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Optica Publishing Group
  • Current Optics and Photonics
  • Vol. 5,
  • Issue 6,
  • pp. 730-737
  • (2021)

Dependence of Q Factors on Core-cladding Index Contrast in Ring Resonators

Open Access Open Access

Abstract

Transmission spectra are measured from waveguide-coupled ring resonators fabricated with SiNx on SiO2. By using ring resonators with various radii and several index contrasts, the behavior of the quality factors is investigated. As the index contrast decreases, the dominant loss is from scattering for a large resonator, while that changes from scattering loss to bending loss for a small resonator. We verify that the quality factor can be drastically improved by reducing the index contrast in large ring resonators.

© 2021 Optical Society of Korea

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2020 (4)

T. Sharma, J. Wang, B. K. Kaushik, Z. Cheng, R. Kumar, Z. Wei, X. Li, "Review of recent progress on silicon nitride-based photonic integrated circuits," IEEE Access 8, 195436‒195446 (2020)
[Crossref]

X. Xu, V. Fili, W. Szuba, M. Hiraishi, T. Inaba, T. Tawara, H. Omi, H. Gotoh, "Epitaxial single-crystal rare-earth oxide in horizontal slot waveguide for silicon-based integrated active photonic devices," Opt. Express 28, 14448‒14460 (2020)
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A. Frigg, A. Boes, G. Ren, T. G. Nguyen, D. Y. Choi, S. Gees, D. Moss, A. Mitchell, "Optical frequency comb generation with low temperature reactive sputtered silicon nitride waveguides," APL Photon. 5, (2020)
[Crossref]

C. Xiang, W. Jin, J. Guo, C. Williams, A. M. Netherton, L. Chang, P. A. Morton, J. E. Bowers, "Effects of nonlinear loss in high-Q Si ring resonators for narrow-linewidth III-V/Si heterogeneously integrated tunable lasers," Opt. Express 28, 19926‒19936 (2020)
[Crossref] [PubMed]

2019 (4)

2018 (2)

D. J. Blumenthal, R. Heidman, D. Geuzebroek, A. Leinse, C. Roeloffzen, "Silicon nitride in silicon photonics," Proc. IEEE 106, 2209‒2231 (2018)
[Crossref]

M. R. Bryan, D. J. Steiner, J. S. Cognetti, B. L. Miller, "Design manufacture and testing of a silicon nitride ring resonator-based biosensing platform," Proc. SPIE 10629, (2018)

2017 (3)

T. D. Bucio, A. Z. Khokhar, C. Lacava, S. Stankovic, G. Z. Mashanovich, P. Petropoulos, F. Y. Gardes, "Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications," J. Phys. D 50, (2017)
[Crossref]

X. Fang, L. Yang, "Thermal effect analysis of silicon microring optical switch for on-chip interconnect," J. Semicond. 38, (2017)
[Crossref]

X. Cheng, J. Hong, A. M. Spring, S. Yokoyama., "Fabrication of a high-Q factor ring resonator using LSCVD deposited Si3N4 film," Opt. Mater. Express 7, 2182‒2187 (2017)
[Crossref]

2016 (1)

2015 (1)

S. Srinivasan, M. Davenport, T. Komljenovic, J. Hulme, D. T. Spencer, J. E. Bowers, "Coupled-ring-resonator-mirror-based heterogeneous III-V silicon tunable laser," IEEE Photonics J. 7, (2015)
[Crossref]

2014 (3)

2013 (3)

2012 (2)

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, N. A. F Jaeger, "Silicon photonics resonator sensors and devices," Proc. SPIE 8236, (2012)
[Crossref]

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, R. Baets, "Silicon microring resonators," Laser Photonics Rev. 6, 47‒73 (2012)
[Crossref]

2011 (2)

C. L. Arce, K. D. Vos, T. Claes, K. Komorowska, D. V. Thourhout, P. Bienstman, "Silicon-on-insulator microring resonator sensor integrated on an optical fiber facet," IEEE Photon. Technol. Lett. 23, 890‒892 (2011)
[Crossref]

M. C. Tien, J. F. Bauters, M. J. R. Heck, D. T. Spencer, D. J. Blumenthal, J. E. Bowers, "Ultra-high quality factor planar Si3N4 ring resonators on Si substrates," Opt. Express 19, 13551‒13556 (2011)
[Crossref] [PubMed]

2009 (1)

L. Tsybeskov, D. J. Lockwood, M. Ichikawa, "Silicon photonics: CMOS going optical," Proc. IEEE 97, 1161‒1165 (2009)
[Crossref]

2008 (2)

