LSI Lithography: Present Status and Future Trends

Shoichiro Yoshida

MA1 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Lithography - "The technology to he used is ????"

Robert W. Hill

MA2 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Where are We in the Development of Soft X-Ray Projection Lithography?

Richard R. Freeman

MA3 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

The State of Soft X-ray Projection Lithography in Japan

Shigetaro Ogura

MA4 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Design Considerations for a "Front End" Illumination System for Soft X-ray Projection Lithography

N. M. Ceglio

MB1 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

XUV Projection Lithography System Design Based on Single-Surface Reflecting Optics*

Brian E. Newnam and V. K. Viswanathan

MB2 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Wavelength Issues in Soft-X-Ray Projection Lithography

A. M. Hawryluk and N. M. Ceglio

MB3 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

0.35 micron step and Scan Manufacturing Lithography Tool

B. Kuyel

MB4 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

X-ray Plasma Source Design Issues

Charles Cerjan

MC1 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

X-Ray Production ~ 130 Å from Laser-Produced Plasmas for Projection X-ray Lithography Applications*

R. L. Kauffman, D. W. Phillion, and R. Spitzer

MC2 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Laser-Plasma Source Development for Projection X-ray Lithography

Paul D. Rockett, John A. Hunter, Richard E. Olson, Glenn D. Kubiak, Kurt W. Berger, Harry Shields, and Michael Powers

MC3 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

A Continuous Emission Source Covering the 50 to 300 Angstrom Band

Stuart Bowyer

MC4 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Conceptual Design Of a 60-nm Free-Electron Laser for XUV Projection Lithography*

Richard L. Sheffield, Bruce E. Carlsten, K. C. Dominic Chan, John C. Goldstein, Michael T. Lynch, Brian E. Newnam, Dinh C. Nguyen, Daniel S. Prono, and Roger W. Warren

PD1 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

High-Speed Tape Target Transport for Laser Plasma SXPL Source*

Steve Haney, Kurt W. Berger, Glenn D. Kubiak, Paul D. Rockett, and John Hunter

PD2 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Contamination Studies of XUV Reflecting Surfaces for Projection Lithography*

Brian E. Newnam and Marion L. Scott

PD3 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Atomic Layer Growth of Tungsten and Boron for Multilayer X-ray Optics

J.K. Shurtleff, D.D. Allred, R.T. Perkins, L.V. Knight, J.M. Thorne, and J.D. Phillips

PD4 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Soft X-ray Multilayer Mirrors

Fan Zhengxiu

PD5 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Sputtering Deposited Ta/Si Soft X-ray Multilayer Mirror

Shao Jianda and Fan Zhengxiu

PD6 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Observation of Influence of Electrical Isolation of Dielectric Substrates on Structure and Reflectivity of Mo/Si Multilayer Coatings

Georgy Gutman and Richard Watts

PD7 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Issues Associated with the Design and Construction of an Imaging System for Soft X-ray Lithography

F. Zernike

TuA1 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Condenser Optics, Partial Coherence and Imaging for Soft X-Ray Projection Lithographapy

Gary E. Sommargren and Lynn G. Seppala

TuA2 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Physical Optics Modeling in Soft-X-Ray Projection Lithography

William C. Sweatt and George N. Lawrence

TuA3 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Practical Tolerancing and Performance Implications for XUV Projection Lithography Reduction Systems*

V. K. Viswanathan

TuA4 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Tolerances of a Reflective Imaging System

Masaaki Itou and Tsuneo Terasawa

TuA5 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

1× Reflective X-Ray Optics

R.F.W. Pease, N.I. Maluf, D.A. Markle, and G. Owen

TuA6 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Precision bending of substrate for high perfomance x-ray optics

D.D. Allred, Y. Shi, M. Berrondo, R.T. Perkins, F. Yuan, L.V. Knight, and A. Reyes-Mena

TuA7 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Multilayer Mirror Technology

D. G. Stearns, R. S. Rosen, and S. P. Vernon

TuB1 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Controlling short wavelength x-ray multilayer period variation on focussing optics

J.B. Kortright, K. Nguyen, P. Denham, and D.L. Windt

TuB2 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Structural Modification of Mo-Si X-Ray Multilayer Mirrors: Ion-Assisted Sputter Deposition

