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Optica Publishing Group
  • Current Optics and Photonics
  • Vol. 4,
  • Issue 1,
  • pp. 9-15
  • (2020)

Simulation of an X-ray Fresnel Zone Plate with Nonideal Factors

Open Access Open Access

Abstract

Fresnel zone plates have been widely used in many applications, such as x-ray telescopes, microfluorescence, and microimaging. To obtain an x-ray Fresnel zone plate, many fabrication methods, such as electron-beam etching, ion-beam etching and chemical etching, have been developed. Fresnel zone plates fabricated by these methods will inevitably lead to some nonideal factors, which have an impact on the focusing characteristics of the zone plate. In this paper, the influences of these nonideal factors on the focusing characteristics of the zone plate are studied systematically, by numerical simulations based on scalar diffraction theory. The influence of the thickness of a Fresnel zone plate on the absolute focusing efficiency is calculated for a given incident x-ray’s wavelength. The diffraction efficiency and size of the focal spot are calculated for different incline angles of the groove. The simulations of zone plates without struts, with regular struts, and with random struts are carried out, to study the effects of struts on the focusing characteristics of a zone plate. When a Fresnel zone plate is used to focus an ultrashort x-ray pulse, the effect of zone-plate structure on the final pulse duration is also discussed.

© 2020 Optical Society of Korea

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References

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    [Crossref]
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    [Crossref]
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    [Crossref]
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2017 (2)

V. V. Lider, "Zone plates for X-ray focusing," J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 11, 1113‒1127 (2017)
[Crossref]

P. Tiwari, P. Mondal, A. K. Srivastava, H. Srivastava, R. Dhawan, S. Rai, "Fabrication of tungsten Fresnel zone plates for hard x-rays using wet etching," J. Vac. Sci. Technol. B 35, 051602 (2017)
[Crossref]

2016 (1)

Q. Fan, S. Wang, Z. Yang, L. Wei, F. Hu, H. Zang, Q. Zhang, C. Wang, G. Jiang, L. Cao, "The realization of long focal depth with a linear varied-area zone plate," J. Mod. Opt. 64, 244‒250 (2016)

2015 (1)

2013 (1)

2012 (1)

H. P. Zang, C. K. Wang, Y. L. Gao, W. M. Zhou, L. Y. Kuang, L. Wei, W. Fan, W. H. Zhang, Z. Q. Zhao, L. F. Cao, Y. Q. Gu, B. H. Zhang, G. Jiang, X. L. Zhu, C. Q. Xie, Y. D. Zhao, M. Q. Cui, "Elimination of higher-order diffraction using zigzag transmission grating in soft x-ray region," Appl. Phys. Lett. 100, 111904 (2012)
[Crossref]

2011 (1)

J. Reinspach, M. Lindblom, M. Bertilson, O. V. Hofsten, H. M. Hertz, A. Holmberg, "13 nm high-efficiency nickel-germanium soft x-ray zone plates," J. Vac. Sci. Technol. B 29, 011012 (2011)

2009 (2)

J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maasdorf, M. Ritala, C. David, "Advanced thin film technology for ultrahigh resolution X-ray microscopy," Ultramicroscopy 109, 1360‒1364 (2009)
[Crossref]

I. A. Artyukov, I. N. Bukreeva, V. A. Chernov, R. M. Feshchenko, K. M. Golant, W. Jark, S. V. Lavrishchev, A. N. Mitrofanov, A. V. Popov, A. V. Vinogradov, "Zone plates for hard X-rays fabricated with the SPCVD technology," Nucl. Instrum. Methods Phys. Res. Sect. A 603, 66‒68 (2009)
[Crossref]

2007 (1)

K. Jefimovs, O. Bunk, F. Pfeiffer, D. Grolimund, J. F. V. D. Veen, C. David, "Fabrication of Fresnel zone plates for hard X-rays," Microelectron. Eng. 84, 1467‒1470 (2007)
[Crossref]

2006 (2)

C. G. Schroer, "Focusing hard x-rays to nanometer dimensions using Fresnel zone plates," Phys. Rev. B 74, 033405 (2006)

S. Tamura, M. Yasumoto, N. Kamijo, Y. Suzuki, M. Awaji, A. Takeuchi, K. Uesugi, Y. Terada, H. Takano, "New approaches to fabrication of multilayer Fresnel zone plate for high-energy synchrotron radiation X-rays," Vacuum 80, 823‒827 (2006)
[Crossref]

2003 (1)

2002 (1)

C. David, B. Nohammer, E. Ziegler, "Wet etching of linear Fresnel zone plates for hard X-rays," Microelectron. Eng. 61-62, 987‒992 (2002)
[Crossref]

2001 (1)

P. P. Ilinski, B. P. Lai, N. J. Bassom, J. Donald, G. J. Athas, "X-ray zone plate fabrication using a focused ion beam," Proc. SPIE 4145, 311‒316 (2001)

Anderson, E.

Artyukov, I. A.

I. A. Artyukov, I. N. Bukreeva, V. A. Chernov, R. M. Feshchenko, K. M. Golant, W. Jark, S. V. Lavrishchev, A. N. Mitrofanov, A. V. Popov, A. V. Vinogradov, "Zone plates for hard X-rays fabricated with the SPCVD technology," Nucl. Instrum. Methods Phys. Res. Sect. A 603, 66‒68 (2009)
[Crossref]

Athas, G. J.

