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  • Current Optics and Photonics
  • Vol. 3,
  • Issue 5,
  • pp. 382-389
  • (2019)

Modal Analysis and Design of Silicon Nitride Rib Waveguides for Evanescent-wave Bimodal Biosensors

Hongsik Jung

Open Access Open Access

Abstract

Si3N4 rib optical waveguides suitable for evanescent-wave photonic biosensors are analyzed to derive the conditions for single-mode propagation. A photonic biosensor structure at a wavelength of 0.63 µm based on two-mode interference is proposed, and the rib width, rib thickness and rib-core thickness for single-mode and two-mode waveguides (corresponding to sensing region) are proposed to be 3 µm, 2 nm, and 150 nm, and 3 µm, 2 nm, and 340 nm, respectively. The optical characteristics and propagation of each guided-wave mode are investigated utilizing the film-mode-matching and eigenmode-expansion methods.

© 2019 Optical Society of Korea

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References

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  • Year
  • Author
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2019 (2)

D. H. Geuzebroek, G. A. J. Besselink, F. Schreuder, F. Falke, A. Leinse, R. G. Heideman, "Silicon-nitride biophotonics sensing platform," Proc. SPIE 10921, 1092117 (2019)

Y. Qi, D. J. Rowe, V. Mittal, M. Banakar, Y. Wu, M. Nedeljkovic, J. S. Wilkinson, G. Z. Mashanovich, "Integration of mid-infrared SOI photonics with micro-fluidics," Proc. SPIE 10923, 1092301 (2019)

2018 (1)

D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, C. Roeloffzen, "Silicon nitride in silicon photonics," Proc. IEEE 106, 2209‒2231 (2018)
[Crossref]

2017 (1)

2016 (1)

A. F. Gavelsa, D. G. Garcia, J. C. Ramirez, L. M. Lechuga, "Last advances in silicon-based optical biosensors," Sensors 16, 285 (2016)
[Crossref]

2015 (3)

P. Muellner, E. Melnik, G. Koppitsch, J. Kraft, F. Schrank, R. Hainberger, "CMOS compatible Si3N4 waveguides for optical biosensing," Procedia Eng. 120, 578‒581 (2015)
[Crossref]

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

F. T. Dullo, S. Lindecrantz, J. Jagerska, H. Hansen, M. Engqvist, S. A. Solbo, O. G. Helleso, "Sensitive on-chip methane detection with a cryptophane-A cladded Mach-Zehnder interferometer," Opt. Express 23, 31564‒31573 (2015)
[Crossref]

2014 (1)

A. Dhakal, P. Wuytens, F. Peyskens, A. Z. Subramanian, N. Le Thomas, R. Baets, "Silicon-nitride waveguides for on-chip Raman spectroscopy," Proc. SPIE 9141, 91411C (2014)

2013 (1)

A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]

2012 (2)

2011 (1)

2010 (1)

C. Ciminelli, F. Dell’Olio, C. E. Campanella, M. N. Armenise, "Photonic technology for angular velocity sensing," Adv. Opt. Photonics 2, 370‒404 (2010)
[Crossref]

2009 (1)

2008 (1)

2003 (1)

H. Takahashi, "Planar lightwave circuit devices for optical communications: present and future," Proc. SPIE 5246, 520‒531 (2003)

1998 (1)

1991 (3)

J. Schmidtchen, A. Splett, B. Schuppert, K. Pertermann, G. Burbach, "Low loss single mode optical waveguides with large cross-selection in silicon-on-insulator," Electron. Lett. 27, 1486‒1487 (1991)
[Crossref]

R. A. Soref, J. J. Schmidtchen, K. Peterman, "Large single-mode rib waveguides in GeSi-Si and Si-on-SiO2," IEEE J. Quantum Electron. 27, 1971‒1974 (1991)
[Crossref]

K. S. Chiang, "Performance of the effective-index method for the analysis of dielectric waveguides," Opt. Lett. 16, 714‒716 (1991)
[Crossref]

Ahluwalia, B. S.

Armenise, M. N.

C. Ciminelli, F. Dell’Olio, C. E. Campanella, M. N. Armenise, "Photonic technology for angular velocity sensing," Adv. Opt. Photonics 2, 370‒404 (2010)
[Crossref]

Baets, R.