S. P. Vernon, D. G. Stearns, and R. S. Rosen

TuB3 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Multilayer Performance for Soft X-ray Schwarzchild Optics

Georgy Gutman, Kevin Parker, James L. Wood, and Richard Watts

TuB4 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Multilayer Damage and Repair Issues in Soft-X-Ray Projection Lithography

D. P. Gaines, R. C. Spitzer, and N. M. Ceglio

TuB5 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Silicide Layer Growth Rates in Mo/Si Multilayers

R. S. Rosen, D. G. Stearns, M. A. Viliardos, M. E. Kassner, S. P. Vernon, and Y. Cheng

TuB6 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Investigation of Distortion and Damage of Mo-Si Multilayer Reflective Coatings with High Intensity UV Radiation

Howard A. Bender, William T. Silfvast, and Kenneth M. Beck

TuB7 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

An Undulator Facility for Precision Optical Testing

David Attwood

TuC1 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Propagation error in precision Fizeau interferometry

Chunsheng Huang

TuC2 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Status of the Soft X-ray/XUV Optical Metrology Program at the National Institute of Standards and Technology

Richard Watts, David Ederer, Thomas Lucatorto, and Charles Tarrio

TuC3 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Soft-X-ray Projection Lithography Experiments using Schwarzschild Imaging Optics

D. A. Tichenor, G. D. Kubiak, M. E. Malinowski, R. H. Stulen, S. J. Haney, K. W. Berger, L. A. Brown, W. C. Sweatt, J. E. Bjorkholm, R. R. Freeman, M. D. Himel, A. A. MacDowell, D. M. Tennant, O. R. Wood, J. Bokor, T. E. Jewell, W. M. Mansfield, W. K. Waskiewicz, D. L. White, and D. L. Windt

WA1 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Large-Area, High-Resolution Pattern Replication using a Two- Aspherical-Mirror System

Hiroo Kinoshita, Kenji Kurihara, Tutomu Mizota, and Tuneyuki Haga

WA2 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Soft-X-Ray Projection Imaging Using a 1:1 Ring-Field Optic

A. A. MacDowell, J. E. Bjorkholm, K. Early, R. R. Freeman, M. Himel, P. P. Mulgrew, L. H. Szeto, D. W. Taylor, D. M. Tennant, O. R. Wood, J. Bokor, L. Eichner, T. E. Jewell, W. K. Waskiewicz, D. L. White, D. L. Windt, and F. Zernike

WA3 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Schwarzchild microscope for carbon Kα radiation

Katsuhiko Murakami, Hiroshi Nakamura, Tetsuya Oshino, Masayuki Ohtani, and Hiroshi Nagata

WA4 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Characterization and Control of Laser Plasma Flux Parameters for Soft-X-Ray Projection Lithography

Martin C. Richardson and William T. Silfvast

WB1 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Laser Driver for Projection X-ray Lithography

Lloyd A. Hackel and Raymond J. Beach

WB2 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Small Scale Tokamak for X-Ray Lithography

S. Suckewer, L. Bromberg, and D. Cohn

WB3 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Resist Alternatives for Sub-0.35-μm Lithography Using Highly Attenuated Radiation

R. R. Kunz, M. A. Hartney, and M. Rothschild

WC1 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Chemically Amplified Soft X-Ray Resists: Sensitivity, Resolution, and Molecular Photodesorption

Glenn D. Kubiak, Robert Q. Hwang, Michelle T. Schulberg, and Kathy R. Early

WC2 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Characterization of Ray-PN Resist for Soft-X-Ray Projection Lithography

K. Early, D. M. Tennant, D. Jeon, P. P. Mulgrew, A. A. MacDowell, O. R. Wood, G. D. Kubiak, and D. A. Tichenor

WC3 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Mask Technologies for Soft X-ray Projection Lithography at 13nm

D.M. Tennant, A.A. MacDowell, P.P. Mulgrew, J.Z. Pastalan, W.K. Waskiewicz, D.L. Windt, and O.R. Wood

WD1 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

X-Ray Mask Inspection and Qualification

James Wiley

WD2 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF

Reflection Mask Repair for Soft-X-Ray Projection Lithography

A. M. Hawryluk, David P. Gaines, and Diane Stewart

WD3 Soft X-Ray Projection Lithography (SXRAY) 1992 View: PDF