Abstract
© 2019 Optical Society of Korea
PDF Article© 2019 Optical Society of Korea
PDF Article
D. H. Geuzebroek, G. A. J. Besselink, F. Schreuder, F. Falke, A. Leinse, R. G. Heideman, "Silicon-nitride biophotonics sensing platform," Proc. SPIE 10921, 1092117 (2019)
Y. Qi, D. J. Rowe, V. Mittal, M. Banakar, Y. Wu, M. Nedeljkovic, J. S. Wilkinson, G. Z. Mashanovich, "Integration of mid-infrared SOI photonics with micro-fluidics," Proc. SPIE 10923, 1092301 (2019)
D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, C. Roeloffzen, "Silicon nitride in silicon photonics," Proc. IEEE 106, 2209‒2231 (2018)
[Crossref]
J. C. Tinguely, O. L. Helle, B. S. Ahluwalia, "Silicon nitride waveguide platform for fluorescence microscopy of living cells," Opt. Express 25, 27678‒27690 (2017)
[Crossref]
A. F. Gavelsa, D. G. Garcia, J. C. Ramirez, L. M. Lechuga, "Last advances in silicon-based optical biosensors," Sensors 16, 285 (2016)
[Crossref]
P. Muellner, E. Melnik, G. Koppitsch, J. Kraft, F. Schrank, R. Hainberger, "CMOS compatible Si3N4 waveguides for optical biosensing," Procedia Eng. 120, 578‒581 (2015)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
F. T. Dullo, S. Lindecrantz, J. Jagerska, H. Hansen, M. Engqvist, S. A. Solbo, O. G. Helleso, "Sensitive on-chip methane detection with a cryptophane-A cladded Mach-Zehnder interferometer," Opt. Express 23, 31564‒31573 (2015)
[Crossref]
A. Dhakal, P. Wuytens, F. Peyskens, A. Z. Subramanian, N. Le Thomas, R. Baets, "Silicon-nitride waveguides for on-chip Raman spectroscopy," Proc. SPIE 9141, 91411C (2014)
A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]
J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, T. J. Kippenberg, "Dispersion engineering of thick high-Q silicon nitride ring-resonator via atomic layer deposition," Opt. Express 20, 27661‒27669 (2012)
[Crossref]
D. Duval, "Nanophotonic lab-on-a-chip platforms including novel bimodal interferometers microfluidics and grating couplers," Lab. Chip 12, 1987‒1994 (2012)
[Crossref]
K. E. Zinoviev, A. B. Gonzalez-Guerrero, C. Dominguez, L. M. Lechuga, "Integrated bimodal waveguide interferometric biosensor for label-free analysis," J. Lightwave Technol. 29, 1926‒1930 (2011)
[Crossref]
C. Ciminelli, F. Dell’Olio, C. E. Campanella, M. N. Armenise, "Photonic technology for angular velocity sensing," Adv. Opt. Photonics 2, 370‒404 (2010)
[Crossref]
E. F. Burmeister, J. P. Mack, H. N. Poulsen, M. L. Masanovic, B. Stamenic, D. J. Blumenthal, J. E. Bowers, "Photonic integrated circuit optical buffer for packet-switched networks," Opt. Express 17, 6629‒6635 (2009)
[Crossref]
H. Takahashi, "Planar lightwave circuit devices for optical communications: present and future," Proc. SPIE 5246, 520‒531 (2003)
S. P. Pogossian, L. Vescan, A. Vonsovici, "The single-mode condition for semiconductor rib waveguides with large cross section," J. Lightwave Technol. 16, 1851‒1853 (1998)
[Crossref]
J. Schmidtchen, A. Splett, B. Schuppert, K. Pertermann, G. Burbach, "Low loss single mode optical waveguides with large cross-selection in silicon-on-insulator," Electron. Lett. 27, 1486‒1487 (1991)
[Crossref]
R. A. Soref, J. J. Schmidtchen, K. Peterman, "Large single-mode rib waveguides in GeSi-Si and Si-on-SiO2," IEEE J. Quantum Electron. 27, 1971‒1974 (1991)
[Crossref]
