Abstract
© 2017 Optical Society of Korea
PDF Article© 2017 Optical Society of Korea
PDF Article
B. Maniscalco, P. M. Kaminski, J. Walls, "Thin film thickness measurements using scanning white light interferometry," Thin Solid Films 550, 10‒16 (2014)
[Crossref]
T. Jo, K. Kim, S. R. Kim, H. J. Pahk, "Thickness and surface measurement of transparent thin-film layers using white light scanning interferometry combined with reflectometry," J. Opt. Soc. Korea 18, 236‒243 (2014)
[Crossref]
S. R. Kim, J. H. Kim, H. J. Pahk, "Fringe-order determination method in white-light phase-shifting interferometry for the compensation of the phase delay and the suppression of excessive phase unwrapping," J. Opt. Soc. Korea 17, 415‒422 (2013)
[Crossref]
P. Hlubina, J. Lunacek, D. Ciprian, "White-light spectral interferometric technique to measure a nonlinear phase function of a thin-film structure," Opt. Commun. 283, 4877‒4881 (2010)
[Crossref]
Y. S. Ghim, S. W. Kim, "Spectrally resolved white-light interferometry for 3D inspection of a thin-film layer structure," Appl. Opt. 41, 799‒803 (2009)
Y. M. Hwang, S. W. Yoon, J. H. Kim, S. Kim, H. Pahk, "Thin-film thickness profile measurement using wavelet transform in wavelength-scanning interferometry," Opt. Lasers Eng. 46, 179‒184 (2008)
[Crossref]
D. Mansfield, "Extraction of film interface surfaces from scanning white light interferometry," Proc. SPIE 7101, 797978 (2008)
J. W. You, S. Kim, D. Kim, "High speed volumetric thickness profile measurement based on full-field wavelength scanning interferometer," Opt. Express 16, 21022‒21031 (2008)
[Crossref]
D. Mansfield, "The distorted helix: thin film extraction from scanning white light interferometry," Proc. SPIE 6186, 61860O (2006)
P. Hlubina, D. Ciprian, J. Lunacek, M. Lesnak, "Dispersive white-light spectral interferometry with absolute phase retrieval to measure thin film," Opt. Express 14, 7678‒7685 (2006)
[Crossref]
S. K. Debnath, M. P. Kothiyal, J. Schmit, P. Hariharan, "Spectrally resolved white- light phase-shifting interference microscopy for thickness profile measurement of transparent thin-film layers on patterned substrates," Opt. Express 14, 4662‒4667 (2006)
[Crossref]
H. Maruyama, S. Inoue, T. Mitsuyama, M. Ohmi, M. Haruna, "Low-coherence interferometer system for the simultaneous measurement of refractive index and thickness," Appl. Opt. 41, 1315‒1322 (2002)
[Crossref]
D. S. Kim, S. H. Kim, "Fast thickness profile measurement using a peak detection method based on an acousto-optic tunable filter," Meas. Sci. Technol. 13, L1‒L5 (2002)
[Crossref]
S. W. Kim, G. H. Kim, "Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry," Appl. Opt. 38, 5968‒5973 (1999)
[Crossref]
K. G. Larkin, "Efficient nonlinear algorithm for envelope detection in white light interferometry," J. Opt. Soc. Am. A. 13, 832‒843 (1996)
[Crossref]
P. de Groot, L. Deck, "Three-dimensional imaging by sub Nyquist sampling of white -light interferograms," Opt. Lett. 18, 1462‒1464 (1993)
[Crossref]
J. Schwider, R. Burow, K.-E. Elssner, J. Grzanna, R. Spolaczyk, K. Merkel, "Digital wave-front measuring interferometry: some systematic error sources," Appl. Opt. 22, 3421‒3432 (1983)
[Crossref]
J. Schwider, R. Burow, K.-E. Elssner, J. Grzanna, R. Spolaczyk, K. Merkel, "Digital wave-front measuring interferometry: some systematic error sources," Appl. Opt. 22, 3421‒3432 (1983)
[Crossref]
P. Hlubina, J. Lunacek, D. Ciprian, "White-light spectral interferometric technique to measure a nonlinear phase function of a thin-film structure," Opt. Commun. 283, 4877‒4881 (2010)
[Crossref]