2007 (4)

2006 (1)

2005 (2)

P. Rabiei, "Calculation of losses in micro-ring resonators with arbitrary refractive index or shape profile and its applications," J. Light. Technol. 23, 1295 (2005)
[Crossref]

M. J. Shaw, J. Guo, G. A. Vawter, S. Habermehl, C. T Sullivan, "Fabrication techniques for low-loss silicon nitride waveguides," Proc. SPIE 5720, 109‒118 (2005)

2004 (2)

T. Barwicz, M. A. Popovic, P. T. Rakich, M. R. Watts, H. A. Haus, E. P. Ippen, H. I. Smith, "Microring-resonator-based add-drop filters in SiN: fabrication and analysis," Opt. Express 12, 1437‒1442 (2004)
[Crossref] [PubMed]

M. Borselli, K. Srinivasan, P. E. Barclay, O. Painter, "Rayleigh scattering mode coupling and optical loss in silicon microdisk," Appl. Phys. Lett. 85, 3693‒3695 (2004)
[Crossref]

1990 (1)

J. P. R. Lacey, F. P. Payne, "Radiation loss from planar waveguides with random wall imperfections," IEEE Proc. J. 137, 282‒289 (1990)
[Crossref]

Abdo, I.

Ahmed, Z.

Akiyama, S.

Arce, C. L.

C. L. Arce, K. D. Vos, T. Claes, K. Komorowska, D. V. Thourhout, P. Bienstman, "Silicon-on-insulator microring resonator sensor integrated on an optical fiber facet," IEEE Photon. Technol. Lett. 23, 890‒892 (2011)
[Crossref]

Baba, T.

Baets, R.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, R. Baets, "Silicon microring resonators," Laser Photonics Rev. 6, 47‒73 (2012)
[Crossref]

Barclay, P. E.

M. Borselli, K. Srinivasan, P. E. Barclay, O. Painter, "Rayleigh scattering mode coupling and optical loss in silicon microdisk," Appl. Phys. Lett. 85, 3693‒3695 (2004)
[Crossref]

Barwicz, T.

Bauters, J. F.

Beausoleil, R. G.

Bian, Z.

D. G. Rabus, Z. Bian, A. Shakouri, "Ring Resonator Lasers using Passive Waveguides and Integrated Semiconductor Optical Amplifiers," IEEE J. Sel. Top. Quantum Electron. 13, 1249‒1256 (2007)
[Crossref]

Bienstman, P.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, R. Baets, "Silicon microring resonators," Laser Photonics Rev. 6, 47‒73 (2012)
[Crossref]

C. L. Arce, K. D. Vos, T. Claes, K. Komorowska, D. V. Thourhout, P. Bienstman, "Silicon-on-insulator microring resonator sensor integrated on an optical fiber facet," IEEE Photon. Technol. Lett. 23, 890‒892 (2011)
[Crossref]

Blumenthal, D. J.

Boes, A.

A. Frigg, A. Boes, G. Ren, T. G. Nguyen, D. Y. Choi, S. Gees, D. Moss, A. Mitchell, "Optical frequency comb generation with low temperature reactive sputtered silicon nitride waveguides," APL Photon. 5, (2020)
[Crossref]

A. Frigg, A. Boes, G. Ren, I. Abdo, D. Y. Choi, S. Gees, A. Mitchell, "Low loss CMOS-compatible silicon nitride photonics utilizing reactive sputtered thin films," Opt. Express 27, 37795‒37805 (2019)
[Crossref] [PubMed]

Bogaerts, W.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, R. Baets, "Silicon microring resonators," Laser Photonics Rev. 6, 47‒73 (2012)
[Crossref]

Bond, T. C.

Borselli, M.

M. Borselli, K. Srinivasan, P. E. Barclay, O. Painter, "Rayleigh scattering mode coupling and optical loss in silicon microdisk," Appl. Phys. Lett. 85, 3693‒3695 (2004)
[Crossref]

Bowers, J. E.

Bryan, M. R.

M. R. Bryan, D. J. Steiner, J. S. Cognetti, B. L. Miller, "Design manufacture and testing of a silicon nitride ring resonator-based biosensing platform," Proc. SPIE 10629, (2018)

Bucio, T. D.

T. D. Bucio, A. Z. Khokhar, C. Lacava, S. Stankovic, G. Z. Mashanovich, P. Petropoulos, F. Y. Gardes, "Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications," J. Phys. D 50, (2017)
[Crossref]

Chang, L.

Cheben, P.

Cheng, X.

Cheng, Z.

