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Optica Publishing Group
  • Chinese Optics Letters
  • Vol. 19,
  • Issue 6,
  • pp. 060008-
  • (2021)

On-chip erbium-doped lithium niobate waveguide amplifiers [Invited]

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Abstract

Lithium niobate on insulator (LNOI), as an emerging and promising optical integration platform, faces shortages of on-chip active devices including lasers and amplifiers. Here, we report the fabrication of on-chip erbium-doped LNOI waveguide amplifiers based on electron beam lithography and inductively coupled plasma reactive ion etching. A net internal gain of ∼30 dB/cm in the communication band was achieved in the fabricated waveguide amplifiers under the pump of a 974 nm continuous laser. This work develops new active devices on LNOI and may promote the development of LNOI integrated photonics.

© 2021 Chinese Laser Press

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