P. Hlubina, D. Ciprian, J. Lunacek, M. Lesnak, "Dispersive white-light spectral interferometry with absolute phase retrieval to measure thin film," Opt. Express 14, 7678‒7685 (2006)
[Crossref]
P. de Groot, L. Deck, "Three-dimensional imaging by sub Nyquist sampling of white -light interferograms," Opt. Lett. 18, 1462‒1464 (1993)
[Crossref]
S. K. Debnath, M. P. Kothiyal, J. Schmit, P. Hariharan, "Spectrally resolved white- light phase-shifting interference microscopy for thickness profile measurement of transparent thin-film layers on patterned substrates," Opt. Express 14, 4662‒4667 (2006)
[Crossref]
P. de Groot, L. Deck, "Three-dimensional imaging by sub Nyquist sampling of white -light interferograms," Opt. Lett. 18, 1462‒1464 (1993)
[Crossref]
J. Schwider, R. Burow, K.-E. Elssner, J. Grzanna, R. Spolaczyk, K. Merkel, "Digital wave-front measuring interferometry: some systematic error sources," Appl. Opt. 22, 3421‒3432 (1983)
[Crossref]
P. A. Flourney, R. W. McClure, G. Wyntjes, "White-light interferometric thickness gauge," Appl. Opt. 11, 1907‒1915 (1972)
[Crossref]
Y. S. Ghim, S. W. Kim, "Spectrally resolved white-light interferometry for 3D inspection of a thin-film layer structure," Appl. Opt. 41, 799‒803 (2009)
J. Schwider, R. Burow, K.-E. Elssner, J. Grzanna, R. Spolaczyk, K. Merkel, "Digital wave-front measuring interferometry: some systematic error sources," Appl. Opt. 22, 3421‒3432 (1983)
[Crossref]
S. K. Debnath, M. P. Kothiyal, J. Schmit, P. Hariharan, "Spectrally resolved white- light phase-shifting interference microscopy for thickness profile measurement of transparent thin-film layers on patterned substrates," Opt. Express 14, 4662‒4667 (2006)
[Crossref]
H. Maruyama, S. Inoue, T. Mitsuyama, M. Ohmi, M. Haruna, "Low-coherence interferometer system for the simultaneous measurement of refractive index and thickness," Appl. Opt. 41, 1315‒1322 (2002)
[Crossref]
P. Hlubina, J. Lunacek, D. Ciprian, "White-light spectral interferometric technique to measure a nonlinear phase function of a thin-film structure," Opt. Commun. 283, 4877‒4881 (2010)
[Crossref]
P. Hlubina, D. Ciprian, J. Lunacek, M. Lesnak, "Dispersive white-light spectral interferometry with absolute phase retrieval to measure thin film," Opt. Express 14, 7678‒7685 (2006)
[Crossref]
Y. M. Hwang, S. W. Yoon, J. H. Kim, S. Kim, H. Pahk, "Thin-film thickness profile measurement using wavelet transform in wavelength-scanning interferometry," Opt. Lasers Eng. 46, 179‒184 (2008)
[Crossref]
H. Maruyama, S. Inoue, T. Mitsuyama, M. Ohmi, M. Haruna, "Low-coherence interferometer system for the simultaneous measurement of refractive index and thickness," Appl. Opt. 41, 1315‒1322 (2002)
[Crossref]
T. Jo, K. Kim, S. R. Kim, H. J. Pahk, "Thickness and surface measurement of transparent thin-film layers using white light scanning interferometry combined with reflectometry," J. Opt. Soc. Korea 18, 236‒243 (2014)
[Crossref]
B. Maniscalco, P. M. Kaminski, J. Walls, "Thin film thickness measurements using scanning white light interferometry," Thin Solid Films 550, 10‒16 (2014)
[Crossref]
J. W. You, S. Kim, D. Kim, "High speed volumetric thickness profile measurement based on full-field wavelength scanning interferometer," Opt. Express 16, 21022‒21031 (2008)
[Crossref]
D. S. Kim, S. H. Kim, "Fast thickness profile measurement using a peak detection method based on an acousto-optic tunable filter," Meas. Sci. Technol. 13, L1‒L5 (2002)
[Crossref]
S. W. Kim, G. H. Kim, "Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry," Appl. Opt. 38, 5968‒5973 (1999)
[Crossref]
S. R. Kim, J. H. Kim, H. J. Pahk, "Fringe-order determination method in white-light phase-shifting interferometry for the compensation of the phase delay and the suppression of excessive phase unwrapping," J. Opt. Soc. Korea 17, 415‒422 (2013)
