Abstract

The 4H-silicon carbide on insulator (4H-SiCOI) has recently emerged as an attractive material platform for integrated photonics due to its excellent quantum and nonlinear optical properties. Here, we experimentally realize one-dimensional photonic crystal nanobeam cavities on the ion-cutting 4H-SiCOI platform. The cavities exhibit quality factors up to 6.1×10³ and mode volumes down to 0.63 × (λ/n)³ in the visible and near-infrared wavelength range. Moreover, by changing the excitation laser power, the fundamental transverse-electric mode can be dynamically tuned by 0.6 nm with a tuning rate of 33.5 pm/mW. The demonstrated devices offer the promise of an appealing microcavity system for interfacing the optically addressable spin defects in 4H-SiC.

© 2022 Chinese Laser Press

Visible and near-infrared microdisk resonators on a 4H-silicon-carbide-on-insulator platform

Chengli Wang, Chen Shen, Ailun Yi, Shumin Yang, Liping Zhou, Yifan Zhu, Kai Huang, Sannian Song, Min Zhou, Jiaxiang Zhang, and Xin Ou
Opt. Lett. 46(12) 2952-2955 (2021)

Ultrahigh-Q photonic crystal nanocavities based on 4H silicon carbide

Bong-Shik Song, Takashi Asano, Seungwoo Jeon, Heungjoon Kim, Changxuan Chen, Dongyeon Daniel Kang, and Susumu Noda
Optica 6(8) 991-995 (2019)

High-Q adiabatic micro-resonators on a wafer-scale ion-sliced 4H-silicon carbide-on-insulator platform

Liping Zhou, Ailun Yi, Yongquan Su, Bingcheng Yang, Yifan Zhu, Jiachen Cai, Chengli Wang, Zhenyu Wu, Sannian Song, Jiaxiang Zhang, and Xin Ou
Opt. Lett. 48(23) 6279-6282 (2023)

Photonic crystal cavities in cubic (3C) polytype silicon carbide films

Marina Radulaski, Thomas M. Babinec, Sonia Buckley, Armand Rundquist, J Provine, Kassem Alassaad, Gabriel Ferro, and Jelena Vučković
Opt. Express 21(26) 32623-32629 (2013)

Octave-spanning microcomb generation in 4H-silicon-carbide-on-insulator photonics platform

Lutong Cai, Jingwei Li, Ruixuan Wang, and Qing Li
Photon. Res. 10(4) 870-876 (2022)