P. P. Ilinski, B. P. Lai, N. J. Bassom, J. Donald, G. J. Athas, "X-ray zone plate fabrication using a focused ion beam," Proc. SPIE 4145, 311‒316 (2001)

Attwood, D.

D. Attwood, Soft X-ray and Extreme Ultraviolet Radiation: Principles and Applications .

Attwood, D. T.

Awaji, M.

S. Tamura, M. Yasumoto, N. Kamijo, Y. Suzuki, M. Awaji, A. Takeuchi, K. Uesugi, Y. Terada, H. Takano, "New approaches to fabrication of multilayer Fresnel zone plate for high-energy synchrotron radiation X-rays," Vacuum 80, 823‒827 (2006)
[Crossref]

Bassom, N. J.

P. P. Ilinski, B. P. Lai, N. J. Bassom, J. Donald, G. J. Athas, "X-ray zone plate fabrication using a focused ion beam," Proc. SPIE 4145, 311‒316 (2001)

Bechtel, M.

Bertilson, M.

J. Reinspach, M. Lindblom, M. Bertilson, O. V. Hofsten, H. M. Hertz, A. Holmberg, "13 nm high-efficiency nickel-germanium soft x-ray zone plates," J. Vac. Sci. Technol. B 29, 011012 (2011)

Bukreeva, I. N.

I. A. Artyukov, I. N. Bukreeva, V. A. Chernov, R. M. Feshchenko, K. M. Golant, W. Jark, S. V. Lavrishchev, A. N. Mitrofanov, A. V. Popov, A. V. Vinogradov, "Zone plates for hard X-rays fabricated with the SPCVD technology," Nucl. Instrum. Methods Phys. Res. Sect. A 603, 66‒68 (2009)
[Crossref]

Bunk, O.

K. Jefimovs, O. Bunk, F. Pfeiffer, D. Grolimund, J. F. V. D. Veen, C. David, "Fabrication of Fresnel zone plates for hard X-rays," Microelectron. Eng. 84, 1467‒1470 (2007)
[Crossref]

Cao, L.

Q. Fan, S. Wang, Z. Yang, L. Wei, F. Hu, H. Zang, Q. Zhang, C. Wang, G. Jiang, L. Cao, "The realization of long focal depth with a linear varied-area zone plate," J. Mod. Opt. 64, 244‒250 (2016)

Q. Fan, Y. Liu, Z. Yang, L. Wei, Q. Zhang, Y. Chen, F. Hu, C. Wang, Y. Gu, W. Zhou, G. Jiang, L. Cao, "Focusing single-order diffraction transmission grating with a focusing plane perpendicular to the grating surface," Opt. Express 23, 16281‒16288 (2015)
[Crossref]

Cao, L. F.

H. P. Zang, C. K. Wang, Y. L. Gao, W. M. Zhou, L. Y. Kuang, L. Wei, W. Fan, W. H. Zhang, Z. Q. Zhao, L. F. Cao, Y. Q. Gu, B. H. Zhang, G. Jiang, X. L. Zhu, C. Q. Xie, Y. D. Zhao, M. Q. Cui, "Elimination of higher-order diffraction using zigzag transmission grating in soft x-ray region," Appl. Phys. Lett. 100, 111904 (2012)
[Crossref]

Chao, W.

Chen, Y.

Chernov, V. A.

I. A. Artyukov, I. N. Bukreeva, V. A. Chernov, R. M. Feshchenko, K. M. Golant, W. Jark, S. V. Lavrishchev, A. N. Mitrofanov, A. V. Popov, A. V. Vinogradov, "Zone plates for hard X-rays fabricated with the SPCVD technology," Nucl. Instrum. Methods Phys. Res. Sect. A 603, 66‒68 (2009)
[Crossref]

Cui, M. Q.

H. P. Zang, C. K. Wang, Y. L. Gao, W. M. Zhou, L. Y. Kuang, L. Wei, W. Fan, W. H. Zhang, Z. Q. Zhao, L. F. Cao, Y. Q. Gu, B. H. Zhang, G. Jiang, X. L. Zhu, C. Q. Xie, Y. D. Zhao, M. Q. Cui, "Elimination of higher-order diffraction using zigzag transmission grating in soft x-ray region," Appl. Phys. Lett. 100, 111904 (2012)
[Crossref]

David, C.

J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maasdorf, M. Ritala, C. David, "Advanced thin film technology for ultrahigh resolution X-ray microscopy," Ultramicroscopy 109, 1360‒1364 (2009)
[Crossref]

K. Jefimovs, O. Bunk, F. Pfeiffer, D. Grolimund, J. F. V. D. Veen, C. David, "Fabrication of Fresnel zone plates for hard X-rays," Microelectron. Eng. 84, 1467‒1470 (2007)
[Crossref]

C. David, B. Nohammer, E. Ziegler, "Wet etching of linear Fresnel zone plates for hard X-rays," Microelectron. Eng. 61-62, 987‒992 (2002)
[Crossref]

Denbeaux, G. P.

Dhawan, R.

P. Tiwari, P. Mondal, A. K. Srivastava, H. Srivastava, R. Dhawan, S. Rai, "Fabrication of tungsten Fresnel zone plates for hard x-rays using wet etching," J. Vac. Sci. Technol. B 35, 051602 (2017)
[Crossref]

Donald, J.