T. Sharma, J. Wang, B. K. Kaushik, Z. Cheng, R. Kumar, Z. Wei, X. Li, "Review of recent progress on silicon nitride-based photonic integrated circuits," IEEE Access 8, 195436‒195446 (2020)
[Crossref]

Cheung, K. C.

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, N. A. F Jaeger, "Silicon photonics resonator sensors and devices," Proc. SPIE 8236, (2012)
[Crossref]

Choi, D. Y.

A. Frigg, A. Boes, G. Ren, T. G. Nguyen, D. Y. Choi, S. Gees, D. Moss, A. Mitchell, "Optical frequency comb generation with low temperature reactive sputtered silicon nitride waveguides," APL Photon. 5, (2020)
[Crossref]

A. Frigg, A. Boes, G. Ren, I. Abdo, D. Y. Choi, S. Gees, A. Mitchell, "Low loss CMOS-compatible silicon nitride photonics utilizing reactive sputtered thin films," Opt. Express 27, 37795‒37805 (2019)
[Crossref] [PubMed]

Chrostowsk, L.

Chrostowski, L.

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, N. A. F Jaeger, "Silicon photonics resonator sensors and devices," Proc. SPIE 8236, (2012)
[Crossref]

Claes, T.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, R. Baets, "Silicon microring resonators," Laser Photonics Rev. 6, 47‒73 (2012)
[Crossref]

C. L. Arce, K. D. Vos, T. Claes, K. Komorowska, D. V. Thourhout, P. Bienstman, "Silicon-on-insulator microring resonator sensor integrated on an optical fiber facet," IEEE Photon. Technol. Lett. 23, 890‒892 (2011)
[Crossref]

Cognetti, J. S.

M. R. Bryan, D. J. Steiner, J. S. Cognetti, B. L. Miller, "Design manufacture and testing of a silicon nitride ring resonator-based biosensing platform," Proc. SPIE 10629, (2018)

Davenport, M.

S. Srinivasan, M. Davenport, T. Komljenovic, J. Hulme, D. T. Spencer, J. E. Bowers, "Coupled-ring-resonator-mirror-based heterogeneous III-V silicon tunable laser," IEEE Photonics J. 7, (2015)
[Crossref]

Davenport, M. L.

M. J. R. Heck, J. F. Bauters, M. L. Davenport, J. K. Doylend, S. Jain, G. Kurczeil, S. Srinivasan, Y. Tang, J. E. Bowers, "Hybrid silicon photonic integrated circuit technology," IEEE J. Sel. Top. Quantum Electron. 19, (2013)
[Crossref]

Delage, A.

Densmore, A.

Dirani, H. E.

Doylend, J. K.

M. J. R. Heck, J. F. Bauters, M. L. Davenport, J. K. Doylend, S. Jain, G. Kurczeil, S. Srinivasan, Y. Tang, J. E. Bowers, "Hybrid silicon photonic integrated circuit technology," IEEE J. Sel. Top. Quantum Electron. 19, (2013)
[Crossref]

Dumon, P.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, R. Baets, "Silicon microring resonators," Laser Photonics Rev. 6, 47‒73 (2012)
[Crossref]

Eggleton, B. J.

Fan, J.

Fang, X.

X. Fang, L. Yang, "Thermal effect analysis of silicon microring optical switch for on-chip interconnect," J. Semicond. 38, (2017)
[Crossref]

Fattal, D.

Fili, V.

Flueckiger, J.

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, N. A. F Jaeger, "Silicon photonics resonator sensors and devices," Proc. SPIE 8236, (2012)
[Crossref]

Frigg, A.

A. Frigg, A. Boes, G. Ren, T. G. Nguyen, D. Y. Choi, S. Gees, D. Moss, A. Mitchell, "Optical frequency comb generation with low temperature reactive sputtered silicon nitride waveguides," APL Photon. 5, (2020)
[Crossref]

A. Frigg, A. Boes, G. Ren, I. Abdo, D. Y. Choi, S. Gees, A. Mitchell, "Low loss CMOS-compatible silicon nitride photonics utilizing reactive sputtered thin films," Opt. Express 27, 37795‒37805 (2019)
[Crossref] [PubMed]

Gaeta, A. L.

Gardes, F. Y.

T. D. Bucio, A. Z. Khokhar, C. Lacava, S. Stankovic, G. Z. Mashanovich, P. Petropoulos, F. Y. Gardes, "Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications," J. Phys. D 50, (2017)
[Crossref]

Gees, S.

