maryland. 23–24 April 2012; 8374: 83740W–1. doi:
10.1117/12.919068.
F. Zimmer, A. Heberer, T. Sandner, H. Grüger, H. Schenk,
H. Lakner, A. Kenda, and W. Scherf, . “Investigation and Characterization of
High-Efficient NIR-Scanning Gratings used in NIR Micro-Spectrometer”. Proc.
SPIE2007; 6466: 646605doi: 10.1117/12.701821.
F. Zimmer, A. Heberer, T. Sandner, H. Grüger, H. Schenk,
H. Lakner, A. Kenda, and W. Scherf, . “Investigation and Characterization of
High-Efficient NIR-Scanning Gratings used in NIR Micro-Spectrometer”. Proc.
SPIE2007; 6466: 646605doi: 10.1117/12.701821.
K. Shibayama, T. Yokino, K. Hikita, N. Iwasaki, H.
Teichmann, U. Staerker, F. DiPrima, and K. Yamamoto, . “Miniaturized UV/VIS
Spectrometer Made by MOEMS Technology”. Proc. SPIE2009; 7208: 22–31. doi:
10.1117/12.808898.
K. Shibayama, T. Yokino, K. Hikita, N. Iwasaki, H.
Teichmann, U. Staerker, F. DiPrima, and K. Yamamoto, . “Miniaturized UV/VIS
Spectrometer Made by MOEMS Technology”. Proc. SPIE2009; 7208: 22–31. doi:
10.1117/12.808898.
K. Shibayama, T. Yokino, K. Hikita, N. Iwasaki, H.
Teichmann, U. Staerker, F. DiPrima, and K. Yamamoto, . “Miniaturized UV/VIS
Spectrometer Made by MOEMS Technology”. Proc. SPIE2009; 7208: 22–31. doi:
10.1117/12.808898.
W.T. Welford, . Aberrations of Optical Systems, London:
Hilger, 1986.
K. Shibayama, T. Yokino, K. Hikita, N. Iwasaki, H.
Teichmann, U. Staerker, F. DiPrima, and K. Yamamoto, . “Miniaturized UV/VIS
Spectrometer Made by MOEMS Technology”. Proc. SPIE2009; 7208: 22–31. doi:
10.1117/12.808898.
K. Shibayama, T. Yokino, K. Hikita, N. Iwasaki, H.
Teichmann, U. Staerker, F. DiPrima, and K. Yamamoto, . “Miniaturized UV/VIS
Spectrometer Made by MOEMS Technology”. Proc. SPIE2009; 7208: 22–31. doi:
10.1117/12.808898.
F. Zimmer, A. Heberer, T. Sandner, H. Grüger, H. Schenk,
H. Lakner, A. Kenda, and W. Scherf, . “Investigation and Characterization of
High-Efficient NIR-Scanning Gratings used in NIR Micro-Spectrometer”. Proc.
SPIE2007; 6466: 646605doi: 10.1117/12.701821.
T. Puegner, J. Knobbe, and H. Lakner, . “Basic Angles in
Microelectromechanical System Scanning Grating Spectrometers”. Appl. Opt2011; 50:
4894–4902. doi: 10.1364/AO.50.004894.
R.A. Crocombe, D.C. Flanders, and W. Atia, .
“Micro-Optical Instrumentation for Process Spectroscopy.”. Optics East.
International Society for Optics and PhotonicsProc. SPIE 2004; 5991: 11–25.
Philadelphia, PA. October 25 2004: 11–25. doi:10.1117/12.578107.
R.A. Crocombe, . “Handheld Spectrometers: The State of
the Art”. Proc. SPIE2013; 8726: 87260R–1. doi:
10.1117/12.2017892.
F. Zimmer, A. Heberer, T. Sandner, H. Grüger, H. Schenk,
H. Lakner, A. Kenda, and W. Scherf, . “Investigation and Characterization of
High-Efficient NIR-Scanning Gratings used in NIR Micro-Spectrometer”. Proc.
SPIE2007; 6466: 646605doi: 10.1117/12.701821.
T. Pügner, J. Knobbe, H. Grüger, and H. Schenk, .
“Realization of a Hybrid-Integrated MEMS Scanning Grating Spectrometer”. Proc.
SPIEBaltimore, Maryland. 23–24 April 2012; 8374: 83740W–1. doi:
10.1117/12.919068.
L.O.S. Ferreira and S. Moehlecke, . “A Silicon
Micromechanical Galvanometric Scanner”. Sens. Actuators, A1999; 73: 252–260. doi
10.1016/S0924-4247(98)00288-X..
K. Shibayama, T. Yokino, K. Hikita, N. Iwasaki, H.
Teichmann, U. Staerker, F. DiPrima, and K. Yamamoto, . “Miniaturized UV/VIS
Spectrometer Made by MOEMS Technology”. Proc. SPIE2009; 7208: 22–31. doi:
10.1117/12.808898.
M. Ebermann, K. Hiller, S. Kurth, N. Neumann. “Design,
Operation and Performance of a Fabry–Perot-Based MWIR Microspectrometer”. Proc.
IRS2, Sensor+Test Conferences. Nürnberg, Germany, 26–28 May 2009.
C. Palmer, . Diffraction Grating Handbook, 6th ed. New
York: Newport Corporation, 2005.
S. Kurth, C. Kaufmann, R. Hahn, J. Mehner, W. Dotzel, T.
Gessner. “MEMS Scanner for Laser Projection”. University of Technology, Center for
Microtechnologies. 2004.
P. Bousquet, . Spectroscopy and Its Instrumentation,
London: Hilger, 1971.
W.T. Welford, . Aberrations of Optical Systems, London:
Hilger, 1986.
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