Abstract

We report a method for simultaneously and directly measuring all six-degrees-of-freedom (six-DOF) motion errors of a rotary axis. Such a method combines the principles of laser interferometry and laser collimation measurement. One reference rotary axis and two retro-reflectors are used to achieve simultaneous sensitivity to all six errors in a full-circle measuring range. As no separation models are required, our method is capable of dynamically measuring these errors in real time and conveniently determining the origin of the errors. An automatic measuring device is built. The effectiveness of our method is experimentally demonstrated.

© 2019 Chinese Laser Press

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