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Optica Publishing Group
  • Chinese Optics Letters
  • Vol. 20,
  • Issue 1,
  • pp. 011902-
  • (2022)

Lithium niobate microring with ultra-high Q factor above 108

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Abstract

We demonstrate integrated lithium niobate (LN) microring resonators with Q factors close to the intrinsic material absorption limit of LN. The microrings are fabricated on pristine LN thin-film wafers thinned from LN bulk via chemo-mechanical etching without ion slicing and ion etching. A record-high Q factor up to 108 at the wavelength of 1550 nm is achieved because of the ultra-smooth interface of the microrings and the absence of ion-induced lattice damage, indicating an ultra-low waveguide propagation loss of ∼0.0034 dB/cm. The ultra-high Q microrings will pave the way for integrated quantum light source, frequency comb generation, and nonlinear optical processes.

© 2022 Chinese Laser Press

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