A. Dhakal, P. Wuytens, F. Peyskens, A. Z. Subramanian, N. Le Thomas, R. Baets, "Silicon-nitride waveguides for on-chip Raman spectroscopy," Proc. SPIE 9141, 91411C (2014)

A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]

Baets, Roel

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Banakar, M.

Y. Qi, D. J. Rowe, V. Mittal, M. Banakar, Y. Wu, M. Nedeljkovic, J. S. Wilkinson, G. Z. Mashanovich, "Integration of mid-infrared SOI photonics with micro-fluidics," Proc. SPIE 10923, 1092301 (2019)

Besselink, G. A. J.

D. H. Geuzebroek, G. A. J. Besselink, F. Schreuder, F. Falke, A. Leinse, R. G. Heideman, "Silicon-nitride biophotonics sensing platform," Proc. SPIE 10921, 1092117 (2019)

Bienstman, P.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Blumenthal, D. J.

Bogaerts, W.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Bois, B. D.

A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]

Bowers, J. E.

Brasch, V.

Burbach, G.

J. Schmidtchen, A. Splett, B. Schuppert, K. Pertermann, G. Burbach, "Low loss single mode optical waveguides with large cross-selection in silicon-on-insulator," Electron. Lett. 27, 1486‒1487 (1991)
[Crossref]

Burmeister, E. F.

Campanella, C. E.

C. Ciminelli, F. Dell’Olio, C. E. Campanella, M. N. Armenise, "Photonic technology for angular velocity sensing," Adv. Opt. Photonics 2, 370‒404 (2010)
[Crossref]

Campenhout, J. V.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Chiang, K. S.

Ciminelli, C.

C. Ciminelli, F. Dell’Olio, C. E. Campanella, M. N. Armenise, "Photonic technology for angular velocity sensing," Adv. Opt. Photonics 2, 370‒404 (2010)
[Crossref]

Claes, T.

A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]

Dave, U. D.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Dell’Olio, F.

C. Ciminelli, F. Dell’Olio, C. E. Campanella, M. N. Armenise, "Photonic technology for angular velocity sensing," Adv. Opt. Photonics 2, 370‒404 (2010)
[Crossref]

Deshpande, P.

A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]

Dhakal, A.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

A. Dhakal, P. Wuytens, F. Peyskens, A. Z. Subramanian, N. Le Thomas, R. Baets, "Silicon-nitride waveguides for on-chip Raman spectroscopy," Proc. SPIE 9141, 91411C (2014)

A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]

Dominguez, C.

Dorpe, P. V.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]

Dullo, F. T.

Duval, D.

D. Duval, "Nanophotonic lab-on-a-chip platforms including novel bimodal interferometers microfluidics and grating couplers," Lab. Chip 12, 1987‒1994 (2012)
[Crossref]

Engqvist, M.

Falke, F.

D. H. Geuzebroek, G. A. J. Besselink, F. Schreuder, F. Falke, A. Leinse, R. G. Heideman, "Silicon-nitride biophotonics sensing platform," Proc. SPIE 10921, 1092117 (2019)

Garcia, D. G.

A. F. Gavelsa, D. G. Garcia, J. C. Ramirez, L. M. Lechuga, "Last advances in silicon-based optical biosensors," Sensors 16, 285 (2016)
[Crossref]

Gavelsa, A. F.

A. F. Gavelsa, D. G. Garcia, J. C. Ramirez, L. M. Lechuga, "Last advances in silicon-based optical biosensors," Sensors 16, 285 (2016)
[Crossref]

Geuzebroek, D.

D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, C. Roeloffzen, "Silicon nitride in silicon photonics," Proc. IEEE 106, 2209‒2231 (2018)
[Crossref]

Geuzebroek, D. H.

D. H. Geuzebroek, G. A. J. Besselink, F. Schreuder, F. Falke, A. Leinse, R. G. Heideman, "Silicon-nitride biophotonics sensing platform," Proc. SPIE 10921, 1092117 (2019)

Gonzalez-Guerrero, A. B.

Groote, A. D.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Hainberger, R.

P. Muellner, E. Melnik, G. Koppitsch, J. Kraft, F. Schrank, R. Hainberger, "CMOS compatible Si3N4 waveguides for optical biosensing," Procedia Eng. 120, 578‒581 (2015)
[Crossref]

Hansen, H.

