Future Lithographic Requirements

John R. Carruthers

MA.1 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Simulation of Soft-X-Ray Images from a 1:1 Ring-Field Optic

O. R. Wood, R. M. D'Souza, M. Himel, J. E. Bjorkholm, K. Early, L. A. Fetter, R. R. Freeman, L. H. Szeto, D. E. Tennant, D. W. Taylor, T. E. Jewell, D. Lee, A. R. Neureuther, D. M. Newmark, A. A. MacDowell, L. Eichner, W. K. Waskiewicz, D. L. White, D. L. Windt, D. M. Williamson, and F. Zernike

MA.2 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Two Aspheric Mirror System Design Development for Soft-X-Ray Projection Lithography

T. E. Jewell

MA.3 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Physical Optics Modelling of Soft X-ray Projection Lithography (SXPL) Imaging Experiments

Weng W. Chow, William C. Sweatt, George N. Lawrence, and Tanya E. Jewell

MA.4 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Application of Lithography Simulation to Projection X-Ray

A.R. Neureuther

MA.5 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Solutions To Critical Problems In Soft X-ray Projection Lithography

Andrew M. Hawryluk, Gary Sommargren, and Richard Levesque

MA.6 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Study of Defects in Multilayer Reflective Coatings for Soft X-ray Projection Lithography Mask

Khanh B. Nguyen, Tai D. Nguyen, Alfred K. Wong, Andrew R. Neureuther, and David T. Attwood

MA.7 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Limits of Ultra Violet Lithography

R. Fabian Pease

MB.1 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Condenser Optics for Soft X-ray Projection Lithography

Steve Vernon, Gary Sommargren, Lynn Seppala, and David Gaines

MB.2 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

X-ray characterization of a three-element condenser system for soft x-ray projection lithography

D.P. Gaines, G.L. Sommargren, and S.P. Vernon

MB.3 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

A High Efficiency Condenser for Laser Plasma Sources and Ringfield Masks

D. L. White

MB.4 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

High Efficiency Condenser Design for Illuminating a Ring Field

William C. Sweatt

MB.5 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Surface Finish Requirements for SXPL Optics

D. L. Windt, W. K. Waskiewicz, J. Griffith, and J. E. Bjorkholm

MC.1 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Substrate Recovery of Mo-Si Multilayer Coated Optics

D. G. Stearns and S. L. Baker

MC.2 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Masked Deposition Techniques for Controlling Multilayer Period Variation on Short Wavelength Reflective Lenses

J. B. Kortright, E. M. Gullikson, and P. E. Denham

MC.3 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

A Migration Path to Nano-Meter Lithography: From the viewpoint of VLSIs

Eiji Takeda

TuA.1 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Soft X-Ray Projection Lithography in Japan

Hiroo Kinoshita

TuA.2 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Development and Characterization of a 10x Schwarzschild System for Soft-X-Ray Projection Lithography

D. A. Tichenor, G. D. Kubiak, M. E. Malinowski, R. H. Stulen, S. J. Haney, K. W. Berger, R. P. Nissen, R. L. Schmitt, G. A. Wilkerson, L. A. Brown, P. A. Spence, P. S. Jin, W. C. Sweatt, W. W. Chow, J. E. Bjorkholm, R. R. Freeman, M. D. Himel, A. A. MacDowell, D. M. Tennant, O. R. Wood, W. K. Waskiewicz, D. L. White, D. L. Windt, and T. E. Jewell

TuA.3 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Soft X-ray Projection Imaging using 32:1 Schwarzschild Optics

Hiroshi Nagata, Masayuki Ohtani, Katsuhiko Murakami, Tetsuya Oshino, Yukihiko Maejima, Toshihiko Tanaka, Takeo Watanabe, Yoshio Yamashita, and Nobufusi Atoda

TuA.4 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

A New Surface Imaging Resist Technology for Soft-X-Ray Projection Lithography

A. A. MacDowell, O. R. Wood, J. M. Calvert, and T. S. Koloski

TuA.5 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

High-Resolution Imaging of Laser-Produced Plasmas at a Wavelength of 130Å using a Normal Incidence Multilayer-Mirror Microscope

J. F. Seely, G. E. Holland, and J. V. Giasson

TuA.6 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Cost of Ownership for Soft X-ray Projection Lithography

William H. Arnold and Kathleen Early

TuB.1 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Optic Fabrication and Metrology for Soft X-Ray Projection Lithography

Marc D. Himel

TuB.3 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Surface Metrology of Soft X-Ray Optics

T. Vorburger, T. McWaid, J. Fu, C.J. Evans, W.T. Estler, and R.E. Parks

TuB.4 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Point Diffraction Interferometry at Soft X-ray Wavelengths

Gary E. Sommargren and Ralph Hostetler

TuC.1 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Beamline Design for at Wavelength Interferometry

K. Jackson, R. Beguiristain, M. Koike, D. Attwood, and G. Sommargren

TuC.2 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

The New Reflectometry Facility at the National Institute of Standards and Technology

C. Tarrio, R. N. Watts, T. B. Lucatorto, M. Haass, T. A. Calcott, and J. Jia

TuD.1 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Specifying the Surface Finish of X-Ray Mirrors

