Angstrom-level noncontact profiling of mirrors for soft x-ray lithography

Paul Glenn

FA1 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Non-Specular X-ray Scattering from Multilayer Structures

Jeffrey B. Kortright

FA2 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

NIST Metrology for Soft X-Ray Multilayer Optics

R.N. Watts, D.L. Ederer, T.B. Lucatorto, and M. Isaacson

FA3 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Illumination Requirements for Optical Projectors: and how to think about them

Douglas S. Goodman

FB1 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Development of Reflective Optical Systems for XUV Projection Lithography*

V. K. Viswanathan and Brian E. Newnam

FB2 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Specifying Optical Fabrication Tolerances for Soft X-ray Projection Lithography Systems

James E. Harvey

FB3 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Analysis of Thermally Induced Distortion of Optics for Soft X-ray Projection Lithography

R. D. Watson and R. H. Stulen

FB4 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Optical Alignment for Lithography

Norman Bobroff and Alan E. Rosenbluth

FC1 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Reflection Masks for Soft X-Ray Projection Lithography

Andrew M. Hawryluk

FC2 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Design & development of an integrated laser-plasma soft-X-ray projection system

F. Bijkerk, H.-J. Voorma, E.J. Pulk, E. Louis, M.J. van der Wiel, J. Verhoeven, E. van der Drift, and H. Romijn

FC3 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Soft X-ray Projection Imaging Using a Laser Plasma Source

D. A. Tichenor, G. D. Kubiak, M. E. Malinowski, R. H. Stulen, S. J. Haney, K. W. Berger, L. A. Brown, R. R. Freeman, W. M. Mansfield, O. R. Wood, D. M. Tennant, J. E. Bjorkholm, T. E. Jewell, D. L. White, D. L. Windt, and W. K. Waskiewicz

FC4 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Source Issues Relevant to X-Ray Lithography

Khanh Nguyen and David Attwood

ThA1 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Surface Figure Metrology for X-ray Optics

W. Tyler Estler and Chris J. Evans

ThA2 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Schwarzschild microscope at λ =7 nm

K. A. Tanaka, M. Kado, H. Daido, T. Yamanaka, S. Nakai, K. Yamashita, and S. Kitamoto

ThA3 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Multilayers for Soft-X-Ray Optics

Takeshi Namioka and Masato Koike

ThB1 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Multilayer Period Uniformity and Performance of Soft X-ray Imaging Systems

J. B. Kortright and R. Watts

ThB2 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Achieving Uniform Multilayer Coatings on Figured Optics

W. K. Waskiewicz, D. L. Windt, J. E. Bjorkholm, L. Eichner, R. R. Freeman, T. E. Jewell, W. M. Mansfield, A. A. MacDowell, W. M. Simpson, L. H. Szeto, D. M. Tennant, D. Taylor, G. Taylor, D. L. White, and O. R. Wood

ThB3 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Tungsten/Carbon Multilayers Prepared By Ion Beam Sputtering

Katsuhiko Murakami, Hiroshi Nakamura, Tetsuya Oshino, and Hideo Nikaido

ThB4 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

X-ray Production Efficiency at 130 Å from Laser-Produced Plasmas

Robert L. Kauffman and Donald W. Phillion

ThC1 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Simulation of Soft -X-Ray Production by Laser Irradiation

C. Cerjan and M. D. Rosen

ThC2 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

XUV Conversion Efficiency in a Low Intensity Krf Laser-Plasma for Projection Lithography

Paul D. Rockett, John A. Hunter, Glenn D. Kubiak, and Kurt W. Berger

ThC3 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Resist Characterization and Lithography Simulation

A.R. Neureuther and W.G. Oldham

ThD1 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Surface-Imaging Lithography

Mark A. Hartney

ThD2 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Resist Characterization at Soft X-Ray Wavelengths

G. D. Kubiak, E. M. Kneedler, K. W. Berger, J. E. Bjorkholm, W. M. Mansfield, and H. Windischmann

ThD3 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Effects of Absorption on Resist Performance in Soft X-Ray Projection Lithography

W.M. Mansfield, O.R. Wood, J.E. Bjorkholm, J. Bokor, R.R. Freeman, A.A. MacDowell, L.H. Szeto, G.N. Taylor, D.M. Tennant, W.K. Waskiewicz, D.L. Windt, D.L. White, R. D’Souza, and A.R. Neureuther

ThD4 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Soft X-ray projection optics

David Shafer

ThE1 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Throughput estimate of an X-ray projection lithography system

Masaaki Itou, Tsuneo Terasawa, and Shigeo Moriyama

ThE2 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Design and Analysis of Multi-Mirror Soft X-Ray Projection Lithography Systems