Hartinger, K.

Heideman, R.

D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, C. Roeloffzen, "Silicon nitride in silicon photonics," Proc. IEEE 106, 2209‒2231 (2018)
[Crossref]

Heideman, R. G.

D. H. Geuzebroek, G. A. J. Besselink, F. Schreuder, F. Falke, A. Leinse, R. G. Heideman, "Silicon-nitride biophotonics sensing platform," Proc. SPIE 10921, 1092117 (2019)

Helin, P.

A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]

Helle, O. L.

Helleso, O. G.

Hens, Z.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Herr, T.

Holzwarth, R.

Jagerska, J.

Jansen, R.

A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]

Jose, J.

Kippenberg, T. J.

Koppitsch, G.

P. Muellner, E. Melnik, G. Koppitsch, J. Kraft, F. Schrank, R. Hainberger, "CMOS compatible Si3N4 waveguides for optical biosensing," Procedia Eng. 120, 578‒581 (2015)
[Crossref]

Korterik, J. P.

Kraft, J.

P. Muellner, E. Melnik, G. Koppitsch, J. Kraft, F. Schrank, R. Hainberger, "CMOS compatible Si3N4 waveguides for optical biosensing," Procedia Eng. 120, 578‒581 (2015)
[Crossref]

Kuyken, B.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Le Thomas, N.

A. Dhakal, P. Wuytens, F. Peyskens, A. Z. Subramanian, N. Le Thomas, R. Baets, "Silicon-nitride waveguides for on-chip Raman spectroscopy," Proc. SPIE 9141, 91411C (2014)

Lechuga, L. M.

Leinse, A.

D. H. Geuzebroek, G. A. J. Besselink, F. Schreuder, F. Falke, A. Leinse, R. G. Heideman, "Silicon-nitride biophotonics sensing platform," Proc. SPIE 10921, 1092117 (2019)

D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, C. Roeloffzen, "Silicon nitride in silicon photonics," Proc. IEEE 106, 2209‒2231 (2018)
[Crossref]

Leo, F.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Leyssens, K.

A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]

Lindecrantz, S.

Mack, J. P.

Malik, A.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Martens, D.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Masanovic, M. L.

Mashanovich, G. Z.

Y. Qi, D. J. Rowe, V. Mittal, M. Banakar, Y. Wu, M. Nedeljkovic, J. S. Wilkinson, G. Z. Mashanovich, "Integration of mid-infrared SOI photonics with micro-fluidics," Proc. SPIE 10923, 1092301 (2019)

Melnik, E.

P. Muellner, E. Melnik, G. Koppitsch, J. Kraft, F. Schrank, R. Hainberger, "CMOS compatible Si3N4 waveguides for optical biosensing," Procedia Eng. 120, 578‒581 (2015)
[Crossref]

Mittal, V.

Y. Qi, D. J. Rowe, V. Mittal, M. Banakar, Y. Wu, M. Nedeljkovic, J. S. Wilkinson, G. Z. Mashanovich, "Integration of mid-infrared SOI photonics with micro-fluidics," Proc. SPIE 10923, 1092301 (2019)

Muellner, P.

P. Muellner, E. Melnik, G. Koppitsch, J. Kraft, F. Schrank, R. Hainberger, "CMOS compatible Si3N4 waveguides for optical biosensing," Procedia Eng. 120, 578‒581 (2015)
[Crossref]

Muneeb, M.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Nedeljkovic, M.

Y. Qi, D. J. Rowe, V. Mittal, M. Banakar, Y. Wu, M. Nedeljkovic, J. S. Wilkinson, G. Z. Mashanovich, "Integration of mid-infrared SOI photonics with micro-fluidics," Proc. SPIE 10923, 1092301 (2019)

Neutens, P.

A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]

Offerhaus, H. L.

Pathak, S.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Pertermann, K.

J. Schmidtchen, A. Splett, B. Schuppert, K. Pertermann, G. Burbach, "Low loss single mode optical waveguides with large cross-selection in silicon-on-insulator," Electron. Lett. 27, 1486‒1487 (1991)
[Crossref]

Peterman, K.