P. P. Ilinski, B. P. Lai, N. J. Bassom, J. Donald, G. J. Athas, "X-ray zone plate fabrication using a focused ion beam," Proc. SPIE 4145, 311‒316 (2001)

Fan, Q.

Q. Fan, S. Wang, Z. Yang, L. Wei, F. Hu, H. Zang, Q. Zhang, C. Wang, G. Jiang, L. Cao, "The realization of long focal depth with a linear varied-area zone plate," J. Mod. Opt. 64, 244‒250 (2016)

Q. Fan, Y. Liu, Z. Yang, L. Wei, Q. Zhang, Y. Chen, F. Hu, C. Wang, Y. Gu, W. Zhou, G. Jiang, L. Cao, "Focusing single-order diffraction transmission grating with a focusing plane perpendicular to the grating surface," Opt. Express 23, 16281‒16288 (2015)
[Crossref]

Fan, W.

H. P. Zang, C. K. Wang, Y. L. Gao, W. M. Zhou, L. Y. Kuang, L. Wei, W. Fan, W. H. Zhang, Z. Q. Zhao, L. F. Cao, Y. Q. Gu, B. H. Zhang, G. Jiang, X. L. Zhu, C. Q. Xie, Y. D. Zhao, M. Q. Cui, "Elimination of higher-order diffraction using zigzag transmission grating in soft x-ray region," Appl. Phys. Lett. 100, 111904 (2012)
[Crossref]

Feshchenko, R. M.

I. A. Artyukov, I. N. Bukreeva, V. A. Chernov, R. M. Feshchenko, K. M. Golant, W. Jark, S. V. Lavrishchev, A. N. Mitrofanov, A. V. Popov, A. V. Vinogradov, "Zone plates for hard X-rays fabricated with the SPCVD technology," Nucl. Instrum. Methods Phys. Res. Sect. A 603, 66‒68 (2009)
[Crossref]

Fink, R. H.

J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maasdorf, M. Ritala, C. David, "Advanced thin film technology for ultrahigh resolution X-ray microscopy," Ultramicroscopy 109, 1360‒1364 (2009)
[Crossref]

Follath, R.

Gao, Y. L.

H. P. Zang, C. K. Wang, Y. L. Gao, W. M. Zhou, L. Y. Kuang, L. Wei, W. Fan, W. H. Zhang, Z. Q. Zhao, L. F. Cao, Y. Q. Gu, B. H. Zhang, G. Jiang, X. L. Zhu, C. Q. Xie, Y. D. Zhao, M. Q. Cui, "Elimination of higher-order diffraction using zigzag transmission grating in soft x-ray region," Appl. Phys. Lett. 100, 111904 (2012)
[Crossref]

Goering, E.

Golant, K. M.

I. A. Artyukov, I. N. Bukreeva, V. A. Chernov, R. M. Feshchenko, K. M. Golant, W. Jark, S. V. Lavrishchev, A. N. Mitrofanov, A. V. Popov, A. V. Vinogradov, "Zone plates for hard X-rays fabricated with the SPCVD technology," Nucl. Instrum. Methods Phys. Res. Sect. A 603, 66‒68 (2009)
[Crossref]

Grévent, C.

Grolimund, D.

K. Jefimovs, O. Bunk, F. Pfeiffer, D. Grolimund, J. F. V. D. Veen, C. David, "Fabrication of Fresnel zone plates for hard X-rays," Microelectron. Eng. 84, 1467‒1470 (2007)
[Crossref]

Gu, Y.

Gu, Y. Q.

H. P. Zang, C. K. Wang, Y. L. Gao, W. M. Zhou, L. Y. Kuang, L. Wei, W. Fan, W. H. Zhang, Z. Q. Zhao, L. F. Cao, Y. Q. Gu, B. H. Zhang, G. Jiang, X. L. Zhu, C. Q. Xie, Y. D. Zhao, M. Q. Cui, "Elimination of higher-order diffraction using zigzag transmission grating in soft x-ray region," Appl. Phys. Lett. 100, 111904 (2012)
[Crossref]

Harteneck, B.

Hertz, H. M.

J. Reinspach, M. Lindblom, M. Bertilson, O. V. Hofsten, H. M. Hertz, A. Holmberg, "13 nm high-efficiency nickel-germanium soft x-ray zone plates," J. Vac. Sci. Technol. B 29, 011012 (2011)

Hofsten, O. V.

J. Reinspach, M. Lindblom, M. Bertilson, O. V. Hofsten, H. M. Hertz, A. Holmberg, "13 nm high-efficiency nickel-germanium soft x-ray zone plates," J. Vac. Sci. Technol. B 29, 011012 (2011)

Holmberg, A.

J. Reinspach, M. Lindblom, M. Bertilson, O. V. Hofsten, H. M. Hertz, A. Holmberg, "13 nm high-efficiency nickel-germanium soft x-ray zone plates," J. Vac. Sci. Technol. B 29, 011012 (2011)

Hu, F.