K. S. Chiang, "Performance of the effective-index method for the analysis of dielectric waveguides," Opt. Lett. 16, 714‒716 (1991)
[Crossref]
J. C. Tinguely, O. L. Helle, B. S. Ahluwalia, "Silicon nitride waveguide platform for fluorescence microscopy of living cells," Opt. Express 25, 27678‒27690 (2017)
[Crossref]
C. Ciminelli, F. Dell’Olio, C. E. Campanella, M. N. Armenise, "Photonic technology for angular velocity sensing," Adv. Opt. Photonics 2, 370‒404 (2010)
[Crossref]
A. Dhakal, P. Wuytens, F. Peyskens, A. Z. Subramanian, N. Le Thomas, R. Baets, "Silicon-nitride waveguides for on-chip Raman spectroscopy," Proc. SPIE 9141, 91411C (2014)
A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
Y. Qi, D. J. Rowe, V. Mittal, M. Banakar, Y. Wu, M. Nedeljkovic, J. S. Wilkinson, G. Z. Mashanovich, "Integration of mid-infrared SOI photonics with micro-fluidics," Proc. SPIE 10923, 1092301 (2019)
D. H. Geuzebroek, G. A. J. Besselink, F. Schreuder, F. Falke, A. Leinse, R. G. Heideman, "Silicon-nitride biophotonics sensing platform," Proc. SPIE 10921, 1092117 (2019)
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, C. Roeloffzen, "Silicon nitride in silicon photonics," Proc. IEEE 106, 2209‒2231 (2018)
[Crossref]
E. F. Burmeister, J. P. Mack, H. N. Poulsen, M. L. Masanovic, B. Stamenic, D. J. Blumenthal, J. E. Bowers, "Photonic integrated circuit optical buffer for packet-switched networks," Opt. Express 17, 6629‒6635 (2009)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]
E. F. Burmeister, J. P. Mack, H. N. Poulsen, M. L. Masanovic, B. Stamenic, D. J. Blumenthal, J. E. Bowers, "Photonic integrated circuit optical buffer for packet-switched networks," Opt. Express 17, 6629‒6635 (2009)
[Crossref]
J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, T. J. Kippenberg, "Dispersion engineering of thick high-Q silicon nitride ring-resonator via atomic layer deposition," Opt. Express 20, 27661‒27669 (2012)
[Crossref]
J. Schmidtchen, A. Splett, B. Schuppert, K. Pertermann, G. Burbach, "Low loss single mode optical waveguides with large cross-selection in silicon-on-insulator," Electron. Lett. 27, 1486‒1487 (1991)
[Crossref]
E. F. Burmeister, J. P. Mack, H. N. Poulsen, M. L. Masanovic, B. Stamenic, D. J. Blumenthal, J. E. Bowers, "Photonic integrated circuit optical buffer for packet-switched networks," Opt. Express 17, 6629‒6635 (2009)
[Crossref]
C. Ciminelli, F. Dell’Olio, C. E. Campanella, M. N. Armenise, "Photonic technology for angular velocity sensing," Adv. Opt. Photonics 2, 370‒404 (2010)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
K. S. Chiang, "Performance of the effective-index method for the analysis of dielectric waveguides," Opt. Lett. 16, 714‒716 (1991)
[Crossref]
C. Ciminelli, F. Dell’Olio, C. E. Campanella, M. N. Armenise, "Photonic technology for angular velocity sensing," Adv. Opt. Photonics 2, 370‒404 (2010)
[Crossref]
A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
C. Ciminelli, F. Dell’Olio, C. E. Campanella, M. N. Armenise, "Photonic technology for angular velocity sensing," Adv. Opt. Photonics 2, 370‒404 (2010)
[Crossref]
A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
A. Dhakal, P. Wuytens, F. Peyskens, A. Z. Subramanian, N. Le Thomas, R. Baets, "Silicon-nitride waveguides for on-chip Raman spectroscopy," Proc. SPIE 9141, 91411C (2014)