A. Frigg, A. Boes, G. Ren, T. G. Nguyen, D. Y. Choi, S. Gees, D. Moss, A. Mitchell, "Optical frequency comb generation with low temperature reactive sputtered silicon nitride waveguides," APL Photon. 5, (2020)
[Crossref]

A. Frigg, A. Boes, G. Ren, I. Abdo, D. Y. Choi, S. Gees, A. Mitchell, "Low loss CMOS-compatible silicon nitride photonics utilizing reactive sputtered thin films," Opt. Express 27, 37795‒37805 (2019)
[Crossref] [PubMed]

Geuzebroek, D.

D. J. Blumenthal, R. Heidman, D. Geuzebroek, A. Leinse, C. Roeloffzen, "Silicon nitride in silicon photonics," Proc. IEEE 106, 2209‒2231 (2018)
[Crossref]

Gotoh, H.

Grist, S.

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, N. A. F Jaeger, "Silicon photonics resonator sensors and devices," Proc. SPIE 8236, (2012)
[Crossref]

Grosse, P.

Guo, J.

H, M.

Habermehl, S.

M. J. Shaw, J. Guo, G. A. Vawter, S. Habermehl, C. T Sullivan, "Fabrication techniques for low-loss silicon nitride waveguides," Proc. SPIE 5720, 109‒118 (2005)

Hafezi, M.

Haus, H. A.

Heck, M. J. R.

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W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, R. Baets, "Silicon microring resonators," Laser Photonics Rev. 6, 47‒73 (2012)
[Crossref]

Hiraishi, M.

Hirayama, N.

Hoekman, M.

Hong, J.

Horikawa, T.

Hulme, J.

S. Srinivasan, M. Davenport, T. Komljenovic, J. Hulme, D. T. Spencer, J. E. Bowers, "Coupled-ring-resonator-mirror-based heterogeneous III-V silicon tunable laser," IEEE Photonics J. 7, (2015)
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Ichikawa, M.

L. Tsybeskov, D. J. Lockwood, M. Ichikawa, "Silicon photonics: CMOS going optical," Proc. IEEE 97, 1161‒1165 (2009)
[Crossref]

Imai, M.

Inaba, T.

Ippen, E. P.

Jaeger, N. A. F

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, N. A. F Jaeger, "Silicon photonics resonator sensors and devices," Proc. SPIE 8236, (2012)
[Crossref]

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M. J. R. Heck, J. F. Bauters, M. L. Davenport, J. K. Doylend, S. Jain, G. Kurczeil, S. Srinivasan, Y. Tang, J. E. Bowers, "Hybrid silicon photonic integrated circuit technology," IEEE J. Sel. Top. Quantum Electron. 19, (2013)
[Crossref]

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Janz, S.

Jeong, D. C.

Ji, X.

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Joshi, C.

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T. Sharma, J. Wang, B. K. Kaushik, Z. Cheng, R. Kumar, Z. Wei, X. Li, "Review of recent progress on silicon nitride-based photonic integrated circuits," IEEE Access 8, 195436‒195446 (2020)
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Kerdiles, S.

Khan,

Khan, M. H.

Khokhar, A. Z.

T. D. Bucio, A. Z. Khokhar, C. Lacava, S. Stankovic, G. Z. Mashanovich, P. Petropoulos, F. Y. Gardes, "Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications," J. Phys. D 50, (2017)
[Crossref]

Kim, B. Y.

Komljenovic, T.

S. Srinivasan, M. Davenport, T. Komljenovic, J. Hulme, D. T. Spencer, J. E. Bowers, "Coupled-ring-resonator-mirror-based heterogeneous III-V silicon tunable laser," IEEE Photonics J. 7, (2015)
[Crossref]

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C. L. Arce, K. D. Vos, T. Claes, K. Komorowska, D. V. Thourhout, P. Bienstman, "Silicon-on-insulator microring resonator sensor integrated on an optical fiber facet," IEEE Photon. Technol. Lett. 23, 890‒892 (2011)
[Crossref]

Kumar, R.

T. Sharma, J. Wang, B. K. Kaushik, Z. Cheng, R. Kumar, Z. Wei, X. Li, "Review of recent progress on silicon nitride-based photonic integrated circuits," IEEE Access 8, 195436‒195446 (2020)
[Crossref]

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M. J. R. Heck, J. F. Bauters, M. L. Davenport, J. K. Doylend, S. Jain, G. Kurczeil, S. Srinivasan, Y. Tang, J. E. Bowers, "Hybrid silicon photonic integrated circuit technology," IEEE J. Sel. Top. Quantum Electron. 19, (2013)
[Crossref]

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T. D. Bucio, A. Z. Khokhar, C. Lacava, S. Stankovic, G. Z. Mashanovich, P. Petropoulos, F. Y. Gardes, "Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications," J. Phys. D 50, (2017)
[Crossref]

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J. P. R. Lacey, F. P. Payne, "Radiation loss from planar waveguides with random wall imperfections," IEEE Proc. J. 137, 282‒289 (1990)
[Crossref]

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Lee, J.-W.