Q. Fan, S. Wang, Z. Yang, L. Wei, F. Hu, H. Zang, Q. Zhang, C. Wang, G. Jiang, L. Cao, "The realization of long focal depth with a linear varied-area zone plate," J. Mod. Opt. 64, 244‒250 (2016)

Q. Fan, Y. Liu, Z. Yang, L. Wei, Q. Zhang, Y. Chen, F. Hu, C. Wang, Y. Gu, W. Zhou, G. Jiang, L. Cao, "Focusing single-order diffraction transmission grating with a focusing plane perpendicular to the grating surface," Opt. Express 23, 16281‒16288 (2015)
[Crossref]

Ilinski, P. P.

P. P. Ilinski, B. P. Lai, N. J. Bassom, J. Donald, G. J. Athas, "X-ray zone plate fabrication using a focused ion beam," Proc. SPIE 4145, 311‒316 (2001)

Jark, W.

I. A. Artyukov, I. N. Bukreeva, V. A. Chernov, R. M. Feshchenko, K. M. Golant, W. Jark, S. V. Lavrishchev, A. N. Mitrofanov, A. V. Popov, A. V. Vinogradov, "Zone plates for hard X-rays fabricated with the SPCVD technology," Nucl. Instrum. Methods Phys. Res. Sect. A 603, 66‒68 (2009)
[Crossref]

Jefimovs, K.

J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maasdorf, M. Ritala, C. David, "Advanced thin film technology for ultrahigh resolution X-ray microscopy," Ultramicroscopy 109, 1360‒1364 (2009)
[Crossref]

K. Jefimovs, O. Bunk, F. Pfeiffer, D. Grolimund, J. F. V. D. Veen, C. David, "Fabrication of Fresnel zone plates for hard X-rays," Microelectron. Eng. 84, 1467‒1470 (2007)
[Crossref]

Jiang, G.

Q. Fan, S. Wang, Z. Yang, L. Wei, F. Hu, H. Zang, Q. Zhang, C. Wang, G. Jiang, L. Cao, "The realization of long focal depth with a linear varied-area zone plate," J. Mod. Opt. 64, 244‒250 (2016)

Q. Fan, Y. Liu, Z. Yang, L. Wei, Q. Zhang, Y. Chen, F. Hu, C. Wang, Y. Gu, W. Zhou, G. Jiang, L. Cao, "Focusing single-order diffraction transmission grating with a focusing plane perpendicular to the grating surface," Opt. Express 23, 16281‒16288 (2015)
[Crossref]

H. P. Zang, C. K. Wang, Y. L. Gao, W. M. Zhou, L. Y. Kuang, L. Wei, W. Fan, W. H. Zhang, Z. Q. Zhao, L. F. Cao, Y. Q. Gu, B. H. Zhang, G. Jiang, X. L. Zhu, C. Q. Xie, Y. D. Zhao, M. Q. Cui, "Elimination of higher-order diffraction using zigzag transmission grating in soft x-ray region," Appl. Phys. Lett. 100, 111904 (2012)
[Crossref]

Kamijo, N.

S. Tamura, M. Yasumoto, N. Kamijo, Y. Suzuki, M. Awaji, A. Takeuchi, K. Uesugi, Y. Terada, H. Takano, "New approaches to fabrication of multilayer Fresnel zone plate for high-energy synchrotron radiation X-rays," Vacuum 80, 823‒827 (2006)
[Crossref]

Keskinbora, K.

Kuang, L. Y.

H. P. Zang, C. K. Wang, Y. L. Gao, W. M. Zhou, L. Y. Kuang, L. Wei, W. Fan, W. H. Zhang, Z. Q. Zhao, L. F. Cao, Y. Q. Gu, B. H. Zhang, G. Jiang, X. L. Zhu, C. Q. Xie, Y. D. Zhao, M. Q. Cui, "Elimination of higher-order diffraction using zigzag transmission grating in soft x-ray region," Appl. Phys. Lett. 100, 111904 (2012)
[Crossref]

Lai, B. P.

P. P. Ilinski, B. P. Lai, N. J. Bassom, J. Donald, G. J. Athas, "X-ray zone plate fabrication using a focused ion beam," Proc. SPIE 4145, 311‒316 (2001)

Lavrishchev, S. V.

I. A. Artyukov, I. N. Bukreeva, V. A. Chernov, R. M. Feshchenko, K. M. Golant, W. Jark, S. V. Lavrishchev, A. N. Mitrofanov, A. V. Popov, A. V. Vinogradov, "Zone plates for hard X-rays fabricated with the SPCVD technology," Nucl. Instrum. Methods Phys. Res. Sect. A 603, 66‒68 (2009)
[Crossref]

Liddle, J. A.

Lider, V. V.

V. V. Lider, "Zone plates for X-ray focusing," J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 11, 1113‒1127 (2017)
[Crossref]

Lindblom, M.

J. Reinspach, M. Lindblom, M. Bertilson, O. V. Hofsten, H. M. Hertz, A. Holmberg, "13 nm high-efficiency nickel-germanium soft x-ray zone plates," J. Vac. Sci. Technol. B 29, 011012 (2011)

Liu, Y.

Maasdorf, A.

J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maasdorf, M. Ritala, C. David, "Advanced thin film technology for ultrahigh resolution X-ray microscopy," Ultramicroscopy 109, 1360‒1364 (2009)
[Crossref]

Mitrofanov, A. N.