E. L. Church and P. Z. Takacs

TuD.3 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

FEL Sources For Soft X-Ray Projection Lithography On The Duke 1 GeV Storage Ring

Lewis E. Johnson and John M. J. Madey

TuD.4 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Soft X-ray Conversions Efficiencies from Laser-Produced Plasmas for Soft X-ray Projection Lithography Sources

R. C. Spitzer, R. L. Kauffman, T. Orzechowski, D. W. Phillion, and C. Cerjan

TuD.5 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Thermal distortion effects on optical substrates that reduce coherence properties of Undulator beamlines

Raul Beguiristain

TuD.6 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Monochromator Optics for Coherent Illumination of an Undulator Beamline

Masato Koike

TuD.7 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Printing a 500Å Period Grating Using X-Ray Interference

Max Wei and Erik Anderson

TuD.8 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Manufacture and Characterization of Holographic Diffraction Gratings for Soft X-Rays

Alexander Irtel von Brenndorff

TuD.9 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Modeling Soft X-Ray Projection Lithography

Bernice M. Lum, Andrew R. Neureuther, and Glenn D. Kubiak

TuD.10 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Image Simulation for Soft-X-ray Projection Printing

Derek C. Lee and Andrew R. Neureuther

TuD.11 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Computational Analysis of Debris Formation in SXPL Laser-Plasma Sources

Timothy G. Trucano, Dennis E. Grady, Richard E. Olson, and Archie Farnsworth

TuD.12 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Velocity Characterization of Target Debris from a Laser Produced Plasma Utilizing a “Time-of-Flight” Technique

H. A. Bender, A. M. Eligon, A. Hanzo, and W. T. Silfvast

TuD.13 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Constraints on Pulse Power and Duration for Soft X-ray Lithography Systems

J. A. Liddle

TuD.14 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Computational Simulations of a Soft X-Ray Projection Lithography Laser Plasma Source

R. E. Olson, W. C. Sweatt, and P. D. Rockett

TuD.15 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Cryogenic targets for Laser Plasma X-Ray Lithography Sources

Martin Richardson, Kai Gabel, Feng Jin, and William T. Silfvast

TuD.16 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Calibration and Metrology of X-Ray Optics at the Center for X-ray Optics

E. M. Gullikson and J. H. Underwood

TuD.17 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Enhanced performance of KrF laser-induced x-ray sources and multilayer mirrors for soft x-ray projection lithography

F. Bijkerk, E. Louis, L. Shmaenok, H.-J. Voorma, M.J. van der Wiel, R. Schlatmann, J. Verhoeven, E.W.J.M. van der Drift, J. Romijn, B.A.C. Rousseeuw, F. Vob, R. Désor, and B. Nikolaus

WA.1 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Laser Plasma Source Characterization for Soft X-ray Projection Lithography

William Silfvast, M.C. Richardson, H. Bender, A.M. Eigon, A. Hanzo, E. Miesak, and F. Jin

WA.2 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Laser Plasma Source Targets for Soft X-ray Projection Lithography: Production and Mitigation of Debris*

Glenn D. Kubiak, Kurt W. Berger, and Steven J. Haney

WA.3 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

The Investigation of Discharge-laser-driven Plasmas as Sources for Soft X-ray Projection Lithography*

Paul D. Rockett, John A. Hunter, Richard E. Olson, William C. Sweatt, Glenn D. Kubiak, Kurt W. Berger, Randal L. Schmitt, Harry Shields, Michael Powers, and David L. Windt

WA.4 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Spectral Characterization of Plasma Soft X-ray Sources for Lithographic Applications

Charles Cerjan

WA.5 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Solid State Laser Driver for Projection X-ray Lithography

Lloyd A. Hackel, C. Brent Dane, Mark R. Hermann, and Luis E. Zapata

WA.6 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Soft X-Ray Generation by a Table-Top High-Repetitive Glass Laser

H. Aritome, K. Haramura, H. Sekiguchi, H. Hara, and T. Mochizuki

WA.7 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

A Compact Synchrotron and Condenser for Soft-X-Ray Projection Lithography

D. L. White, A. A. MacDowell, J. B. Murphy, and O. R. Wood

WA.8 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

"Residual Stresses in Mo/Si Multilayers and their Response to Thermal Annealing"

J. Koike, M. E. Kassner, F. J. Weber, D. G. Stearns, R. S. Rosen, and S. P. Vernon

WB.1 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Effects of Microstructure and Interfacial Roughness on Normal Incidence Reflectivity of Ru/C and Ru/B4C Multilayers at 7 nm Wavelength

Tai D. Nguyen, Ronald Gronsky, and Jeffrey B. Kortright

WB.2 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Tarnishing and Restoration of Mo/Si Multilayer X-ray Mirrors

J. H. Underwood, E. M. Gullikson, and Khanh Nguyen

WB.3 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

Soft-x-ray projection lithography using two arrays of phase zone plates

Scott D. Hector and Henry I. Smith

WC.1 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF

The Use of Zone Plate Arrays in Projection X-Ray Lithography

M. Feldman

WC.2 Soft X-Ray Projection Lithography (SXRAY) 1993 View: PDF