Abstract

Transmission spectra are measured from waveguide-coupled ring resonators fabricated with SiNx on SiO2. By using ring resonators with various radii and several index contrasts, the behavior of the quality factors is investigated. As the index contrast decreases, the dominant loss is from scattering for a large resonator, while that changes from scattering loss to bending loss for a small resonator. We verify that the quality factor can be drastically improved by reducing the index contrast in large ring resonators.

© 2021 Optical Society of Korea

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