A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]
K. E. Zinoviev, A. B. Gonzalez-Guerrero, C. Dominguez, L. M. Lechuga, "Integrated bimodal waveguide interferometric biosensor for label-free analysis," J. Lightwave Technol. 29, 1926‒1930 (2011)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]
F. T. Dullo, S. Lindecrantz, J. Jagerska, H. Hansen, M. Engqvist, S. A. Solbo, O. G. Helleso, "Sensitive on-chip methane detection with a cryptophane-A cladded Mach-Zehnder interferometer," Opt. Express 23, 31564‒31573 (2015)
[Crossref]
D. Duval, "Nanophotonic lab-on-a-chip platforms including novel bimodal interferometers microfluidics and grating couplers," Lab. Chip 12, 1987‒1994 (2012)
[Crossref]
F. T. Dullo, S. Lindecrantz, J. Jagerska, H. Hansen, M. Engqvist, S. A. Solbo, O. G. Helleso, "Sensitive on-chip methane detection with a cryptophane-A cladded Mach-Zehnder interferometer," Opt. Express 23, 31564‒31573 (2015)
[Crossref]
D. H. Geuzebroek, G. A. J. Besselink, F. Schreuder, F. Falke, A. Leinse, R. G. Heideman, "Silicon-nitride biophotonics sensing platform," Proc. SPIE 10921, 1092117 (2019)
A. F. Gavelsa, D. G. Garcia, J. C. Ramirez, L. M. Lechuga, "Last advances in silicon-based optical biosensors," Sensors 16, 285 (2016)
[Crossref]
A. F. Gavelsa, D. G. Garcia, J. C. Ramirez, L. M. Lechuga, "Last advances in silicon-based optical biosensors," Sensors 16, 285 (2016)
[Crossref]
D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, C. Roeloffzen, "Silicon nitride in silicon photonics," Proc. IEEE 106, 2209‒2231 (2018)
[Crossref]
D. H. Geuzebroek, G. A. J. Besselink, F. Schreuder, F. Falke, A. Leinse, R. G. Heideman, "Silicon-nitride biophotonics sensing platform," Proc. SPIE 10921, 1092117 (2019)
K. E. Zinoviev, A. B. Gonzalez-Guerrero, C. Dominguez, L. M. Lechuga, "Integrated bimodal waveguide interferometric biosensor for label-free analysis," J. Lightwave Technol. 29, 1926‒1930 (2011)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
P. Muellner, E. Melnik, G. Koppitsch, J. Kraft, F. Schrank, R. Hainberger, "CMOS compatible Si3N4 waveguides for optical biosensing," Procedia Eng. 120, 578‒581 (2015)
[Crossref]
F. T. Dullo, S. Lindecrantz, J. Jagerska, H. Hansen, M. Engqvist, S. A. Solbo, O. G. Helleso, "Sensitive on-chip methane detection with a cryptophane-A cladded Mach-Zehnder interferometer," Opt. Express 23, 31564‒31573 (2015)
[Crossref]
J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, T. J. Kippenberg, "Dispersion engineering of thick high-Q silicon nitride ring-resonator via atomic layer deposition," Opt. Express 20, 27661‒27669 (2012)
[Crossref]
D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, C. Roeloffzen, "Silicon nitride in silicon photonics," Proc. IEEE 106, 2209‒2231 (2018)
[Crossref]
D. H. Geuzebroek, G. A. J. Besselink, F. Schreuder, F. Falke, A. Leinse, R. G. Heideman, "Silicon-nitride biophotonics sensing platform," Proc. SPIE 10921, 1092117 (2019)
A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]
J. C. Tinguely, O. L. Helle, B. S. Ahluwalia, "Silicon nitride waveguide platform for fluorescence microscopy of living cells," Opt. Express 25, 27678‒27690 (2017)
[Crossref]