David L. Shealy, Cheng Wang, and V. K. Viswanathan

ThE3 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Soft x-ray spectra from laser plasma effectively heated by a pulse train laser

Hideo Hirose, Tamio Hara, Kozo Ando, Fumiko Negishi, Hidehiko Yashiro, and Yoshinobu Aoyagi

WA1 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Optical Wiggler Free-Electron X-Ray Laser as a Two-Level Quantum Generator with Fully Inverted Medium

E.M. Belenov, S. V. Grigoriev, A. V. Nazarkin, and I.V. Smetanin

WA2 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Coherent X-Ray Generation Via Laser Pumping of a Relativistic Ion Beam - Feasibility Assessment

S.A. Bogacz

WA3 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

A Search for Gain on 2p-2s Transitions in a Collisionally Excited Ge Plasma

G.D. Enright, H.A. Baldis, J. Dunn, B. La Fontaine, D.M. Villeneuve, J.C. Kieffer, H. Pépin, and M. Chaker

WA4 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Modal Study of Refractive Effects on X-ray Laser Coherence

Peter Amendt, Richard A. London, and Moshe Strauss

WA5 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Saturation and Kinetic Issues for Optical-Field-Ionized X-Ray Lasers

D. C. Eder, P. Amendt, M. D. Rosen, J. K. Nash, and S. Wilks

WA6 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

On the feasibility of X-ray nonlinear resonant effects in plasma

P. L. Shkolnikov and A. E. Kaplan

WA7 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Radiation Cooling in Photopurnped C VI Inversion

Ricardo A. Pakula

WA8 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Progress in the Development of a Compact Capillary Discharge Soft X-Ray Laser

J.J. Rocca, M.C. Marconi, B.T. Szapiro, and J. Meyer

WA9 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Longitudinal pumping by an ellipsoidal reflector for short-wavelength lasers

Katsumi Midorikawa, Hideo Tashiro, Toshihisa Watabe, and Minoru Obara

WA10 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Designs for Coherent X-Ray Lasers

R. A. London, P. Amendt, M. D. Feit, J. A. Fleck, D. L. Matthews, S. Maxon, R. E. Stewart, and J. E. Trebes

WA11 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Soft-X-Ray Emission Characteristics of Line-Shaped, Laser-Produced Plasmas

Shisheng Chen, Xiaofang Wang, Aidi Qian, and Zhizhan Xu

WA12 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Effects of Illumination Uniformity Improvement on X-ray Lasing Plasma

J.C. Kieffer, M. Nantel, M. Chaker, H. Pépin, H.A. Baldis, J. Dunn, G.D. Enright, and D.M. Villeneuve

WA13 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Characteristics of Sub-100-ps Laser Irradiation of Cylindrical Cavities

J.E. Balmer, B. Soom, U. Ellenberger, and R. Weber

WA14 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Differential Phase Contrast Imaging in the Scanning Transmission X-ray Microscope

J R Palmer and G R Morrison

WA15 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

High Resolution Soft-X-Ray Projection Imaging

O. R. Wood, J. E. Bjorkholm, J. Bokor, L. Eichner, R. R. Freeman, T. E. Jewell, W. M. Mansfield, A. A. MacDowell, L. H. Szeto, D. M. Tennant, W. K. Waskiewicz, D. L. White, D. L. Windt, and J. H. Bruning

WB1 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Real World Issues for Synchrotron Radiation Sources

B. M. Kincaid

WB2 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Laser-plasma sources for lithography

James M. Forsyth

WB3 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

The Physics of X-Ray Multilayer Structures

David L. Windt, R. Hull, and W. K. Waskiewicz

WC1 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

High Performance Multilayer X-Ray Optics

D. G. Stearns

WC2 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Soft X-ray Optic For An Efficient Laser Plasma Spectrometer

S. C. Davey, R.R. Freeman, T.J. McIlrath, L.D. vanWoerkom, W.K. Waskiewicz, and T. Lucatorto

WC3 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Soft X-ray Projection Lithography Technology*

N. M. Ceglio, A. M. Hawryluk, D. G. Steams, D. P. Gaines, R. Rosen, and S. Vernon

WD1 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Soft X-ray reduction lithography using a reflection mask

H. Kinoshita, K. Kurihara, T. Mizota, T. Haga, Y. Torii, H. Takenaka, and Y. Ishii

WD2 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Proximity X-ray Nanolithography

Henry I. Smith and M. L. Schattenburg

WD3 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Possibilities for Projection X-Ray Lithography using Holographic Optical Elements

Malcolm R Howells and Chris Jacobsen

WE1 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF

Effect of amplitude and phase dispersion on images in multilayer coated soft x-ray projection systems

Tanya E. Jewell

WE2 Soft X-Ray Projection Lithography (SXRAY) 1991 View: PDF