R. A. Soref, J. J. Schmidtchen, K. Peterman, "Large single-mode rib waveguides in GeSi-Si and Si-on-SiO2," IEEE J. Quantum Electron. 27, 1971‒1974 (1991)
[Crossref]

Peyskens, F.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

A. Dhakal, P. Wuytens, F. Peyskens, A. Z. Subramanian, N. Le Thomas, R. Baets, "Silicon-nitride waveguides for on-chip Raman spectroscopy," Proc. SPIE 9141, 91411C (2014)

A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]

Pogossian, S. P.

Poulsen, H. N.

Qi, Y.

Y. Qi, D. J. Rowe, V. Mittal, M. Banakar, Y. Wu, M. Nedeljkovic, J. S. Wilkinson, G. Z. Mashanovich, "Integration of mid-infrared SOI photonics with micro-fluidics," Proc. SPIE 10923, 1092301 (2019)

Ramirez, J. C.

A. F. Gavelsa, D. G. Garcia, J. C. Ramirez, L. M. Lechuga, "Last advances in silicon-based optical biosensors," Sensors 16, 285 (2016)
[Crossref]

Riemensberger, J.

Roelkens, G.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Roeloffzen, C.

D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, C. Roeloffzen, "Silicon nitride in silicon photonics," Proc. IEEE 106, 2209‒2231 (2018)
[Crossref]

Rottenberg, X.

A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]

Rowe, D. J.

Y. Qi, D. J. Rowe, V. Mittal, M. Banakar, Y. Wu, M. Nedeljkovic, J. S. Wilkinson, G. Z. Mashanovich, "Integration of mid-infrared SOI photonics with micro-fluidics," Proc. SPIE 10923, 1092301 (2019)

Ruocco, A.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Ryckeboer, E.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Schmidtchen, J.

J. Schmidtchen, A. Splett, B. Schuppert, K. Pertermann, G. Burbach, "Low loss single mode optical waveguides with large cross-selection in silicon-on-insulator," Electron. Lett. 27, 1486‒1487 (1991)
[Crossref]

Schmidtchen, J. J.

R. A. Soref, J. J. Schmidtchen, K. Peterman, "Large single-mode rib waveguides in GeSi-Si and Si-on-SiO2," IEEE J. Quantum Electron. 27, 1971‒1974 (1991)
[Crossref]

Schrank, F.

P. Muellner, E. Melnik, G. Koppitsch, J. Kraft, F. Schrank, R. Hainberger, "CMOS compatible Si3N4 waveguides for optical biosensing," Procedia Eng. 120, 578‒581 (2015)
[Crossref]

Schreuder, F.

D. H. Geuzebroek, G. A. J. Besselink, F. Schreuder, F. Falke, A. Leinse, R. G. Heideman, "Silicon-nitride biophotonics sensing platform," Proc. SPIE 10921, 1092117 (2019)

Schuppert, B.

J. Schmidtchen, A. Splett, B. Schuppert, K. Pertermann, G. Burbach, "Low loss single mode optical waveguides with large cross-selection in silicon-on-insulator," Electron. Lett. 27, 1486‒1487 (1991)
[Crossref]

Segerink, F. B.

Selvaraja, S. K.

A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]

Severi, S.

A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]

Solbo, S. A.

Soref, R. A.

R. A. Soref, J. J. Schmidtchen, K. Peterman, "Large single-mode rib waveguides in GeSi-Si and Si-on-SiO2," IEEE J. Quantum Electron. 27, 1971‒1974 (1991)
[Crossref]

Splett, A.

J. Schmidtchen, A. Splett, B. Schuppert, K. Pertermann, G. Burbach, "Low loss single mode optical waveguides with large cross-selection in silicon-on-insulator," Electron. Lett. 27, 1486‒1487 (1991)
[Crossref]

Stamenic, B.

Subramanian, A. Z.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

A. Dhakal, P. Wuytens, F. Peyskens, A. Z. Subramanian, N. Le Thomas, R. Baets, "Silicon-nitride waveguides for on-chip Raman spectroscopy," Proc. SPIE 9141, 91411C (2014)

A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]

Takahashi, H.

H. Takahashi, "Planar lightwave circuit devices for optical communications: present and future," Proc. SPIE 5246, 520‒531 (2003)

Thomas, N. L.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Thourhout, D. V.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Tinguely, J. C.

Vescan, L.

Vonsovici, A.

Wilkinson, J. S.