I. A. Artyukov, I. N. Bukreeva, V. A. Chernov, R. M. Feshchenko, K. M. Golant, W. Jark, S. V. Lavrishchev, A. N. Mitrofanov, A. V. Popov, A. V. Vinogradov, "Zone plates for hard X-rays fabricated with the SPCVD technology," Nucl. Instrum. Methods Phys. Res. Sect. A 603, 66‒68 (2009)
[Crossref]

Mondal, P.

P. Tiwari, P. Mondal, A. K. Srivastava, H. Srivastava, R. Dhawan, S. Rai, "Fabrication of tungsten Fresnel zone plates for hard x-rays using wet etching," J. Vac. Sci. Technol. B 35, 051602 (2017)
[Crossref]

Nadzeyka, A.

Nohammer, B.

C. David, B. Nohammer, E. Ziegler, "Wet etching of linear Fresnel zone plates for hard X-rays," Microelectron. Eng. 61-62, 987‒992 (2002)
[Crossref]

Olynick, D. L.

Pearson, A. L.

Peto, L.

Pfeiffer, F.

K. Jefimovs, O. Bunk, F. Pfeiffer, D. Grolimund, J. F. V. D. Veen, C. David, "Fabrication of Fresnel zone plates for hard X-rays," Microelectron. Eng. 84, 1467‒1470 (2007)
[Crossref]

Pilvi, T.

J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maasdorf, M. Ritala, C. David, "Advanced thin film technology for ultrahigh resolution X-ray microscopy," Ultramicroscopy 109, 1360‒1364 (2009)
[Crossref]

Popov, A. V.

I. A. Artyukov, I. N. Bukreeva, V. A. Chernov, R. M. Feshchenko, K. M. Golant, W. Jark, S. V. Lavrishchev, A. N. Mitrofanov, A. V. Popov, A. V. Vinogradov, "Zone plates for hard X-rays fabricated with the SPCVD technology," Nucl. Instrum. Methods Phys. Res. Sect. A 603, 66‒68 (2009)
[Crossref]

Raabe, J.

J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maasdorf, M. Ritala, C. David, "Advanced thin film technology for ultrahigh resolution X-ray microscopy," Ultramicroscopy 109, 1360‒1364 (2009)
[Crossref]

Rai, S.

P. Tiwari, P. Mondal, A. K. Srivastava, H. Srivastava, R. Dhawan, S. Rai, "Fabrication of tungsten Fresnel zone plates for hard x-rays using wet etching," J. Vac. Sci. Technol. B 35, 051602 (2017)
[Crossref]

Rehbein, S.

Reinspach, J.

J. Reinspach, M. Lindblom, M. Bertilson, O. V. Hofsten, H. M. Hertz, A. Holmberg, "13 nm high-efficiency nickel-germanium soft x-ray zone plates," J. Vac. Sci. Technol. B 29, 011012 (2011)

Ritala, M.

J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maasdorf, M. Ritala, C. David, "Advanced thin film technology for ultrahigh resolution X-ray microscopy," Ultramicroscopy 109, 1360‒1364 (2009)
[Crossref]

Salmassi, F.

Schneider, G.

Schroer, C. G.

C. G. Schroer, "Focusing hard x-rays to nanometer dimensions using Fresnel zone plates," Phys. Rev. B 74, 033405 (2006)

Schütz, G.

Senoner, M.

J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maasdorf, M. Ritala, C. David, "Advanced thin film technology for ultrahigh resolution X-ray microscopy," Ultramicroscopy 109, 1360‒1364 (2009)
[Crossref]

Song, C. Y.

Srivastava, A. K.

P. Tiwari, P. Mondal, A. K. Srivastava, H. Srivastava, R. Dhawan, S. Rai, "Fabrication of tungsten Fresnel zone plates for hard x-rays using wet etching," J. Vac. Sci. Technol. B 35, 051602 (2017)
[Crossref]

Srivastava, H.

P. Tiwari, P. Mondal, A. K. Srivastava, H. Srivastava, R. Dhawan, S. Rai, "Fabrication of tungsten Fresnel zone plates for hard x-rays using wet etching," J. Vac. Sci. Technol. B 35, 051602 (2017)
[Crossref]

Suzuki, Y.

S. Tamura, M. Yasumoto, N. Kamijo, Y. Suzuki, M. Awaji, A. Takeuchi, K. Uesugi, Y. Terada, H. Takano, "New approaches to fabrication of multilayer Fresnel zone plate for high-energy synchrotron radiation X-rays," Vacuum 80, 823‒827 (2006)
[Crossref]

Takano, H.

S. Tamura, M. Yasumoto, N. Kamijo, Y. Suzuki, M. Awaji, A. Takeuchi, K. Uesugi, Y. Terada, H. Takano, "New approaches to fabrication of multilayer Fresnel zone plate for high-energy synchrotron radiation X-rays," Vacuum 80, 823‒827 (2006)
[Crossref]

Takeuchi, A.

S. Tamura, M. Yasumoto, N. Kamijo, Y. Suzuki, M. Awaji, A. Takeuchi, K. Uesugi, Y. Terada, H. Takano, "New approaches to fabrication of multilayer Fresnel zone plate for high-energy synchrotron radiation X-rays," Vacuum 80, 823‒827 (2006)
[Crossref]

Tamura, S.

