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  • Current Optics and Photonics
  • Vol. 5,
  • Issue 1,
  • pp. 52-58
  • (2021)

Measurement of Film Thickness by Double-slit Experiment

Soobong Park, Byoung Joo Kim, Deok Woo Kim, and Myoungsik Cha

Open Access Open Access

Abstract

We show that a simple double-slit experimental setup can be used to measure the thickness of a transparent thin film. The phase difference between the light passing through one slit covered with photoresist film and that passing through the other slit without film was estimated using the simple Fraunhofer diffraction formula for a double slit. Our method gave error of a few percent or less for film thicknesses ranging from 0.7 to 1.7 μm, demonstrating that a laboratory double-slit experimental setup can be utilized in practical film-thickness measurements.

© 2021 Optical Society of Korea

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References

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  • Year
  • Author
  • Publication
  1. T. Young, "The bakerian lecture: experiments and calculations relative to physical optics," Phil. Trans. R. Soc. London 94, 1‒16 (1804)
    [Crossref]
  2. J.-A. Kim, J. W. Kim, T. B. Eom, J. Jin, C.-S. Kang, "Vibration-insensitive measurement of thickness variation of glass panels using double-slit interferometry," Opt. Express 22, 6486‒6494 (2014)
    [Crossref] [PubMed]
  3. J. Emile, O. Emile, "Mapping of the Marangoni effect in soap films using Young's double-slit experiment," Europhys. Lett. 104, (2013)
    [Crossref]
  4. A. Lipson, S. G. Lipson, H. Lipson, Optical Physics .
  5. F. L. Pedrotti, L. M. Pedrotti, L. S. Pedrotti, Introduction to Optics .
  6. R. Ulrich, R. Torge, "Measurement of thin film parameters with a prism coupler," Appl. Opt. 12, 2901‒2908 (1973)
    [Crossref] [PubMed]
  7. measurement Guide to the expression of uncertainty in, ISO, Guide to the expression of uncertainty in measurement, ISO/IEC GUIDE 98-3:2008/SUPPL 1:2008, International .
  8. J. W. Goodman, Introduction to Fourier Optics .

2014 (1)

2013 (1)

J. Emile, O. Emile, "Mapping of the Marangoni effect in soap films using Young's double-slit experiment," Europhys. Lett. 104, (2013)
[Crossref]

1973 (1)

1804 (1)

T. Young, "The bakerian lecture: experiments and calculations relative to physical optics," Phil. Trans. R. Soc. London 94, 1‒16 (1804)
[Crossref]

Emile, J.

J. Emile, O. Emile, "Mapping of the Marangoni effect in soap films using Young's double-slit experiment," Europhys. Lett. 104, (2013)
[Crossref]

Emile, O.

J. Emile, O. Emile, "Mapping of the Marangoni effect in soap films using Young's double-slit experiment," Europhys. Lett. 104, (2013)
[Crossref]

Eom, T. B.

Goodman, J. W.

J. W. Goodman, Introduction to Fourier Optics .

Guide to the expression of uncertainty in, measurement

measurement Guide to the expression of uncertainty in, ISO, Guide to the expression of uncertainty in measurement, ISO/IEC GUIDE 98-3:2008/SUPPL 1:2008, International .

ISO,

measurement Guide to the expression of uncertainty in, ISO, Guide to the expression of uncertainty in measurement, ISO/IEC GUIDE 98-3:2008/SUPPL 1:2008, International .

Jin, J.

Kang, C.-S.

Kim, J. W.

Kim, J.-A.

Lipson, A.

A. Lipson, S. G. Lipson, H. Lipson, Optical Physics .

Lipson, H.

A. Lipson, S. G. Lipson, H. Lipson, Optical Physics .

Lipson, S. G.

A. Lipson, S. G. Lipson, H. Lipson, Optical Physics .

Pedrotti, F. L.

F. L. Pedrotti, L. M. Pedrotti, L. S. Pedrotti, Introduction to Optics .

Pedrotti, L. M.

F. L. Pedrotti, L. M. Pedrotti, L. S. Pedrotti, Introduction to Optics .

Pedrotti, L. S.

F. L. Pedrotti, L. M. Pedrotti, L. S. Pedrotti, Introduction to Optics .

Torge, R.

Ulrich, R.

Young, T.

T. Young, "The bakerian lecture: experiments and calculations relative to physical optics," Phil. Trans. R. Soc. London 94, 1‒16 (1804)
[Crossref]

Appl. Opt. (1)

Europhys. Lett. (1)

J. Emile, O. Emile, "Mapping of the Marangoni effect in soap films using Young's double-slit experiment," Europhys. Lett. 104, (2013)
[Crossref]

Opt. Express (1)

Phil. Trans. R. Soc. London (1)

T. Young, "The bakerian lecture: experiments and calculations relative to physical optics," Phil. Trans. R. Soc. London 94, 1‒16 (1804)
[Crossref]

Other (4)

A. Lipson, S. G. Lipson, H. Lipson, Optical Physics .

F. L. Pedrotti, L. M. Pedrotti, L. S. Pedrotti, Introduction to Optics .

measurement Guide to the expression of uncertainty in, ISO, Guide to the expression of uncertainty in measurement, ISO/IEC GUIDE 98-3:2008/SUPPL 1:2008, International .

J. W. Goodman, Introduction to Fourier Optics .

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