Y. Qi, D. J. Rowe, V. Mittal, M. Banakar, Y. Wu, M. Nedeljkovic, J. S. Wilkinson, G. Z. Mashanovich, "Integration of mid-infrared SOI photonics with micro-fluidics," Proc. SPIE 10923, 1092301 (2019)

Wu, Y.

Y. Qi, D. J. Rowe, V. Mittal, M. Banakar, Y. Wu, M. Nedeljkovic, J. S. Wilkinson, G. Z. Mashanovich, "Integration of mid-infrared SOI photonics with micro-fluidics," Proc. SPIE 10923, 1092301 (2019)

Wuytens, P.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

A. Dhakal, P. Wuytens, F. Peyskens, A. Z. Subramanian, N. Le Thomas, R. Baets, "Silicon-nitride waveguides for on-chip Raman spectroscopy," Proc. SPIE 9141, 91411C (2014)

Xie, W.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Zhao, H.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Zinoviev, K. E.

Adv. Opt. Photonics (1)

C. Ciminelli, F. Dell’Olio, C. E. Campanella, M. N. Armenise, "Photonic technology for angular velocity sensing," Adv. Opt. Photonics 2, 370‒404 (2010)
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Electron. Lett. (1)

J. Schmidtchen, A. Splett, B. Schuppert, K. Pertermann, G. Burbach, "Low loss single mode optical waveguides with large cross-selection in silicon-on-insulator," Electron. Lett. 27, 1486‒1487 (1991)
[Crossref]

IEEE J. Quantum Electron. (1)

R. A. Soref, J. J. Schmidtchen, K. Peterman, "Large single-mode rib waveguides in GeSi-Si and Si-on-SiO2," IEEE J. Quantum Electron. 27, 1971‒1974 (1991)
[Crossref]

IEEE Photonics J. (1)

A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. K. Selvaraja, P. Helin, B. D. Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. V. Dorpe, "Low-loss single mode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line," IEEE Photonics J. 5, 2202809 (2013)
[Crossref]

J. Lightwave Technol. (2)

Lab. Chip (1)

D. Duval, "Nanophotonic lab-on-a-chip platforms including novel bimodal interferometers microfluidics and grating couplers," Lab. Chip 12, 1987‒1994 (2012)
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Opt. Express (4)

Opt. Lett. (2)

Photonics Res. (1)

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. D. Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. V. Dorpe, J. V. Campenhout, W. Bogaerts, P. Bienstman, N. L. Thomas, D. V. Thourhout, Z. Hens, G. Roelkens, Roel Baets, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip," Photonics Res. 3, B47‒B59 (2015)
[Crossref]

Proc. IEEE (1)

D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, C. Roeloffzen, "Silicon nitride in silicon photonics," Proc. IEEE 106, 2209‒2231 (2018)
[Crossref]

Proc. SPIE (4)

D. H. Geuzebroek, G. A. J. Besselink, F. Schreuder, F. Falke, A. Leinse, R. G. Heideman, "Silicon-nitride biophotonics sensing platform," Proc. SPIE 10921, 1092117 (2019)

Y. Qi, D. J. Rowe, V. Mittal, M. Banakar, Y. Wu, M. Nedeljkovic, J. S. Wilkinson, G. Z. Mashanovich, "Integration of mid-infrared SOI photonics with micro-fluidics," Proc. SPIE 10923, 1092301 (2019)

H. Takahashi, "Planar lightwave circuit devices for optical communications: present and future," Proc. SPIE 5246, 520‒531 (2003)

A. Dhakal, P. Wuytens, F. Peyskens, A. Z. Subramanian, N. Le Thomas, R. Baets, "Silicon-nitride waveguides for on-chip Raman spectroscopy," Proc. SPIE 9141, 91411C (2014)

Procedia Eng. (1)

P. Muellner, E. Melnik, G. Koppitsch, J. Kraft, F. Schrank, R. Hainberger, "CMOS compatible Si3N4 waveguides for optical biosensing," Procedia Eng. 120, 578‒581 (2015)
[Crossref]

Sensors (1)

A. F. Gavelsa, D. G. Garcia, J. C. Ramirez, L. M. Lechuga, "Last advances in silicon-based optical biosensors," Sensors 16, 285 (2016)
[Crossref]

Other (1)

FIMMWAVE. v6.6.0 .

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