Leinse, A.

Li, X.

T. Sharma, J. Wang, B. K. Kaushik, Z. Cheng, R. Kumar, Z. Wei, X. Li, "Review of recent progress on silicon nitride-based photonic integrated circuits," IEEE Access 8, 195436‒195446 (2020)
[Crossref]

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L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, N. A. F Jaeger, "Silicon photonics resonator sensors and devices," Proc. SPIE 8236, (2012)
[Crossref]

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Lipson, M.

Lockwood, D. J.

L. Tsybeskov, D. J. Lockwood, M. Ichikawa, "Silicon photonics: CMOS going optical," Proc. IEEE 97, 1161‒1165 (2009)
[Crossref]

Lopinski, G.

Ma, M.

Manipatruni, S.

S. Manipatruni, Q. Xu, B. Schmidt, J. Shakya, M. Lipson, High speed carrier injection 18 Gb/s silicon micro-ring electro-optic modulator in Proc. IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings .

Marpaung, D.

Mashanovich, G. Z.

T. D. Bucio, A. Z. Khokhar, C. Lacava, S. Stankovic, G. Z. Mashanovich, P. Petropoulos, F. Y. Gardes, "Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications," J. Phys. D 50, (2017)
[Crossref]

McKinnon, R.

Miller, B. L.

M. R. Bryan, D. J. Steiner, J. S. Cognetti, B. L. Miller, "Design manufacture and testing of a silicon nitride ring resonator-based biosensing platform," Proc. SPIE 10629, (2018)

Mischki, T.

Mitchell, A.

A. Frigg, A. Boes, G. Ren, T. G. Nguyen, D. Y. Choi, S. Gees, D. Moss, A. Mitchell, "Optical frequency comb generation with low temperature reactive sputtered silicon nitride waveguides," APL Photon. 5, (2020)
[Crossref]

A. Frigg, A. Boes, G. Ren, I. Abdo, D. Y. Choi, S. Gees, A. Mitchell, "Low loss CMOS-compatible silicon nitride photonics utilizing reactive sputtered thin films," Opt. Express 27, 37795‒37805 (2019)
[Crossref] [PubMed]

Moldenhauer, L.

Monat, C.

Moon, H.-J.

Morrison, B.

Morton, P. A.

Moss, D.

A. Frigg, A. Boes, G. Ren, T. G. Nguyen, D. Y. Choi, S. Gees, D. Moss, A. Mitchell, "Optical frequency comb generation with low temperature reactive sputtered silicon nitride waveguides," APL Photon. 5, (2020)
[Crossref]

Muller, J.

Netherton, A. M.

Nguyen, T. G.

A. Frigg, A. Boes, G. Ren, T. G. Nguyen, D. Y. Choi, S. Gees, D. Moss, A. Mitchell, "Optical frequency comb generation with low temperature reactive sputtered silicon nitride waveguides," APL Photon. 5, (2020)
[Crossref]

Nie, B.

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, N. A. F Jaeger, "Silicon photonics resonator sensors and devices," Proc. SPIE 8236, (2012)
[Crossref]

Noguchi, Y.

Okawachi, Y.

Omi, H.

Ouellet, E.

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, N. A. F Jaeger, "Silicon photonics resonator sensors and devices," Proc. SPIE 8236, (2012)
[Crossref]

Painter, O.

M. Borselli, K. Srinivasan, P. E. Barclay, O. Painter, "Rayleigh scattering mode coupling and optical loss in silicon microdisk," Appl. Phys. Lett. 85, 3693‒3695 (2004)
[Crossref]

Pant, R.

Pargon, E.

Park, A. H. K.

Payne, F. P.

J. P. R. Lacey, F. P. Payne, "Radiation loss from planar waveguides with random wall imperfections," IEEE Proc. J. 137, 282‒289 (1990)
[Crossref]

Petit-Etienne, C.

Petropoulos, P.

T. D. Bucio, A. Z. Khokhar, C. Lacava, S. Stankovic, G. Z. Mashanovich, P. Petropoulos, F. Y. Gardes, "Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications," J. Phys. D 50, (2017)
[Crossref]

Popovic, M. A.

Post, E.

Qi, M.

Rabiei, P.

