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Optica Publishing Group
  • Chinese Optics Letters
  • Vol. 20,
  • Issue 3,
  • pp. 031302-
  • (2022)

Photonic crystal nanobeam cavities based on 4H-silicon carbide on insulator

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Abstract

The 4H-silicon carbide on insulator (4H-SiCOI) has recently emerged as an attractive material platform for integrated photonics due to its excellent quantum and nonlinear optical properties. Here, we experimentally realize one-dimensional photonic crystal nanobeam cavities on the ion-cutting 4H-SiCOI platform. The cavities exhibit quality factors up to 6.1×103 and mode volumes down to 0.63 × (λ/n)3 in the visible and near-infrared wavelength range. Moreover, by changing the excitation laser power, the fundamental transverse-electric mode can be dynamically tuned by 0.6 nm with a tuning rate of 33.5 pm/mW. The demonstrated devices offer the promise of an appealing microcavity system for interfacing the optically addressable spin defects in 4H-SiC.

© 2022 Chinese Laser Press

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