S. Tamura, M. Yasumoto, N. Kamijo, Y. Suzuki, M. Awaji, A. Takeuchi, K. Uesugi, Y. Terada, H. Takano, "New approaches to fabrication of multilayer Fresnel zone plate for high-energy synchrotron radiation X-rays," Vacuum 80, 823‒827 (2006)
[Crossref]

Terada, Y.

S. Tamura, M. Yasumoto, N. Kamijo, Y. Suzuki, M. Awaji, A. Takeuchi, K. Uesugi, Y. Terada, H. Takano, "New approaches to fabrication of multilayer Fresnel zone plate for high-energy synchrotron radiation X-rays," Vacuum 80, 823‒827 (2006)
[Crossref]

Tiwari, P.

P. Tiwari, P. Mondal, A. K. Srivastava, H. Srivastava, R. Dhawan, S. Rai, "Fabrication of tungsten Fresnel zone plates for hard x-rays using wet etching," J. Vac. Sci. Technol. B 35, 051602 (2017)
[Crossref]

Uesugi, K.

S. Tamura, M. Yasumoto, N. Kamijo, Y. Suzuki, M. Awaji, A. Takeuchi, K. Uesugi, Y. Terada, H. Takano, "New approaches to fabrication of multilayer Fresnel zone plate for high-energy synchrotron radiation X-rays," Vacuum 80, 823‒827 (2006)
[Crossref]

Veen, J. F. V. D.

K. Jefimovs, O. Bunk, F. Pfeiffer, D. Grolimund, J. F. V. D. Veen, C. David, "Fabrication of Fresnel zone plates for hard X-rays," Microelectron. Eng. 84, 1467‒1470 (2007)
[Crossref]

Vila-Comamala, J.

K. Keskinbora, C. Grévent, M. Bechtel, M. Weigand, E. Goering, A. Nadzeyka, L. Peto, S. Rehbein, G. Schneider, R. Follath, J. Vila-Comamala, H. Yan, G. Schütz, "Ion beam lithography for Fresnel zone plates in X-ray microscopy," Opt. Express 21, 11747‒11756 (2013)
[Crossref]

J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maasdorf, M. Ritala, C. David, "Advanced thin film technology for ultrahigh resolution X-ray microscopy," Ultramicroscopy 109, 1360‒1364 (2009)
[Crossref]

Vinogradov, A. V.

I. A. Artyukov, I. N. Bukreeva, V. A. Chernov, R. M. Feshchenko, K. M. Golant, W. Jark, S. V. Lavrishchev, A. N. Mitrofanov, A. V. Popov, A. V. Vinogradov, "Zone plates for hard X-rays fabricated with the SPCVD technology," Nucl. Instrum. Methods Phys. Res. Sect. A 603, 66‒68 (2009)
[Crossref]

Wang, C.

Q. Fan, S. Wang, Z. Yang, L. Wei, F. Hu, H. Zang, Q. Zhang, C. Wang, G. Jiang, L. Cao, "The realization of long focal depth with a linear varied-area zone plate," J. Mod. Opt. 64, 244‒250 (2016)

Q. Fan, Y. Liu, Z. Yang, L. Wei, Q. Zhang, Y. Chen, F. Hu, C. Wang, Y. Gu, W. Zhou, G. Jiang, L. Cao, "Focusing single-order diffraction transmission grating with a focusing plane perpendicular to the grating surface," Opt. Express 23, 16281‒16288 (2015)
[Crossref]

Wang, C. K.

H. P. Zang, C. K. Wang, Y. L. Gao, W. M. Zhou, L. Y. Kuang, L. Wei, W. Fan, W. H. Zhang, Z. Q. Zhao, L. F. Cao, Y. Q. Gu, B. H. Zhang, G. Jiang, X. L. Zhu, C. Q. Xie, Y. D. Zhao, M. Q. Cui, "Elimination of higher-order diffraction using zigzag transmission grating in soft x-ray region," Appl. Phys. Lett. 100, 111904 (2012)
[Crossref]

Wang, S.

Q. Fan, S. Wang, Z. Yang, L. Wei, F. Hu, H. Zang, Q. Zhang, C. Wang, G. Jiang, L. Cao, "The realization of long focal depth with a linear varied-area zone plate," J. Mod. Opt. 64, 244‒250 (2016)

Wei, L.

Q. Fan, S. Wang, Z. Yang, L. Wei, F. Hu, H. Zang, Q. Zhang, C. Wang, G. Jiang, L. Cao, "The realization of long focal depth with a linear varied-area zone plate," J. Mod. Opt. 64, 244‒250 (2016)

Q. Fan, Y. Liu, Z. Yang, L. Wei, Q. Zhang, Y. Chen, F. Hu, C. Wang, Y. Gu, W. Zhou, G. Jiang, L. Cao, "Focusing single-order diffraction transmission grating with a focusing plane perpendicular to the grating surface," Opt. Express 23, 16281‒16288 (2015)
[Crossref]

H. P. Zang, C. K. Wang, Y. L. Gao, W. M. Zhou, L. Y. Kuang, L. Wei, W. Fan, W. H. Zhang, Z. Q. Zhao, L. F. Cao, Y. Q. Gu, B. H. Zhang, G. Jiang, X. L. Zhu, C. Q. Xie, Y. D. Zhao, M. Q. Cui, "Elimination of higher-order diffraction using zigzag transmission grating in soft x-ray region," Appl. Phys. Lett. 100, 111904 (2012)
[Crossref]

Weigand, M.