P. Rabiei, "Calculation of losses in micro-ring resonators with arbitrary refractive index or shape profile and its applications," J. Light. Technol. 23, 1295 (2005)
[Crossref]

Rabus, D. G.

D. G. Rabus, Z. Bian, A. Shakouri, "Ring Resonator Lasers using Passive Waveguides and Integrated Semiconductor Optical Amplifiers," IEEE J. Sel. Top. Quantum Electron. 13, 1249‒1256 (2007)
[Crossref]

Rakich, P. T.

Ratner, D. M.

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, N. A. F Jaeger, "Silicon photonics resonator sensors and devices," Proc. SPIE 8236, (2012)
[Crossref]

Ren, G.

A. Frigg, A. Boes, G. Ren, T. G. Nguyen, D. Y. Choi, S. Gees, D. Moss, A. Mitchell, "Optical frequency comb generation with low temperature reactive sputtered silicon nitride waveguides," APL Photon. 5, (2020)
[Crossref]

A. Frigg, A. Boes, G. Ren, I. Abdo, D. Y. Choi, S. Gees, A. Mitchell, "Low loss CMOS-compatible silicon nitride photonics utilizing reactive sputtered thin films," Opt. Express 27, 37795‒37805 (2019)
[Crossref] [PubMed]

Roeloffzen, C.

Schmid, J. H.

Schmidt, B.

Q. Xu, B. Schmidt, J. Shakya, M. Lipson, "Cascade silicon micro-ring modulators for WDM optical interconnection," Opt. Express 14, 9431‒9436 (2006)
[Crossref] [PubMed]

S. Manipatruni, Q. Xu, B. Schmidt, J. Shakya, M. Lipson, High speed carrier injection 18 Gb/s silicon micro-ring electro-optic modulator in Proc. IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings .

Schmidt, S. A.

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, N. A. F Jaeger, "Silicon photonics resonator sensors and devices," Proc. SPIE 8236, (2012)
[Crossref]

Sciancalepore, C.

Selvaraja, S. K.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, R. Baets, "Silicon microring resonators," Laser Photonics Rev. 6, 47‒73 (2012)
[Crossref]

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D. G. Rabus, Z. Bian, A. Shakouri, "Ring Resonator Lasers using Passive Waveguides and Integrated Semiconductor Optical Amplifiers," IEEE J. Sel. Top. Quantum Electron. 13, 1249‒1256 (2007)
[Crossref]

Shakya, J.

Q. Xu, B. Schmidt, J. Shakya, M. Lipson, "Cascade silicon micro-ring modulators for WDM optical interconnection," Opt. Express 14, 9431‒9436 (2006)
[Crossref] [PubMed]

S. Manipatruni, Q. Xu, B. Schmidt, J. Shakya, M. Lipson, High speed carrier injection 18 Gb/s silicon micro-ring electro-optic modulator in Proc. IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings .

Sharma, T.

T. Sharma, J. Wang, B. K. Kaushik, Z. Cheng, R. Kumar, Z. Wei, X. Li, "Review of recent progress on silicon nitride-based photonic integrated circuits," IEEE Access 8, 195436‒195446 (2020)
[Crossref]

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M. J. Shaw, J. Guo, G. A. Vawter, S. Habermehl, C. T Sullivan, "Fabrication techniques for low-loss silicon nitride waveguides," Proc. SPIE 5720, 109‒118 (2005)

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Shen, H.

Shi, W.

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, N. A. F Jaeger, "Silicon photonics resonator sensors and devices," Proc. SPIE 8236, (2012)
[Crossref]

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Smith, H. I.

Spencer, D. T.

Spring, A. M.

Srinivasan, K.

M. Borselli, K. Srinivasan, P. E. Barclay, O. Painter, "Rayleigh scattering mode coupling and optical loss in silicon microdisk," Appl. Phys. Lett. 85, 3693‒3695 (2004)
[Crossref]

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S. Srinivasan, M. Davenport, T. Komljenovic, J. Hulme, D. T. Spencer, J. E. Bowers, "Coupled-ring-resonator-mirror-based heterogeneous III-V silicon tunable laser," IEEE Photonics J. 7, (2015)
[Crossref]

M. J. R. Heck, J. F. Bauters, M. L. Davenport, J. K. Doylend, S. Jain, G. Kurczeil, S. Srinivasan, Y. Tang, J. E. Bowers, "Hybrid silicon photonic integrated circuit technology," IEEE J. Sel. Top. Quantum Electron. 19, (2013)
[Crossref]

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T. D. Bucio, A. Z. Khokhar, C. Lacava, S. Stankovic, G. Z. Mashanovich, P. Petropoulos, F. Y. Gardes, "Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications," J. Phys. D 50, (2017)
[Crossref]

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M. R. Bryan, D. J. Steiner, J. S. Cognetti, B. L. Miller, "Design manufacture and testing of a silicon nitride ring resonator-based biosensing platform," Proc. SPIE 10629, (2018)

Strouse, G. F.

