Ion Enhanced Processes in Etching of Silicon

T. M. Mayer, M. S. Ameen, E. L. Barish, D. J. Vitkavage, and T. Mizutani

MA1 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

The Influence of Ion Bombardment on Etching Reactions

Harold F. Winters and J. W. Coburn

MA2 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

A Study into the Mechanism of ION-Assisted Etching

F.H.M. Sanders

MA3 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Energy Distributions of Electronically Excited Molecules Produced by Ion Bombardment Of Silicon

R. Walkup, Ph. Avouris, IBM Thomas, and J. Watson

MB1 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Simultaneous Exposure of SiO2 and ThF4 to XeF2 and Energetic Electrons*

M. A. Loudiana and J. T. Dickinson

MB3 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Ablation of Organic Polymers by Ultraviolet and Visible Radiation: A Theoretical Approach

Barbara J. Garrison and R. Srinivasan

MB4 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Laser Interferometry and Laser Induced Fluorescence Studies of Laser Etching

R.W. Dreyfus, R. Walkup, and J.M. Jasinski

MB5 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Direct-writing in self-developing resists using low-power, cw, ultraviolet light

J. E. Bjorkholm, L. Eichner, J. C. White, R. E. Howard, and H. G. Craighead

MB6 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Raman Characterization of Catalysts

A. Wokaun, A. Baiker, W. Fluhr, M. Meier, and S.K. Miller

MC1 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Surface Raman Spectroscopy Without Enhancement

Alan Campion

MC2 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Surface Coherent Raman Spectroscopy

W. M. Hetherington, N. E. Van Wyck, E. W. Koenig, Z. Z. Ho, G. I. Stegeman, R. M. Fortenberry, and R. Moshrefzadi

MC3 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

High Resolution Electron Energy Loss Spectroscopy of Molecular Bond Weakening on Potassium Promoted Ru(001)

F. M. Hoffmann and R. A. dePaola

MC4 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Photophysical Studies of DAQ on Silica and Aluminum Oxides. A Molecular Probe of Surface Heterogeneity

J. M. Drake

MC5 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Photodesorption and Adsorbate-Surface Interactions Stimulated by Laser Radiation

T. J. Chuang

TuA1 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Infrared Spectral Electrochemistry of Surface Reactions

B. Stanley Pons

TuA2 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Pulsed-Laser Atom-Probe Study of H3, N3 and NH3 Formation on Metal Surfaces

T. T. Tsong, C. F. Ai, and Wu Liu

TuA3 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Selective Laser-stimulated Desorption of Molecules by Internal Vibration Excitation

C. Jedrzejek

TuB1 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Time Resolved Kinetic Studies of Molecular Decomposition on Ni(100) using Laser Induced Desorption

S. J. Bares and R. B. Hall

TuB2 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Excitation of Interacting Adatoms and Surface-Dressed Bloch Equation

Jui-teng Lin

TuB3 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Technique for Measuring Surface Diffusion by Laser-Beam-Localized Surface Photochemistry*

H. J. Zeiger, J. Y. Tsao, and D. J. Ehrlich

TuB4 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Characterization of Photochemical Processing

Masatake Hirose

TuB5 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Recent Experiments on Photolysis for Low Temperature Epitaxy

S J C Irvine, J Giess, J B Mullin, G W Blackmore, and O D Dosser

TuC1 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

The Mechanisms of III-V Movpe and Routes to a UV-assisted process

J. Haigh

TuC2 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Studies of Laser Chemical Vapor Deposition Using Surface Sensitive Infrared Photoacoustic Spectroscopy

G. S. Higashi, L. J. Rothberg, and C. G. Fleming

TuC3 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Laser–induced Selective Deposition of Micron-size Structures on Silicon by Surface Reduction of Tungsten Hexafluoride

Y.S. Liu, C.P. Yakymyshyn, H.R. Philipp, H.C. Cole, and L.M. Levinson

TuC4 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Laser-Initiated Dry Etching of SiO2

Jack O. Chu, George W. Flynn, Peter D. Brewer, and Richard M. Osgood

TuC5 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Interface Studies by Optical Second Harmonic Generation

Y. R. Shen

WA1 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Real-time Monitoring of Surface Reactions on Si(111) by Optical Second-Harmonic Generation