Xie, C. Q.

H. P. Zang, C. K. Wang, Y. L. Gao, W. M. Zhou, L. Y. Kuang, L. Wei, W. Fan, W. H. Zhang, Z. Q. Zhao, L. F. Cao, Y. Q. Gu, B. H. Zhang, G. Jiang, X. L. Zhu, C. Q. Xie, Y. D. Zhao, M. Q. Cui, "Elimination of higher-order diffraction using zigzag transmission grating in soft x-ray region," Appl. Phys. Lett. 100, 111904 (2012)
[Crossref]

Yan, H.

Yang, Z.

Q. Fan, S. Wang, Z. Yang, L. Wei, F. Hu, H. Zang, Q. Zhang, C. Wang, G. Jiang, L. Cao, "The realization of long focal depth with a linear varied-area zone plate," J. Mod. Opt. 64, 244‒250 (2016)

Q. Fan, Y. Liu, Z. Yang, L. Wei, Q. Zhang, Y. Chen, F. Hu, C. Wang, Y. Gu, W. Zhou, G. Jiang, L. Cao, "Focusing single-order diffraction transmission grating with a focusing plane perpendicular to the grating surface," Opt. Express 23, 16281‒16288 (2015)
[Crossref]

Yasumoto, M.

S. Tamura, M. Yasumoto, N. Kamijo, Y. Suzuki, M. Awaji, A. Takeuchi, K. Uesugi, Y. Terada, H. Takano, "New approaches to fabrication of multilayer Fresnel zone plate for high-energy synchrotron radiation X-rays," Vacuum 80, 823‒827 (2006)
[Crossref]

Zang, H.

Q. Fan, S. Wang, Z. Yang, L. Wei, F. Hu, H. Zang, Q. Zhang, C. Wang, G. Jiang, L. Cao, "The realization of long focal depth with a linear varied-area zone plate," J. Mod. Opt. 64, 244‒250 (2016)

Zang, H. P.

H. P. Zang, C. K. Wang, Y. L. Gao, W. M. Zhou, L. Y. Kuang, L. Wei, W. Fan, W. H. Zhang, Z. Q. Zhao, L. F. Cao, Y. Q. Gu, B. H. Zhang, G. Jiang, X. L. Zhu, C. Q. Xie, Y. D. Zhao, M. Q. Cui, "Elimination of higher-order diffraction using zigzag transmission grating in soft x-ray region," Appl. Phys. Lett. 100, 111904 (2012)
[Crossref]

Zhang, B. H.

H. P. Zang, C. K. Wang, Y. L. Gao, W. M. Zhou, L. Y. Kuang, L. Wei, W. Fan, W. H. Zhang, Z. Q. Zhao, L. F. Cao, Y. Q. Gu, B. H. Zhang, G. Jiang, X. L. Zhu, C. Q. Xie, Y. D. Zhao, M. Q. Cui, "Elimination of higher-order diffraction using zigzag transmission grating in soft x-ray region," Appl. Phys. Lett. 100, 111904 (2012)
[Crossref]

Zhang, Q.

Q. Fan, S. Wang, Z. Yang, L. Wei, F. Hu, H. Zang, Q. Zhang, C. Wang, G. Jiang, L. Cao, "The realization of long focal depth with a linear varied-area zone plate," J. Mod. Opt. 64, 244‒250 (2016)

Q. Fan, Y. Liu, Z. Yang, L. Wei, Q. Zhang, Y. Chen, F. Hu, C. Wang, Y. Gu, W. Zhou, G. Jiang, L. Cao, "Focusing single-order diffraction transmission grating with a focusing plane perpendicular to the grating surface," Opt. Express 23, 16281‒16288 (2015)
[Crossref]

Zhang, W. H.

H. P. Zang, C. K. Wang, Y. L. Gao, W. M. Zhou, L. Y. Kuang, L. Wei, W. Fan, W. H. Zhang, Z. Q. Zhao, L. F. Cao, Y. Q. Gu, B. H. Zhang, G. Jiang, X. L. Zhu, C. Q. Xie, Y. D. Zhao, M. Q. Cui, "Elimination of higher-order diffraction using zigzag transmission grating in soft x-ray region," Appl. Phys. Lett. 100, 111904 (2012)
[Crossref]

Zhao, Y. D.

H. P. Zang, C. K. Wang, Y. L. Gao, W. M. Zhou, L. Y. Kuang, L. Wei, W. Fan, W. H. Zhang, Z. Q. Zhao, L. F. Cao, Y. Q. Gu, B. H. Zhang, G. Jiang, X. L. Zhu, C. Q. Xie, Y. D. Zhao, M. Q. Cui, "Elimination of higher-order diffraction using zigzag transmission grating in soft x-ray region," Appl. Phys. Lett. 100, 111904 (2012)
[Crossref]

Zhao, Z. Q.

H. P. Zang, C. K. Wang, Y. L. Gao, W. M. Zhou, L. Y. Kuang, L. Wei, W. Fan, W. H. Zhang, Z. Q. Zhao, L. F. Cao, Y. Q. Gu, B. H. Zhang, G. Jiang, X. L. Zhu, C. Q. Xie, Y. D. Zhao, M. Q. Cui, "Elimination of higher-order diffraction using zigzag transmission grating in soft x-ray region," Appl. Phys. Lett. 100, 111904 (2012)
[Crossref]

Zhou, W.