Sullivan, C. T

M. J. Shaw, J. Guo, G. A. Vawter, S. Habermehl, C. T Sullivan, "Fabrication techniques for low-loss silicon nitride waveguides," Proc. SPIE 5720, 109‒118 (2005)

Szuba, W.

Takahashi, H.

Tang, Y.

M. J. R. Heck, J. F. Bauters, M. L. Davenport, J. K. Doylend, S. Jain, G. Kurczeil, S. Srinivasan, Y. Tang, J. E. Bowers, "Hybrid silicon photonic integrated circuit technology," IEEE J. Sel. Top. Quantum Electron. 19, (2013)
[Crossref]

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Taylor, J. M.

Thourhout, D. V.

C. L. Arce, K. D. Vos, T. Claes, K. Komorowska, D. V. Thourhout, P. Bienstman, "Silicon-on-insulator microring resonator sensor integrated on an optical fiber facet," IEEE Photon. Technol. Lett. 23, 890‒892 (2011)
[Crossref]

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W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, R. Baets, "Silicon microring resonators," Laser Photonics Rev. 6, 47‒73 (2012)
[Crossref]

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Trieu, H. K.

Tsybeskov, L.

L. Tsybeskov, D. J. Lockwood, M. Ichikawa, "Silicon photonics: CMOS going optical," Proc. IEEE 97, 1161‒1165 (2009)
[Crossref]

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Vaerenbergh, T. Van

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, R. Baets, "Silicon microring resonators," Laser Photonics Rev. 6, 47‒73 (2012)
[Crossref]

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M. J. Shaw, J. Guo, G. A. Vawter, S. Habermehl, C. T Sullivan, "Fabrication techniques for low-loss silicon nitride waveguides," Proc. SPIE 5720, 109‒118 (2005)

Vos, K. D.

C. L. Arce, K. D. Vos, T. Claes, K. Komorowska, D. V. Thourhout, P. Bienstman, "Silicon-on-insulator microring resonator sensor integrated on an optical fiber facet," IEEE Photon. Technol. Lett. 23, 890‒892 (2011)
[Crossref]

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W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, R. Baets, "Silicon microring resonators," Laser Photonics Rev. 6, 47‒73 (2012)
[Crossref]

Waldron, P.

Wang, J.

T. Sharma, J. Wang, B. K. Kaushik, Z. Cheng, R. Kumar, Z. Wei, X. Li, "Review of recent progress on silicon nitride-based photonic integrated circuits," IEEE Access 8, 195436‒195446 (2020)
[Crossref]

Wang, X.

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, N. A. F Jaeger, "Silicon photonics resonator sensors and devices," Proc. SPIE 8236, (2012)
[Crossref]

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Webb, M.

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, N. A. F Jaeger, "Silicon photonics resonator sensors and devices," Proc. SPIE 8236, (2012)
[Crossref]

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T. Sharma, J. Wang, B. K. Kaushik, Z. Cheng, R. Kumar, Z. Wei, X. Li, "Review of recent progress on silicon nitride-based photonic integrated circuits," IEEE Access 8, 195436‒195446 (2020)
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Xiang, C.

Xiao, S.

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Xu, H.

Xu, Q.

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Q. Xu, B. Schmidt, J. Shakya, M. Lipson, "Cascade silicon micro-ring modulators for WDM optical interconnection," Opt. Express 14, 9431‒9436 (2006)
[Crossref] [PubMed]

S. Manipatruni, Q. Xu, B. Schmidt, J. Shakya, M. Lipson, High speed carrier injection 18 Gb/s silicon micro-ring electro-optic modulator in Proc. IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings .

Xu, X.

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Youssef, L.

