Abstract

A symmetrical heterodyne grating interferometer with both a short period and high signal-to-noise ratio is proposed. It possesses good immunity to environmental disturbances and can simultaneously achieve high resolution and stability. The experimental results show that the standard deviation of 24.67 nm can be realized for the long range of 10 mm. The measurement resolution of better than 2 nm is achieved with the theoretical resolution of 12 pm. Additionally, system stability at less than ±1.5 nm is obtained in just over 10 min. The measurement errors, including cosine error, nonlinear error and non-common path error, are discussed as well.

© 2015 Chinese Laser Press

A compact high-precision periodic-error-free heterodyne interferometer

Ki-Nam Joo, Erin Clark, Yanqi Zhang, Jonathan D. Ellis, and Felipe Guzmán
J. Opt. Soc. Am. A 37(9) B11-B18 (2020)

Heterodyne common-path grating interferometer with Littrow configuration

Chyan-Chyi Wu, Cheng-Chih Hsu, Ju-Yi Lee, and Yan-Zou Chen
Opt. Express 21(11) 13322-13332 (2013)

Two-dimensional displacement measurement by quasi-common-optical-path heterodyne grating interferometer

Hung-Lin Hsieh, Jyh-Chen Chen, Gilles Lerondel, and Ju-Yi Lee
Opt. Express 19(10) 9770-9782 (2011)

Spatially separated heterodyne grating interferometer for eliminating periodic nonlinear errors

Xu Xing, Di Chang, Pengcheng Hu, and Jiubin Tan
Opt. Express 25(25) 31384-31393 (2017)

Dual displacement resolution encoder by integrating single holographic grating sensor and heterodyne interferometry

Cheng-Chih Hsu, Hang Chen, Chia-Wei Chiang, and Yu-Wei Chang
Opt. Express 25(24) 30189-30202 (2017)