[Crossref]
Y. M. Hwang, S. W. Yoon, J. H. Kim, S. Kim, H. Pahk, "Thin-film thickness profile measurement using wavelet transform in wavelength-scanning interferometry," Opt. Lasers Eng. 46, 179‒184 (2008)
[Crossref]
T. Jo, K. Kim, S. R. Kim, H. J. Pahk, "Thickness and surface measurement of transparent thin-film layers using white light scanning interferometry combined with reflectometry," J. Opt. Soc. Korea 18, 236‒243 (2014)
[Crossref]
Y. M. Hwang, S. W. Yoon, J. H. Kim, S. Kim, H. Pahk, "Thin-film thickness profile measurement using wavelet transform in wavelength-scanning interferometry," Opt. Lasers Eng. 46, 179‒184 (2008)
[Crossref]
J. W. You, S. Kim, D. Kim, "High speed volumetric thickness profile measurement based on full-field wavelength scanning interferometer," Opt. Express 16, 21022‒21031 (2008)
[Crossref]
D. S. Kim, S. H. Kim, "Fast thickness profile measurement using a peak detection method based on an acousto-optic tunable filter," Meas. Sci. Technol. 13, L1‒L5 (2002)
[Crossref]
T. Jo, K. Kim, S. R. Kim, H. J. Pahk, "Thickness and surface measurement of transparent thin-film layers using white light scanning interferometry combined with reflectometry," J. Opt. Soc. Korea 18, 236‒243 (2014)
[Crossref]
S. R. Kim, J. H. Kim, H. J. Pahk, "Fringe-order determination method in white-light phase-shifting interferometry for the compensation of the phase delay and the suppression of excessive phase unwrapping," J. Opt. Soc. Korea 17, 415‒422 (2013)
[Crossref]
Y. S. Ghim, S. W. Kim, "Spectrally resolved white-light interferometry for 3D inspection of a thin-film layer structure," Appl. Opt. 41, 799‒803 (2009)
S. W. Kim, G. H. Kim, "Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry," Appl. Opt. 38, 5968‒5973 (1999)
[Crossref]
S. K. Debnath, M. P. Kothiyal, J. Schmit, P. Hariharan, "Spectrally resolved white- light phase-shifting interference microscopy for thickness profile measurement of transparent thin-film layers on patterned substrates," Opt. Express 14, 4662‒4667 (2006)
[Crossref]
K. G. Larkin, "Efficient nonlinear algorithm for envelope detection in white light interferometry," J. Opt. Soc. Am. A. 13, 832‒843 (1996)
[Crossref]
P. Hlubina, D. Ciprian, J. Lunacek, M. Lesnak, "Dispersive white-light spectral interferometry with absolute phase retrieval to measure thin film," Opt. Express 14, 7678‒7685 (2006)
[Crossref]
P. Hlubina, J. Lunacek, D. Ciprian, "White-light spectral interferometric technique to measure a nonlinear phase function of a thin-film structure," Opt. Commun. 283, 4877‒4881 (2010)
[Crossref]
P. Hlubina, D. Ciprian, J. Lunacek, M. Lesnak, "Dispersive white-light spectral interferometry with absolute phase retrieval to measure thin film," Opt. Express 14, 7678‒7685 (2006)
[Crossref]
B. Maniscalco, P. M. Kaminski, J. Walls, "Thin film thickness measurements using scanning white light interferometry," Thin Solid Films 550, 10‒16 (2014)
[Crossref]
D. Mansfield, "Extraction of film interface surfaces from scanning white light interferometry," Proc. SPIE 7101, 797978 (2008)
D. Mansfield, "The distorted helix: thin film extraction from scanning white light interferometry," Proc. SPIE 6186, 61860O (2006)
H. Maruyama, S. Inoue, T. Mitsuyama, M. Ohmi, M. Haruna, "Low-coherence interferometer system for the simultaneous measurement of refractive index and thickness," Appl. Opt. 41, 1315‒1322 (2002)
[Crossref]
P. A. Flourney, R. W. McClure, G. Wyntjes, "White-light interferometric thickness gauge," Appl. Opt. 11, 1907‒1915 (1972)
[Crossref]