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L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, N. A. F Jaeger, "Silicon photonics resonator sensors and devices," Proc. SPIE 8236, (2012)
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Zhao, Y

APL Photon. (1)

A. Frigg, A. Boes, G. Ren, T. G. Nguyen, D. Y. Choi, S. Gees, D. Moss, A. Mitchell, "Optical frequency comb generation with low temperature reactive sputtered silicon nitride waveguides," APL Photon. 5, (2020)
[Crossref]

Appl. Phys. Lett. (1)

M. Borselli, K. Srinivasan, P. E. Barclay, O. Painter, "Rayleigh scattering mode coupling and optical loss in silicon microdisk," Appl. Phys. Lett. 85, 3693‒3695 (2004)
[Crossref]

IEEE Access (1)

T. Sharma, J. Wang, B. K. Kaushik, Z. Cheng, R. Kumar, Z. Wei, X. Li, "Review of recent progress on silicon nitride-based photonic integrated circuits," IEEE Access 8, 195436‒195446 (2020)
[Crossref]

IEEE J. Sel. Top. Quantum Electron. (2)

M. J. R. Heck, J. F. Bauters, M. L. Davenport, J. K. Doylend, S. Jain, G. Kurczeil, S. Srinivasan, Y. Tang, J. E. Bowers, "Hybrid silicon photonic integrated circuit technology," IEEE J. Sel. Top. Quantum Electron. 19, (2013)
[Crossref]

D. G. Rabus, Z. Bian, A. Shakouri, "Ring Resonator Lasers using Passive Waveguides and Integrated Semiconductor Optical Amplifiers," IEEE J. Sel. Top. Quantum Electron. 13, 1249‒1256 (2007)
[Crossref]

IEEE Photon. Technol. Lett. (1)

C. L. Arce, K. D. Vos, T. Claes, K. Komorowska, D. V. Thourhout, P. Bienstman, "Silicon-on-insulator microring resonator sensor integrated on an optical fiber facet," IEEE Photon. Technol. Lett. 23, 890‒892 (2011)
[Crossref]

IEEE Photonics J. (1)

S. Srinivasan, M. Davenport, T. Komljenovic, J. Hulme, D. T. Spencer, J. E. Bowers, "Coupled-ring-resonator-mirror-based heterogeneous III-V silicon tunable laser," IEEE Photonics J. 7, (2015)
[Crossref]

IEEE Proc. J. (1)

J. P. R. Lacey, F. P. Payne, "Radiation loss from planar waveguides with random wall imperfections," IEEE Proc. J. 137, 282‒289 (1990)
[Crossref]

J. Light. Technol. (1)

P. Rabiei, "Calculation of losses in micro-ring resonators with arbitrary refractive index or shape profile and its applications," J. Light. Technol. 23, 1295 (2005)
[Crossref]

J. Opt. Soc. Korea (1)

J. Phys. D (1)

T. D. Bucio, A. Z. Khokhar, C. Lacava, S. Stankovic, G. Z. Mashanovich, P. Petropoulos, F. Y. Gardes, "Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications," J. Phys. D 50, (2017)
[Crossref]

J. Semicond. (1)

X. Fang, L. Yang, "Thermal effect analysis of silicon microring optical switch for on-chip interconnect," J. Semicond. 38, (2017)
[Crossref]

Laser Photonics Rev. (1)

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, R. Baets, "Silicon microring resonators," Laser Photonics Rev. 6, 47‒73 (2012)
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Opt. Express (16)

S. Xiao, M. H. Khan, H. Shen, M. Qi, "Compact silicon microring resonators with ultra-low propagation loss in the C band," Opt. Express 15, 14467‒14475 (2007)
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S. Xiao, M. H, Khan, H. Shen, M. Qi, "Modeling and measurement of losses in silicon-on-insulator resonators and bends," Opt. Express 15, 10553‒10561 (2007)
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J. E. Heebner, T. C. Bond, J. S. Kallman, "Generalized formulations for performance due to bending and edge scattering loss in microdisk resonators," Opt. Express 15, 4452‒4473 (2007)
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T. Baba, S. Akiyama, M. Imai, N. Hirayama, H. Takahashi, Y. Noguchi, T. Horikawa, T. Usuki, "50-Gb/s ring-resonator-based silicon modulator," Opt. Express 21, 11869‒11876 (2013)
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C. Xiang, W. Jin, J. Guo, C. Williams, A. M. Netherton, L. Chang, P. A. Morton, J. E. Bowers, "Effects of nonlinear loss in high-Q Si ring resonators for narrow-linewidth III-V/Si heterogeneously integrated tunable lasers," Opt. Express 28, 19926‒19936 (2020)
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H. E. Dirani, L. Youssef, C. Petit-Etienne, S. Kerdiles, P. Grosse, C. Monat, E. Pargon, C. Sciancalepore, "Ultra-loss tightly confining Si3N4 waveguides and high-Q microresonators," Opt. Express 27, 30726‒30740 (2019)
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Q. Xu, B. Schmidt, J. Shakya, M. Lipson, "Cascade silicon micro-ring modulators for WDM optical interconnection," Opt. Express 14, 9431‒9436 (2006)
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