F. T. Dullo, S. Lindecrantz, J. Jagerska, H. Hansen, M. Engqvist, S. A. Solbo, O. G. Helleso, "Sensitive on-chip methane detection with a cryptophane-A cladded Mach-Zehnder interferometer," Opt. Express 23, 31564‒31573 (2015)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, T. J. Kippenberg, "Dispersion engineering of thick high-Q silicon nitride ring-resonator via atomic layer deposition," Opt. Express 20, 27661‒27669 (2012)
[Crossref]
J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, T. J. Kippenberg, "Dispersion engineering of thick high-Q silicon nitride ring-resonator via atomic layer deposition," Opt. Express 20, 27661‒27669 (2012)
[Crossref]
F. T. Dullo, S. Lindecrantz, J. Jagerska, H. Hansen, M. Engqvist, S. A. Solbo, O. G. Helleso, "Sensitive on-chip methane detection with a cryptophane-A cladded Mach-Zehnder interferometer," Opt. Express 23, 31564‒31573 (2015)
[Crossref]
A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]
J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, T. J. Kippenberg, "Dispersion engineering of thick high-Q silicon nitride ring-resonator via atomic layer deposition," Opt. Express 20, 27661‒27669 (2012)
[Crossref]
P. Muellner, E. Melnik, G. Koppitsch, J. Kraft, F. Schrank, R. Hainberger, "CMOS compatible Si3N4 waveguides for optical biosensing," Procedia Eng. 120, 578‒581 (2015)
[Crossref]
P. Muellner, E. Melnik, G. Koppitsch, J. Kraft, F. Schrank, R. Hainberger, "CMOS compatible Si3N4 waveguides for optical biosensing," Procedia Eng. 120, 578‒581 (2015)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
A. Dhakal, P. Wuytens, F. Peyskens, A. Z. Subramanian, N. Le Thomas, R. Baets, "Silicon-nitride waveguides for on-chip Raman spectroscopy," Proc. SPIE 9141, 91411C (2014)
A. F. Gavelsa, D. G. Garcia, J. C. Ramirez, L. M. Lechuga, "Last advances in silicon-based optical biosensors," Sensors 16, 285 (2016)
[Crossref]
K. E. Zinoviev, A. B. Gonzalez-Guerrero, C. Dominguez, L. M. Lechuga, "Integrated bimodal waveguide interferometric biosensor for label-free analysis," J. Lightwave Technol. 29, 1926‒1930 (2011)
[Crossref]
D. H. Geuzebroek, G. A. J. Besselink, F. Schreuder, F. Falke, A. Leinse, R. G. Heideman, "Silicon-nitride biophotonics sensing platform," Proc. SPIE 10921, 1092117 (2019)
D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, C. Roeloffzen, "Silicon nitride in silicon photonics," Proc. IEEE 106, 2209‒2231 (2018)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]
F. T. Dullo, S. Lindecrantz, J. Jagerska, H. Hansen, M. Engqvist, S. A. Solbo, O. G. Helleso, "Sensitive on-chip methane detection with a cryptophane-A cladded Mach-Zehnder interferometer," Opt. Express 23, 31564‒31573 (2015)
[Crossref]
E. F. Burmeister, J. P. Mack, H. N. Poulsen, M. L. Masanovic, B. Stamenic, D. J. Blumenthal, J. E. Bowers, "Photonic integrated circuit optical buffer for packet-switched networks," Opt. Express 17, 6629‒6635 (2009)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
E. F. Burmeister, J. P. Mack, H. N. Poulsen, M. L. Masanovic, B. Stamenic, D. J. Blumenthal, J. E. Bowers, "Photonic integrated circuit optical buffer for packet-switched networks," Opt. Express 17, 6629‒6635 (2009)
[Crossref]
Y. Qi, D. J. Rowe, V. Mittal, M. Banakar, Y. Wu, M. Nedeljkovic, J. S. Wilkinson, G. Z. Mashanovich, "Integration of mid-infrared SOI photonics with micro-fluidics," Proc. SPIE 10923, 1092301 (2019)