H. G. Tompkins, W. A. McGahan, Spectroscopic ellipsometry and reflectometry: a user’s guide .
J. Schwider, R. Burow, K.-E. Elssner, J. Grzanna, R. Spolaczyk, K. Merkel, "Digital wave-front measuring interferometry: some systematic error sources," Appl. Opt. 22, 3421‒3432 (1983)
[Crossref]
H. Maruyama, S. Inoue, T. Mitsuyama, M. Ohmi, M. Haruna, "Low-coherence interferometer system for the simultaneous measurement of refractive index and thickness," Appl. Opt. 41, 1315‒1322 (2002)
[Crossref]
H. Maruyama, S. Inoue, T. Mitsuyama, M. Ohmi, M. Haruna, "Low-coherence interferometer system for the simultaneous measurement of refractive index and thickness," Appl. Opt. 41, 1315‒1322 (2002)
[Crossref]
Y. M. Hwang, S. W. Yoon, J. H. Kim, S. Kim, H. Pahk, "Thin-film thickness profile measurement using wavelet transform in wavelength-scanning interferometry," Opt. Lasers Eng. 46, 179‒184 (2008)
[Crossref]
T. Jo, K. Kim, S. R. Kim, H. J. Pahk, "Thickness and surface measurement of transparent thin-film layers using white light scanning interferometry combined with reflectometry," J. Opt. Soc. Korea 18, 236‒243 (2014)
[Crossref]
S. R. Kim, J. H. Kim, H. J. Pahk, "Fringe-order determination method in white-light phase-shifting interferometry for the compensation of the phase delay and the suppression of excessive phase unwrapping," J. Opt. Soc. Korea 17, 415‒422 (2013)
[Crossref]
S. K. Debnath, M. P. Kothiyal, J. Schmit, P. Hariharan, "Spectrally resolved white- light phase-shifting interference microscopy for thickness profile measurement of transparent thin-film layers on patterned substrates," Opt. Express 14, 4662‒4667 (2006)
[Crossref]
J. Schwider, R. Burow, K.-E. Elssner, J. Grzanna, R. Spolaczyk, K. Merkel, "Digital wave-front measuring interferometry: some systematic error sources," Appl. Opt. 22, 3421‒3432 (1983)
[Crossref]
J. Schwider, R. Burow, K.-E. Elssner, J. Grzanna, R. Spolaczyk, K. Merkel, "Digital wave-front measuring interferometry: some systematic error sources," Appl. Opt. 22, 3421‒3432 (1983)
[Crossref]