Zhou, W. M.

H. P. Zang, C. K. Wang, Y. L. Gao, W. M. Zhou, L. Y. Kuang, L. Wei, W. Fan, W. H. Zhang, Z. Q. Zhao, L. F. Cao, Y. Q. Gu, B. H. Zhang, G. Jiang, X. L. Zhu, C. Q. Xie, Y. D. Zhao, M. Q. Cui, "Elimination of higher-order diffraction using zigzag transmission grating in soft x-ray region," Appl. Phys. Lett. 100, 111904 (2012)
[Crossref]

Zhu, X. L.

H. P. Zang, C. K. Wang, Y. L. Gao, W. M. Zhou, L. Y. Kuang, L. Wei, W. Fan, W. H. Zhang, Z. Q. Zhao, L. F. Cao, Y. Q. Gu, B. H. Zhang, G. Jiang, X. L. Zhu, C. Q. Xie, Y. D. Zhao, M. Q. Cui, "Elimination of higher-order diffraction using zigzag transmission grating in soft x-ray region," Appl. Phys. Lett. 100, 111904 (2012)
[Crossref]

Ziegler, E.

C. David, B. Nohammer, E. Ziegler, "Wet etching of linear Fresnel zone plates for hard X-rays," Microelectron. Eng. 61-62, 987‒992 (2002)
[Crossref]

Appl. Phys. Lett. (1)

H. P. Zang, C. K. Wang, Y. L. Gao, W. M. Zhou, L. Y. Kuang, L. Wei, W. Fan, W. H. Zhang, Z. Q. Zhao, L. F. Cao, Y. Q. Gu, B. H. Zhang, G. Jiang, X. L. Zhu, C. Q. Xie, Y. D. Zhao, M. Q. Cui, "Elimination of higher-order diffraction using zigzag transmission grating in soft x-ray region," Appl. Phys. Lett. 100, 111904 (2012)
[Crossref]

J. Mod. Opt. (1)

Q. Fan, S. Wang, Z. Yang, L. Wei, F. Hu, H. Zang, Q. Zhang, C. Wang, G. Jiang, L. Cao, "The realization of long focal depth with a linear varied-area zone plate," J. Mod. Opt. 64, 244‒250 (2016)

J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. (1)

V. V. Lider, "Zone plates for X-ray focusing," J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 11, 1113‒1127 (2017)
[Crossref]

J. Vac. Sci. Technol. B (2)

J. Reinspach, M. Lindblom, M. Bertilson, O. V. Hofsten, H. M. Hertz, A. Holmberg, "13 nm high-efficiency nickel-germanium soft x-ray zone plates," J. Vac. Sci. Technol. B 29, 011012 (2011)

P. Tiwari, P. Mondal, A. K. Srivastava, H. Srivastava, R. Dhawan, S. Rai, "Fabrication of tungsten Fresnel zone plates for hard x-rays using wet etching," J. Vac. Sci. Technol. B 35, 051602 (2017)
[Crossref]

Microelectron. Eng. (2)

C. David, B. Nohammer, E. Ziegler, "Wet etching of linear Fresnel zone plates for hard X-rays," Microelectron. Eng. 61-62, 987‒992 (2002)
[Crossref]

K. Jefimovs, O. Bunk, F. Pfeiffer, D. Grolimund, J. F. V. D. Veen, C. David, "Fabrication of Fresnel zone plates for hard X-rays," Microelectron. Eng. 84, 1467‒1470 (2007)
[Crossref]

Nucl. Instrum. Methods Phys. Res. Sect. A (1)

I. A. Artyukov, I. N. Bukreeva, V. A. Chernov, R. M. Feshchenko, K. M. Golant, W. Jark, S. V. Lavrishchev, A. N. Mitrofanov, A. V. Popov, A. V. Vinogradov, "Zone plates for hard X-rays fabricated with the SPCVD technology," Nucl. Instrum. Methods Phys. Res. Sect. A 603, 66‒68 (2009)
[Crossref]

Opt. Express (2)

Opt. Lett. (1)

Phys. Rev. B (1)

C. G. Schroer, "Focusing hard x-rays to nanometer dimensions using Fresnel zone plates," Phys. Rev. B 74, 033405 (2006)

Proc. SPIE (1)

P. P. Ilinski, B. P. Lai, N. J. Bassom, J. Donald, G. J. Athas, "X-ray zone plate fabrication using a focused ion beam," Proc. SPIE 4145, 311‒316 (2001)

Ultramicroscopy (1)

J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maasdorf, M. Ritala, C. David, "Advanced thin film technology for ultrahigh resolution X-ray microscopy," Ultramicroscopy 109, 1360‒1364 (2009)
[Crossref]

Vacuum (1)

S. Tamura, M. Yasumoto, N. Kamijo, Y. Suzuki, M. Awaji, A. Takeuchi, K. Uesugi, Y. Terada, H. Takano, "New approaches to fabrication of multilayer Fresnel zone plate for high-energy synchrotron radiation X-rays," Vacuum 80, 823‒827 (2006)
[Crossref]

Other (2)

.

D. Attwood, Soft X-ray and Extreme Ultraviolet Radiation: Principles and Applications .

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