T. F. Heinz, M.M.T. Loy, and W. A. Thompson

WA2 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Second Harmonic Generation Studies of Adsorption and Reorientation at Electrode Surfaces

D.F. Voss, K.A. Bunding, M. Nagumo, and L.S. Goldberg

WA3 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Time-Resolved Vibrational Energy Relaxation of Surface Adsorbates

E. J. Heilweil, M. P. Casassa, R. R. Cavanagh, and J. C. Stephenson

WA4 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Survival of Vibrationally-Excited Nitric Oxide Scattered from LiF(100) Surface: Angular and Velocity Analysis

J. Misewich, H. Zacharias, and M. M. T. Loy

WB1 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Electroreflectance Vibrational Spectroscopy: Theory and Measurement of the Stark Effect of CO on Ni[100]

D. K. Lambert

WB2 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Diffusion and Reaction in Tortuous Structures as Modelled by Fractals

J. Klafter and J. M. Drake

WB3 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Electronic Spectroscopy and Relaxation Dynamics of Adsorbates on Metal Surfaces

Phaedon Avouris

WB4 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Study of Molecule Surface Interaction Dynamics by Laser

Herbert Walther

WB5 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Optical and Electron Probes of the Structure of Surfactant Coated Surfaces

S. Garoff, R. B. Hall, and D. W. Deckman

WC1 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Above-Bandgap Polarization Anisotropies in Cubic Semiconductors: A Visible-Near uv Probe of Surfaces

D. E. Aspnes

WC2 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

UV-Laser Photodeposition of Patterned Catalyst Films from Adsorbate Mixtures*

D. J. Ehrlich and J. Y. Tsao

WC3 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Chlorine Surface Interactions and Laser Induced Surface Etching Reactions

W. Sesselmann and T.J. Chuang

WC4 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Mechanism of Trimethylaluminum Chemical Vapor Deposition Studied by Multiphoton Ionization Mass Spectrometric Detection

D.W. Squire, C.S. Dulcey, and M.C. Lin

WC5 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Infrared Laser-induced Photodesorption and Ultraviolet Laser-induced Thermal Desorption of Methyl Fluoride from Polycrystalline Copper

R. Viswanathan, I. Hussla, D. R. Burgess, P. C. Stair, and E. Weitz

WC6 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Quantum Model of Dephasing-Enhanced Laser Desorption

Jui-teng Lin, Xi-Yi Huang, and Thomas F. George

WC7 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Laser-Stimulated Vibrational Excitation of an Adspecies Studied by a Generalized Master Equation.

A. C. Beri and Thomas F. George

WC8 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Direct Laser Pumping of Adatom-Surface Vibrational Modes

Merle E. Riley and Dennis J. Diestler

WC9 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Second Harmonic Generation Spectroscopy of Molecules Adsorbed on Oxide Surfaces

N. E. Van Wyck, E. W. Koenig, J. D. Byers, Z. Z. Ho, and W. M. Hetherington

WC10 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Photochemical Deposition of Sn for In-Situ Selected Area Doping of MBE GaAs (001)

Steven P. Kowalczyk and D.L. Miller

WC11 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Large Modification of the Surface Enhanced Raman Scattering of Pyridine on Ag Surfaces by Pd Submonolayers.

T. Lopez-Ríos and Y. Gao

WC12 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Doppler Shift Laser Fluorescence Spectroscopy of Sputtered and Evaporated Atoms under Argon Ion Bombardment.

W. Husinsky, G. Betz, and I. Girgis

WC13 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Atomic-Resolution Dynamics by Electron Microscopy

David J. Smith

WD1 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Excimer Laser Etching and Oxidation of Silicon

Y. Horiike, M. Sekine, K. Horioka, T. Arikado, M. Nakase, and H. Okano

WD2 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Effects of Optical Properties on Wet Etching of Semiconductors

D.V. Podlesnik, H.H. Gilgen, C.J. Chen, and R.M. Osgood

WD3 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF

Transient Nonlinear Laser Heating and Deposition: A Comparison of Theory and Experiment

J. A. Goldstone and S. D. Allen

WD4 Microphysics of Surfaces, Beams, and Adsorbates (MSBA) 1985 View: PDF