P. Muellner, E. Melnik, G. Koppitsch, J. Kraft, F. Schrank, R. Hainberger, "CMOS compatible Si3N4 waveguides for optical biosensing," Procedia Eng. 120, 578‒581 (2015)
[Crossref]
Y. Qi, D. J. Rowe, V. Mittal, M. Banakar, Y. Wu, M. Nedeljkovic, J. S. Wilkinson, G. Z. Mashanovich, "Integration of mid-infrared SOI photonics with micro-fluidics," Proc. SPIE 10923, 1092301 (2019)
P. Muellner, E. Melnik, G. Koppitsch, J. Kraft, F. Schrank, R. Hainberger, "CMOS compatible Si3N4 waveguides for optical biosensing," Procedia Eng. 120, 578‒581 (2015)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
Y. Qi, D. J. Rowe, V. Mittal, M. Banakar, Y. Wu, M. Nedeljkovic, J. S. Wilkinson, G. Z. Mashanovich, "Integration of mid-infrared SOI photonics with micro-fluidics," Proc. SPIE 10923, 1092301 (2019)
A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
J. Schmidtchen, A. Splett, B. Schuppert, K. Pertermann, G. Burbach, "Low loss single mode optical waveguides with large cross-selection in silicon-on-insulator," Electron. Lett. 27, 1486‒1487 (1991)
[Crossref]
R. A. Soref, J. J. Schmidtchen, K. Peterman, "Large single-mode rib waveguides in GeSi-Si and Si-on-SiO2," IEEE J. Quantum Electron. 27, 1971‒1974 (1991)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
A. Dhakal, P. Wuytens, F. Peyskens, A. Z. Subramanian, N. Le Thomas, R. Baets, "Silicon-nitride waveguides for on-chip Raman spectroscopy," Proc. SPIE 9141, 91411C (2014)
A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]
S. P. Pogossian, L. Vescan, A. Vonsovici, "The single-mode condition for semiconductor rib waveguides with large cross section," J. Lightwave Technol. 16, 1851‒1853 (1998)
[Crossref]
E. F. Burmeister, J. P. Mack, H. N. Poulsen, M. L. Masanovic, B. Stamenic, D. J. Blumenthal, J. E. Bowers, "Photonic integrated circuit optical buffer for packet-switched networks," Opt. Express 17, 6629‒6635 (2009)
[Crossref]
Y. Qi, D. J. Rowe, V. Mittal, M. Banakar, Y. Wu, M. Nedeljkovic, J. S. Wilkinson, G. Z. Mashanovich, "Integration of mid-infrared SOI photonics with micro-fluidics," Proc. SPIE 10923, 1092301 (2019)
A. F. Gavelsa, D. G. Garcia, J. C. Ramirez, L. M. Lechuga, "Last advances in silicon-based optical biosensors," Sensors 16, 285 (2016)
[Crossref]
J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, T. J. Kippenberg, "Dispersion engineering of thick high-Q silicon nitride ring-resonator via atomic layer deposition," Opt. Express 20, 27661‒27669 (2012)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, C. Roeloffzen, "Silicon nitride in silicon photonics," Proc. IEEE 106, 2209‒2231 (2018)
[Crossref]
A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]
Y. Qi, D. J. Rowe, V. Mittal, M. Banakar, Y. Wu, M. Nedeljkovic, J. S. Wilkinson, G. Z. Mashanovich, "Integration of mid-infrared SOI photonics with micro-fluidics," Proc. SPIE 10923, 1092301 (2019)
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
J. Schmidtchen, A. Splett, B. Schuppert, K. Pertermann, G. Burbach, "Low loss single mode optical waveguides with large cross-selection in silicon-on-insulator," Electron. Lett. 27, 1486‒1487 (1991)
[Crossref]
R. A. Soref, J. J. Schmidtchen, K. Peterman, "Large single-mode rib waveguides in GeSi-Si and Si-on-SiO2," IEEE J. Quantum Electron. 27, 1971‒1974 (1991)
