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Optica Publishing Group
  • Applied Spectroscopy
  • Vol. 75,
  • Issue 12,
  • pp. 1449-1460
  • (2021)

Calculation of Spectral Optical Constants Using Combined Ellipsometric and Reflectance Methods for Smooth and Rough Bulk Samples

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Abstract

Spectra of the optical constants n and k of a substance are often deduced from spectroscopic measurements, performed on a thick and homogeneous sample, and from a model used to simulate these measurements. Spectra obtained for n and k using the ellipsometric method generally produce polarized reflectance simulations in strong agreement with the experimental measurements, but they sometimes introduce significant discrepancies over limited spectral ranges, whereas spectra of n and k obtained with the single-angle reflectance method require a perfectly smooth sample surface to be viable. This paper presents an alternative method to calculate n and k. The method exploits both ellipsometric measurements and s-polarized specular reflectance measurements, and compensates for potential surface scattering effects with the introduction of a specularity factor. It is applicable to bulk samples having either a smooth or a rough surface. It provides spectral optical constants that are consistent with s-polarized reflectance measurements. Demonstrations are performed in the infrared region using a glass slide (smooth surface) and a pellet of compressed ammonium sulfate powder (rough surface).

© 2021 The Author(s)

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Supplementary Material (2)

NameDescription
Supplement 1       sj-pdf-1-asp-10.1177_00037028211047898 - Supplemental material for Calculation of Spectral Optical Constants Using Combined Ellipsometric and Reflectance Methods for Smooth and Rough Bulk Samples
Supplement 2       sj-pdf-2-asp-10.1177_00037028211047898 - Supplemental material for Calculation of Spectral Optical Constants Using Combined Ellipsometric and Reflectance Methods for Smooth and Rough Bulk Samples

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