H. G. Tompkins, W. A. McGahan, Spectroscopic ellipsometry and reflectometry: a user’s guide .
B. Maniscalco, P. M. Kaminski, J. Walls, "Thin film thickness measurements using scanning white light interferometry," Thin Solid Films 550, 10‒16 (2014)
[Crossref]
P. A. Flourney, R. W. McClure, G. Wyntjes, "White-light interferometric thickness gauge," Appl. Opt. 11, 1907‒1915 (1972)
[Crossref]
Y. M. Hwang, S. W. Yoon, J. H. Kim, S. Kim, H. Pahk, "Thin-film thickness profile measurement using wavelet transform in wavelength-scanning interferometry," Opt. Lasers Eng. 46, 179‒184 (2008)
[Crossref]
P. A. Flourney, R. W. McClure, G. Wyntjes, "White-light interferometric thickness gauge," Appl. Opt. 11, 1907‒1915 (1972)
[Crossref]
H. Maruyama, S. Inoue, T. Mitsuyama, M. Ohmi, M. Haruna, "Low-coherence interferometer system for the simultaneous measurement of refractive index and thickness," Appl. Opt. 41, 1315‒1322 (2002)
[Crossref]
Y. S. Ghim, S. W. Kim, "Spectrally resolved white-light interferometry for 3D inspection of a thin-film layer structure," Appl. Opt. 41, 799‒803 (2009)
S. W. Kim, G. H. Kim, "Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry," Appl. Opt. 38, 5968‒5973 (1999)
[Crossref]
J. Schwider, R. Burow, K.-E. Elssner, J. Grzanna, R. Spolaczyk, K. Merkel, "Digital wave-front measuring interferometry: some systematic error sources," Appl. Opt. 22, 3421‒3432 (1983)
[Crossref]
K. Itoh, "Analysis of the phase unwrapping problem," Appl. Opt. 21, 2470‒2470 (1982)
[Crossref]
K. G. Larkin, "Efficient nonlinear algorithm for envelope detection in white light interferometry," J. Opt. Soc. Am. A. 13, 832‒843 (1996)
[Crossref]
S. R. Kim, J. H. Kim, H. J. Pahk, "Fringe-order determination method in white-light phase-shifting interferometry for the compensation of the phase delay and the suppression of excessive phase unwrapping," J. Opt. Soc. Korea 17, 415‒422 (2013)
[Crossref]
T. Jo, K. Kim, S. R. Kim, H. J. Pahk, "Thickness and surface measurement of transparent thin-film layers using white light scanning interferometry combined with reflectometry," J. Opt. Soc. Korea 18, 236‒243 (2014)
[Crossref]
D. S. Kim, S. H. Kim, "Fast thickness profile measurement using a peak detection method based on an acousto-optic tunable filter," Meas. Sci. Technol. 13, L1‒L5 (2002)
[Crossref]
P. Hlubina, J. Lunacek, D. Ciprian, "White-light spectral interferometric technique to measure a nonlinear phase function of a thin-film structure," Opt. Commun. 283, 4877‒4881 (2010)
[Crossref]
J. W. You, S. Kim, D. Kim, "High speed volumetric thickness profile measurement based on full-field wavelength scanning interferometer," Opt. Express 16, 21022‒21031 (2008)
[Crossref]
P. Hlubina, D. Ciprian, J. Lunacek, M. Lesnak, "Dispersive white-light spectral interferometry with absolute phase retrieval to measure thin film," Opt. Express 14, 7678‒7685 (2006)
[Crossref]
S. K. Debnath, M. P. Kothiyal, J. Schmit, P. Hariharan, "Spectrally resolved white- light phase-shifting interference microscopy for thickness profile measurement of transparent thin-film layers on patterned substrates," Opt. Express 14, 4662‒4667 (2006)
[Crossref]
Y. M. Hwang, S. W. Yoon, J. H. Kim, S. Kim, H. Pahk, "Thin-film thickness profile measurement using wavelet transform in wavelength-scanning interferometry," Opt. Lasers Eng. 46, 179‒184 (2008)
[Crossref]
P. de Groot, L. Deck, "Three-dimensional imaging by sub Nyquist sampling of white -light interferograms," Opt. Lett. 18, 1462‒1464 (1993)
[Crossref]
D. Mansfield, "The distorted helix: thin film extraction from scanning white light interferometry," Proc. SPIE 6186, 61860O (2006)
D. Mansfield, "Extraction of film interface surfaces from scanning white light interferometry," Proc. SPIE 7101, 797978 (2008)
B. Maniscalco, P. M. Kaminski, J. Walls, "Thin film thickness measurements using scanning white light interferometry," Thin Solid Films 550, 10‒16 (2014)
[Crossref]
H. G. Tompkins, W. A. McGahan, Spectroscopic ellipsometry and reflectometry: a user’s guide .
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