[Crossref]
P. Muellner, E. Melnik, G. Koppitsch, J. Kraft, F. Schrank, R. Hainberger, "CMOS compatible Si3N4 waveguides for optical biosensing," Procedia Eng. 120, 578‒581 (2015)
[Crossref]
D. H. Geuzebroek, G. A. J. Besselink, F. Schreuder, F. Falke, A. Leinse, R. G. Heideman, "Silicon-nitride biophotonics sensing platform," Proc. SPIE 10921, 1092117 (2019)
J. Schmidtchen, A. Splett, B. Schuppert, K. Pertermann, G. Burbach, "Low loss single mode optical waveguides with large cross-selection in silicon-on-insulator," Electron. Lett. 27, 1486‒1487 (1991)
[Crossref]
A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]
A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]
F. T. Dullo, S. Lindecrantz, J. Jagerska, H. Hansen, M. Engqvist, S. A. Solbo, O. G. Helleso, "Sensitive on-chip methane detection with a cryptophane-A cladded Mach-Zehnder interferometer," Opt. Express 23, 31564‒31573 (2015)
[Crossref]
R. A. Soref, J. J. Schmidtchen, K. Peterman, "Large single-mode rib waveguides in GeSi-Si and Si-on-SiO2," IEEE J. Quantum Electron. 27, 1971‒1974 (1991)
[Crossref]
J. Schmidtchen, A. Splett, B. Schuppert, K. Pertermann, G. Burbach, "Low loss single mode optical waveguides with large cross-selection in silicon-on-insulator," Electron. Lett. 27, 1486‒1487 (1991)
[Crossref]
E. F. Burmeister, J. P. Mack, H. N. Poulsen, M. L. Masanovic, B. Stamenic, D. J. Blumenthal, J. E. Bowers, "Photonic integrated circuit optical buffer for packet-switched networks," Opt. Express 17, 6629‒6635 (2009)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
A. Dhakal, P. Wuytens, F. Peyskens, A. Z. Subramanian, N. Le Thomas, R. Baets, "Silicon-nitride waveguides for on-chip Raman spectroscopy," Proc. SPIE 9141, 91411C (2014)
A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]
H. Takahashi, "Planar lightwave circuit devices for optical communications: present and future," Proc. SPIE 5246, 520‒531 (2003)
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
J. C. Tinguely, O. L. Helle, B. S. Ahluwalia, "Silicon nitride waveguide platform for fluorescence microscopy of living cells," Opt. Express 25, 27678‒27690 (2017)
[Crossref]
S. P. Pogossian, L. Vescan, A. Vonsovici, "The single-mode condition for semiconductor rib waveguides with large cross section," J. Lightwave Technol. 16, 1851‒1853 (1998)
[Crossref]
S. P. Pogossian, L. Vescan, A. Vonsovici, "The single-mode condition for semiconductor rib waveguides with large cross section," J. Lightwave Technol. 16, 1851‒1853 (1998)
[Crossref]
Y. Qi, D. J. Rowe, V. Mittal, M. Banakar, Y. Wu, M. Nedeljkovic, J. S. Wilkinson, G. Z. Mashanovich, "Integration of mid-infrared SOI photonics with micro-fluidics," Proc. SPIE 10923, 1092301 (2019)
Y. Qi, D. J. Rowe, V. Mittal, M. Banakar, Y. Wu, M. Nedeljkovic, J. S. Wilkinson, G. Z. Mashanovich, "Integration of mid-infrared SOI photonics with micro-fluidics," Proc. SPIE 10923, 1092301 (2019)
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
A. Dhakal, P. Wuytens, F. Peyskens, A. Z. Subramanian, N. Le Thomas, R. Baets, "Silicon-nitride waveguides for on-chip Raman spectroscopy," Proc. SPIE 9141, 91411C (2014)
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
C. Ciminelli, F. Dell’Olio, C. E. Campanella, M. N. Armenise, "Photonic technology for angular velocity sensing," Adv. Opt. Photonics 2, 370‒404 (2010)
[Crossref]
J. Schmidtchen, A. Splett, B. Schuppert, K. Pertermann, G. Burbach, "Low loss single mode optical waveguides with large cross-selection in silicon-on-insulator," Electron. Lett. 27, 1486‒1487 (1991)
[Crossref]
R. A. Soref, J. J. Schmidtchen, K. Peterman, "Large single-mode rib waveguides in GeSi-Si and Si-on-SiO2," IEEE J. Quantum Electron. 27, 1971‒1974 (1991)
[Crossref]
A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]
S. P. Pogossian, L. Vescan, A. Vonsovici, "The single-mode condition for semiconductor rib waveguides with large cross section," J. Lightwave Technol. 16, 1851‒1853 (1998)
[Crossref]
K. E. Zinoviev, A. B. Gonzalez-Guerrero, C. Dominguez, L. M. Lechuga, "Integrated bimodal waveguide interferometric biosensor for label-free analysis," J. Lightwave Technol. 29, 1926‒1930 (2011)
[Crossref]
D. Duval, "Nanophotonic lab-on-a-chip platforms including novel bimodal interferometers microfluidics and grating couplers," Lab. Chip 12, 1987‒1994 (2012)
[Crossref]
J. C. Tinguely, O. L. Helle, B. S. Ahluwalia, "Silicon nitride waveguide platform for fluorescence microscopy of living cells," Opt. Express 25, 27678‒27690 (2017)
[Crossref]
E. F. Burmeister, J. P. Mack, H. N. Poulsen, M. L. Masanovic, B. Stamenic, D. J. Blumenthal, J. E. Bowers, "Photonic integrated circuit optical buffer for packet-switched networks," Opt. Express 17, 6629‒6635 (2009)
[Crossref]
J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, T. J. Kippenberg, "Dispersion engineering of thick high-Q silicon nitride ring-resonator via atomic layer deposition," Opt. Express 20, 27661‒27669 (2012)
[Crossref]
F. T. Dullo, S. Lindecrantz, J. Jagerska, H. Hansen, M. Engqvist, S. A. Solbo, O. G. Helleso, "Sensitive on-chip methane detection with a cryptophane-A cladded Mach-Zehnder interferometer," Opt. Express 23, 31564‒31573 (2015)
[Crossref]
K. S. Chiang, "Performance of the effective-index method for the analysis of dielectric waveguides," Opt. Lett. 16, 714‒716 (1991)
[Crossref]
A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]
D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, C. Roeloffzen, "Silicon nitride in silicon photonics," Proc. IEEE 106, 2209‒2231 (2018)
[Crossref]
D. H. Geuzebroek, G. A. J. Besselink, F. Schreuder, F. Falke, A. Leinse, R. G. Heideman, "Silicon-nitride biophotonics sensing platform," Proc. SPIE 10921, 1092117 (2019)
Y. Qi, D. J. Rowe, V. Mittal, M. Banakar, Y. Wu, M. Nedeljkovic, J. S. Wilkinson, G. Z. Mashanovich, "Integration of mid-infrared SOI photonics with micro-fluidics," Proc. SPIE 10923, 1092301 (2019)
H. Takahashi, "Planar lightwave circuit devices for optical communications: present and future," Proc. SPIE 5246, 520‒531 (2003)
A. Dhakal, P. Wuytens, F. Peyskens, A. Z. Subramanian, N. Le Thomas, R. Baets, "Silicon-nitride waveguides for on-chip Raman spectroscopy," Proc. SPIE 9141, 91411C (2014)
P. Muellner, E. Melnik, G. Koppitsch, J. Kraft, F. Schrank, R. Hainberger, "CMOS compatible Si3N4 waveguides for optical biosensing," Procedia Eng. 120, 578‒581 (2015)
[Crossref]
A. F. Gavelsa, D. G. Garcia, J. C. Ramirez, L. M. Lechuga, "Last advances in silicon-based optical biosensors," Sensors 16, 285 (2016)
[Crossref]
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